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High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C25D-017/00
출원번호 UP-0566202 (2006-12-01)
등록번호 US-7704352 (2010-05-20)
발명자 / 주소
  • Lopatin, Sergey
  • Kovarsky, Nicolay Y.
  • Eaglesham, David
  • Dukovic, John O.
  • Gay, Charles
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Patterson & Sheridan, LLP
인용정보 피인용 횟수 : 16  인용 특허 : 36

초록

Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein re

대표청구항

We claim: 1. An apparatus for forming a metal layer on a solar cell substrate, comprising: a masking plate having a body, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; an electri

이 특허에 인용된 특허 (36)

  1. Chen LinLin, Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece.
  2. Cohen, Adam L., Apparatus for electrochemical fabrication using a conformable mask.
  3. Kanai Masahiro (Hikone JPX) Fujioka Yasushi (Hikone JPX) Yoshino Takehito (Nagahama JPX) Hori Tadashi (Nagahama JPX), Apparatus for forming a deposited film.
  4. Loch David M. (Seattle WA), Automated alternating polarity pulse electrolytic processing of electrically conductive substances.
  5. Barnett Allen M. (Newark DE) Hall Robert B. (Newark DE) Rand James A. (Oxford PA) Ford David H. (Wilmington DE), Deposited-silicon film solar cell.
  6. Hey, H. Peter W.; Dordi, Yezdi, Dynamic pulse plating for high aspect ratio features.
  7. Landau Uziel, Electro-chemical deposition system and method of electroplating on substrates.
  8. John Michael Lowe GB, Electro-plating method and apparatus using a cathode having a plurality of contacts.
  9. Russak Michael A. (Farmingdale NY), Electrochemical photovoltaic cell having ternary alloy film.
  10. Woo Christy Mei-Chu ; Iacoponi John A. ; Yang Kai, Electroplating uniformity by diffuser design.
  11. Kumar Raj ; Rattey Cheryle, Flexible substrate plating rack.
  12. Dilts David A. (Gates Mills OH) Brauneck Timothy W. (Thompson OH), Flexible, interconnected array of amorphous semiconductor photovoltaic cells.
  13. Curtis Stephen A. (Austin TX) Gedney Ronald W. (Vestal NY) Schrottke Gustav (Austin TX), Free form packaging of specific functions within a computer system.
  14. Maurice P. Bianchi, Gallium nitride collector grid solar cell.
  15. Adamic ; Jr. Fred W., Inverted dielectric isolation process.
  16. Mulligan,William P.; Cudzinovic,Michael J.; Pass,Thomas; Smith,David; Swanson,Richard M., Metal contact structure for solar cell and method of manufacture.
  17. Tsuchibuchi Akira (Sayama JPX) Kobayashi Takashi (Itsukaichimachi JPX), Method and apparatus for selectively plating a material.
  18. Wang, Hougong; Zheng, Bo; Dixit, Girish; Chen, Fusen, Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature.
  19. Simpson Cindy Reidsema ; Mikkola Robert Douglas ; Herrick Matthew T. ; Baker Brett Caroline ; Pena David Moralez ; Acosta Edward ; Chowdhury Rina ; Azrak Marijean ; Goldberg Cindy Kay ; Islam Mohamme, Method for forming a copper layer over a semiconductor wafer.
  20. Chou, Shih-Wei; Tsai, Ming-Hsing, Method for improving an electrodeposition process through use of a multi-electrode assembly.
  21. Nogami Takeshi ; Dubin Valery ; Cheung Robin, Method of electroplating a copper or copper alloy interconnect.
  22. Cole ; Jr. Herbert Stanley ; Daum Wolfgang, Method of fabricating metallized vias with steep walls.
  23. Bozler Carl O. (Sudbury MA) Fan John C. C. (Chestnut Hill MA) McClelland Robert W. (Norwell MA), Method of producing sheets of crystalline material and devices made therefrom.
  24. Nee Chin-Cheng (27 Doris Rd. Framingham MA 01701) Weil Rolf (47 Carteret St. West Orange NJ 07052), Multilayer pulsed-current electrodeposition process.
  25. Kishi Yasuo (Osaka JPX) Taniguchi Hiroyuki (Osaka JPX) Sakai Souichi (Osaka JPX) Katoh Hitoshi (Osaka JPX) Mizukami Atsuo (Osaka JPX), Photovoltaic device and its manufacturing method.
  26. Hui Wang, Plating apparatus and method.
  27. Kawakami Soichiro (Hikone JPX), Process for producing a defect-free photoelectric conversion device.
  28. Kapur Vijay K. (Northridge CA) Choudary Uppala V. (Chatsworth CA) Chu Alan K. P. (Granada Hills CA), Process of forming a compound semiconductive material.
  29. Dubin Valery ; Ting Chiu ; Cheung Robin W., Pulse electroplating copper or copper alloys.
  30. Sing Miu W. (Kowloon HKX) Sing Fung Y. (Aberdeen HKX), Pulse electroplating process.
  31. Ahmad Umar M. (Hopewell Junction NY) Berger Daniel G. (Poughkeepsie NY) Kumar Ananda (Hopewell Junction NY) LaMaire Susan J. (Yorktown Heights NY) Prasad Keshav B. (New Paltz NY) Ray Sudipta K. (Wapp, Selective plating method for forming integral via and wiring layers.
  32. Mulligan,William P.; Cudzinovic,Michael J.; Pass,Thomas; Smith,David; Kaminar,Neil; McIntosh,Keith; Swanson,Richard M., Solar cell and method of manufacture.
  33. Nakata Josuke,JPX, Spheric semiconductor device, method for manufacturing the same, and spheric semiconductor device material.
  34. Pavani,Luca; Kaminar,Neil; Uralwong,Pongsthorn; Phu,Thomas; Rose,Douglas H.; Pass,Thomas, Substrate carrier for electroplating solar cells.
  35. Ludemann, Ralf, Thin-film solar array system and method for producing the same.
  36. Lohmeyer, Manfred; Bauer, Stefan; Danielzik, Burkhard; Mohl, Wolfgang; Freitag, Nina, Thin-film solar cells and method of making.

