최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | UP-0106824 (2008-04-21) |
등록번호 | US-7743728 (2010-07-19) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 18 인용 특허 : 562 |
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool). In one embodiment, the cluster tool is adapted to perform a track lithography process in which a photosensitive material is applied to a substrate, patterne
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool). In one embodiment, the cluster tool is adapted to perform a track lithography process in which a photosensitive material is applied to a substrate, patterned in a stepper/scanner, and then removed in a developing process completed in the cluster tool. In one embodiment of the cluster tool, substrates are grouped together in groups of two or more for transfer or processing to improve system throughput, reduce the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, and thus increase system reliability. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.
We claim: 1. A cluster tool for processing substrates, comprising: a first processing rack comprising a first substrate processing chamber and a second substrate processing chamber, wherein the second substrate processing chamber is positioned at a first vertical distance from the first substrate p
We claim: 1. A cluster tool for processing substrates, comprising: a first processing rack comprising a first substrate processing chamber and a second substrate processing chamber, wherein the second substrate processing chamber is positioned at a first vertical distance from the first substrate processing chamber; a second processing rack comprising a third substrate processing chamber and a fourth substrate processing chamber, wherein the fourth substrate processing chamber is positioned at a second vertical distance from the third substrate processing chamber, and wherein the first and third substrate processing chambers are each positioned at a fixed distance in a horizontal direction from each other and the second and fourth substrate processing chambers are each positioned at a fixed distance in the horizontal direction from each other; and a first robot assembly having a first robot blade and a second robot blade, wherein the first robot blade receives a first substrate from the first processing chamber and the second robot blade receives a second substrate from the second processing chamber generally simultaneously, and then deposit the first substrate in the third substrate processing chamber and the second substrate in the fourth substrate processing chamber; and a second robot assembly having a first robot blade and a second robot blade, wherein the first robot blade receives the first substrate from the first processing chamber and the second robot blade receives the second substrate from the second processing chamber generally simultaneously, and then deposit the first substrate in the third substrate processing chamber and the second substrate in the fourth substrate processing chamber. 2. The cluster tool of claim 1, wherein the first robot assembly deposits the first substrate in the third substrate processing chamber and the second substrate in the fourth substrate processing chamber generally simultaneously and the second robot assembly deposits the first substrate in the third substrate processing chamber and the second substrate in the fourth substrate processing chamber generally simultaneously. 3. The cluster tool of claim 2, wherein each of the first and second robot assemblies further comprises: a robot positioning a substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a vertical actuator assembly positioning the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is positioning the robot in a direction generally parallel to the first direction. 4. The cluster tool of claim 3, wherein each of the horizontal motion assemblies in the first and second robot assemblies further comprises: one or more walls that form an interior region in which the motor is enclosed; and one or more fan assemblies that are in fluid communication with the interior region, wherein the one or more fan assemblies are creating a subatmospheric pressure in the interior region. 5. The cluster tool of claim 3, wherein the vertical motion assembly is a lift rail assembly. 6. The cluster tool of claim 3, wherein the horizontal motion assembly is a slide assembly. 7. The cluster tool of claim 2, wherein the first, second, third and fourth substrate processing chambers each have a first side that is aligned along the horizontal direction. 8. The cluster tool of claim 2, wherein the first and second robot assemblies are positioned in a central location between the first substrate processing chamber and the third substrate processing chamber. 9. The cluster tool of claim 2, further comprising: a controller controlling the movements of a substrate through the substrate processing chambers using the robot assemblies; and a memory coupled to the controller, the memory comprising a computer-readable medium having a computer-readable program embodied therein for directing the operation of the cluster tool, the computer-readable program comprising: computer instructions to control movement of the first and second robot assemblies, comprising: (i) storing one or more command tasks for the robot assemblies in the memory; (ii) review command tasks for the first robot assembly retained in the memory; (iii) review command tasks for the second robot assembly retained in the memory; and (iv) move command tasks from the first robot assembly to the second robot assembly or the second robot assembly to the first robot assembly to balance the availability of each robot assembly. 10. The cluster tool of claim 2, further comprising: a first processing rack comprising two or more groups of two or more substrate processing chambers stacked in a vertical direction, wherein the first processing rack comprises the first, second, third, and fourth substrate processing chambers. 11. The cluster tool of claim 10, further comprising: a second processing rack comprising two or more groups of two or more substrate processing chambers stacked in a vertical direction. 12. The cluster tool of claim 1, wherein each of the first and second robot assemblies further comprises: a robot positioning a substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a vertical actuator assembly positioning the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor positioning the robot in a direction generally parallel to the first direction. 13. The cluster tool of claim 12, wherein each of the horizontal motion assemblies in the first and second robot assemblies further comprises: one or more walls that form an interior region in which the motor is enclosed; and one or more fan assemblies that are in fluid communication with the interior region, wherein the one or more fan assemblies creating a subatmospheric pressure in the interior region. 14. The cluster tool of claim 12, wherein each of the vertical motion assemblies is a lift rail assembly. 15. The cluster tool of claim 12, wherein each of the horizontal motion assemblies is a slide assembly. 16. The cluster tool of claim 1, further comprising: a controller controlling the movements of a substrate through the substrate processing chambers using the robot assemblies; and a memory coupled to the controller, the memory comprising a computer-readable medium having a computer-readable program embodied therein for directing the operation of the cluster tool, the computer-readable program comprising: computer instructions to control movement of the first and second robot assemblies, comprising: (i) storing one or more command tasks for the robot assemblies in the memory; (ii) review command tasks for the first robot assembly retained in the memory; (iii) review command tasks for the second robot assembly retained in the memory; and (iv) move command tasks from the first robot assembly to the second robot assembly or the second robot assembly to the first robot assembly to balance the availability of each robot assembly.
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