IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
UP-0566202
(2006-12-01)
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등록번호 |
US-7704352
(2010-05-20)
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발명자
/ 주소 |
- Lopatin, Sergey
- Kovarsky, Nicolay Y.
- Eaglesham, David
- Dukovic, John O.
- Gay, Charles
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출원인 / 주소 |
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대리인 / 주소 |
Patterson & Sheridan, LLP
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인용정보 |
피인용 횟수 :
16 인용 특허 :
36 |
초록
▼
Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein re
Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.
대표청구항
▼
We claim: 1. An apparatus for forming a metal layer on a solar cell substrate, comprising: a masking plate having a body, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; an electri
We claim: 1. An apparatus for forming a metal layer on a solar cell substrate, comprising: a masking plate having a body, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; an electrical contact formed on the first surface of the masking plate and in communication with a first power supply; a thrust plate that is adapted to urge a metallized surface of a substrate against the electrical contact and the first surface of the masking plate; a first electrode that is in electrical communication with the first power supply, wherein the first power supply is configured to electrically bias the first electrode relative to the electrical contact; and a second electrode that is in electrical communication with a second power supply which is adapted to bias the second electrode relative to the electrical contact or the first electrode. 2. The apparatus of claim 1, further comprising a pump that is adapted to deliver an electrolyte to a space formed between a portion of a seed layer exposed by the apertures and the electrode. 3. The apparatus of claim 1, wherein the masking plate is formed from a material selected from a group consisting of glass, plastic and ceramic. 4. The apparatus of claim 1, wherein the metallized surface is on a light receiving side of the solar cell substrate and the sum of the cross-sectional areas of the apertures at the first surface of the masking plate is less than 30% of the surface area of the light receiving side of the solar cell substrate. 5. The apparatus of claim 1, wherein the metallized surface is on a non-light receiving side of the solar cell substrate and the sum of the cross-sectional areas of the apertures at the first surface of the masking plate is greater than 70% of the surface area of the non-light receiving side of the solar cell substrate. 6. The apparatus of claim 1, further comprising a diffuser plate that is positioned between the electrode and the metallized surface, wherein the diffuser plate is adapted to rotate relative to the metallized surface of the substrate. 7. The apparatus of claim 1, further comprising a diffuser plate that is positioned between the electrode and the metallized surface, wherein the diffuser plate is adapted to move linearly or vibrate relative to the metallized surface of the substrate. 8. An apparatus for forming a metal layer on a solar cell substrate, comprising: a masking plate comprising a body formed of dielectric material, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; a plurality of electrical contacts formed on the first surface of the masking plate; a thrust plate adapted to urge a surface of a substrate against the plurality of electrical contacts and the first surface of the masking plate; an actuator coupled to the thrust plate; a first electrode that is in electrical communication with a first power supply, wherein the first power supply is configured to electrically bias the first electrode relative to the plurality of electrical contacts; and a second electrode that is in electrical communication with a second power supply which is adapted to bias the second electrode relative to the plurality of electrical contacts or the first electrode. 9. The apparatus of claim 8, wherein the first electrode is non-consummable. 10. The apparatus of claim 8, wherein the first electrode is formed from a material selected from a group consisting of titanium, platinum, copper and phosphorus. 11. The apparatus of claim 10, wherein the first electrode has a plurality of holes disposed therethrough. 12. The apparatus of claim 8, further comprising a diffuser plate that is positioned between the first electrode and the substrate. 13. The apparatus of claim 12, further comprising a polymeric material disposed at least partially on the first surface of the masking plate. 14. The apparatus of claim 12, further comprising a pump that is adapted to deliver an electrolyte to a space formed between a portion of the seed layer exposed by the plurality of apertures and the first electrode. 15. The apparatus of claim 14, wherein the plurality of electrical contacts are formed from a material selected from the group consisting of platinum, gold, nickel, graphite and copper. 16. An apparatus for forming a metal layer on a solar cell substrate, comprising: a masking plate comprising a body, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; a plurality of electrical contacts at least partially recessed within the first surface of the masking plate; a thrust plate adapted to urge a surface of a substrate against the plurality of electrical contacts and the first surface of the masking plate; a first electrode electrically coupled to a first power supply, the first electrode having a plurality of holes disposed therethrough; and a second electrode that is in electrical communication with a second power supply which is adapted to bias the second electrode relative to the plurality of electrical contacts or the first electrode. 17. The apparatus of claim 16, wherein the masking plate is formed from a material selected from a group consisting of glass, plastic and ceramic. 18. The apparatus of claim 17, further comprising a polymeric material disposed at least partially on the first surface of the masking plate. 19. The apparatus of claim 16, further comprising a diffuser plate that is positioned between the first electrode and the substrate. 20. The apparatus of claim 16, wherein the first electrode is non-consumable. 21. The apparatus of claim 16, wherein the plurality of electrical contacts comprise conductive clips or conductive pins. 22. The apparatus of claim 21, wherein the plurality of electrical contacts are formed from a material selected from the group consisting of platinum, gold, nickel, graphite or copper. 23. An apparatus for forming a metal layer on a solar cell substrate, comprising: a tank that has a processing region which is adapted to retain a volume of an electrolyte; an array of plating cells positioned in the processing region, wherein each plating cell in the array comprises: a masking plate having a body, a first surface and a second surface, the masking plate having a plurality of apertures that extend through the body between the first surface and the second surface; an electrical contact formed on the first surface of the masking plate and in communication with a first power supply; a thrust plate that is adapted to urge a metallized surface of a substrate against the electrical contact and the first surface of the masking plate; a first electrode that is in electrical communication with the first power supply, wherein the first power supply is configured to electrically bias the first electrode relative to the electrical contact; and a second electrode that is in electrical communication with a second power supply which is adapted to bias the second electrode relative to the electrical contact or the first electrode. 24. The apparatus of claim 23, wherein the electrical contact is formed from a material selected from the group consisting of platinum, gold, nickel, graphite and copper. 25. The apparatus of claim 23, wherein the masking plate is formed from a material selected from a group consisting of glass, plastic and ceramic. 26. The apparatus of claim 23, further comprising a pump that is adapted to deliver an electrolyte to each of the plating cells positioned in the processing region. 27. The apparatus of claim 23, wherein the first electrode is formed from a material selected from a group consisting of titanium, platinum, copper and phosphorus. 28. The apparatus of claim 23, further comprising a controller that is adapted to control the power supply in each plating cell so that a metal layer can be formed on each substrate at the same time.
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