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  1. Babayan, Steve; Brainard, Robert; Chari, Arvind; de la Fuente Vornbrock, Alejandro; Murali, Venkatesan; Prabhu, Gopal; Rudin, Arthur; Subbaraman, Venkateswaran; Tanner, David; Xu, Dong, Adaptable free-standing metallic article for semiconductors.
  2. Weiner, Kurt H.; Verma, Gaurav, Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells.
  3. Weiner, Kurt H.; Verma, Gaurav, Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells.
  4. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  5. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  6. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  7. Chandrasekhar, Prasanna; Zay, Brian J.; Modes, Sr., Richard; LaRosa, Anthony; Hobin, Kyle, Electrochemical deposition apparatus and methods of using the same.
  8. Chandrasekhar, Prasanna; Zay, Brian J.; Laganis, Edward J.; Romanov, Vasily V.; LaRosa, Anthony J., Electrochromic eyewear.
  9. Babayan, Steve; Brainard, Robert; Chari, Arvind; de la Fuente Vornbrock, Alejandro; Murali, Venkatesan; Prabhu, Gopal; Subbaraman, Venkateswaran; Xu, Dong; Rudin, Arthur; Tanner, David, Free-standing metallic article for semiconductors.
  10. Babayan, Steve; Brainard, Robert; Chari, Arvind; de la Fuente Vornbrock, Alejandro; Murali, Venkatesan; Prabhu, Gopal; Subbaraman, Venkateswaran; Xu, Dong; Rudin, Arthur; Tanner, David, Free-standing metallic article for semiconductors.
  11. Arvin, Charles L.; Cox, Harry; Deligianni, Hariklia; Scott, George J., Method and apparatus for controlling and monitoring the potential.
  12. Arvin, Charles L.; Cox, Harry; Deligianni, Hariklia; Scott, George J., Method and apparatus for controlling and monitoring the potential.
  13. Chandrasekhar, Prasanna; Chai, Yanjie, Potentiostat/galvanostat with digital interface.
  14. Ramappa, Deepak, Reducing surface recombination and enhancing light trapping in solar cells.
  15. Chandrasekhar, Prasanna, Variable-emittance electrochromic devices and methods of preparing the same.
  16. Albin, David S.; Johnson, James Neil; Zhao, Yu; Korevaar, Bastiaan Arie, Varying cadmium telluride growth temperature during deposition to increase solar cell reliability.
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