초록 ▼

A thermal mass flow controller or mass flow meter having a novel sensor housing that reduces heat conduction from the housing mounting plate or base to the sensor itself. The housing also greatly minimizes the thermal gradient that can result from the uneven application of heat to the housing base.

A thermal mass flow controller or mass flow meter having a novel sensor housing that reduces heat conduction from the housing mounting plate or base to the sensor itself. The housing also greatly minimizes the thermal gradient that can result from the uneven application of heat to the housing base. This reduction is accomplished in part by the use of one or more thermal isolation slots to isolate the upper portion of the housing (which holds the sensor) from the lower portion of the housing. Heat transfer to the sensor housing is also minimized by raising the middle portion of the bottom of the housing so that thermal contact is made between the base and the housing only at the two ends of the housing.

대표청구항 ▼

We claim as follows: 1. A thermal flow meter comprising: a thermal flow sensor to provide a first electrical signal indicative of a flow rate of a fluid flowing between the fluid inlet and the fluid outlet; a sensor housing enclosing the thermal flow sensor, the housing having one or more thermal i

We claim as follows: 1. A thermal flow meter comprising: a thermal flow sensor to provide a first electrical signal indicative of a flow rate of a fluid flowing between the fluid inlet and the fluid outlet; a sensor housing enclosing the thermal flow sensor, the housing having one or more thermal isolation slots extending completely through the housing from front to back, the slots dividing the housing into an upper portion and lower portion by extending laterally partially but not all the way across the housing so that the upper and lower portions of the housing are continuous in the medial portion of the housing; and a sensor housing base, the housing attached to said base at two or more laterally spaced contact points. 2. The thermal flow meter of claim 1 wherein said one or more thermal isolation slots comprises two thermal isolation slots, each slot extending from a lateral edge of the housing toward the other slot so that the slots divide the housing into an upper portion and lower portion, said upper and lower portion being continuous only in the center portion of the housing. 3. The thermal flow meter of claim 2 wherein the length of said thermal isolation slots combined is equal to or greater than one half of the lateral width of the housing. 4. The thermal flow meter of claim 2 wherein said thermal slots extend upward from the edges of the housing at an angle of approximately 10 degrees to 60 degrees relative to the bottom of the housing. 5. The thermal flow meter of claim 2 wherein said thermal slots extend upward from the edges of the housing at an angle of approximately 30 degrees relative to the bottom of the housing. 6. The thermal flow meter of claim 1 wherein a center region of the bottom of the housing is raised so that when the housing is attached to the base, the center region of the bottom of the housing does not make contact with the surface of the base. 7. The thermal flow meter of claim 6 wherein the housing and the base when attached are only in thermal contact at the two lateral ends of the bottom of the housing. 8. The thermal flow meter of claim 1 wherein said thermal flow sensor comprises a thermal mass flow sensor. 9. The thermal flow meter of claim 1 wherein the sensor housing is formed from copper, aluminum, or a zinc-aluminum alloy. 10. The thermal flow meter of claim 1 wherein the sensor housing is formed from a metal casting. 11. The thermal flow meter of claim 1 wherein the housing is formed from a first material and wherein the thermal isolation slots are at least partially filled with a second material having a lower thermal conductivity than the first material. 12. The thermal flow meter of claim 1 wherein the upper and lower portions are only thermally connected through the medial portion of the housing. 13. The thermal flow meter of claim 1 wherein the medial portion of the housing has a width that is less than half of the width of the entire housing. 14. The thermal flow meter of claim 1 wherein the medial portion of the housing has a width that is less than one third of the width of the entire housing. 15. The thermal flow meter of claim 1 wherein the medial portion of the housing has a width that is from 0.15 inches to 0.25 inches. 16. The thermal flow meter of claim 1 wherein the medial portion of the housing has a thickness that is equal to or greater than the full thickness of the remainder of the housing. 17. The thermal flow meter of claim 1 wherein the thermal isolation slots have a height greater than 0.015 inches. 18. The thermal flow meter of claim 1 wherein the thermal isolation slots have a height of 0.015 to 0.030 inches. 19. The thermal flow meter of claim 1 wherein the sensor housing base is formed from stainless steel. 20. The thermal flow meter of claim 1 further comprising one or more additional holes or slots formed through the medial portion of the housing from front to back to form at least two distinct thermal pathways from the lower medial portion to the upper medial portion. 21. A thermal mass flow controller comprising: the thermal flow meter of claim 1 wherein the thermal flow meter is a thermal mass flow meter for providing an electronic signal indicative of mass flow of a fluid; and a valve for controlling a fluid flow in accordance with signals from the thermal mass flow meter. 22. A thermal mass flow controller comprising: a thermal mass flow meter, including: a mass flow sensor including a capillary tube and wire winding to provide a first electrical signal indicative of a mass flow rate of a fluid flowing through the thermal mass flow meter; and a sensor housing enclosing the thermal mass flow sensor, the housing divided into an upper portion and a lower portion by one or more thermal isolation slots, the thermal connection between the upper and lower housing portions being divided into a central region having a high thermal conductivity and side regions having thermal conductivity lower than that of the central region; a sensor housing base supporting the sensor housing; and a valve for controlling a fluid in accordance with signals from the mass flow meter. 23. The thermal mass flow controller of claim 1 in which the one or more thermal isolation slots extend through the housing from front-to-back. 24. The thermal mass flow controller of claim 1 in which the one or more thermal isolation slots extend from each edge of the housing to the central region. 25. The thermal mass flow controller of claim 1 in which the one or more thermal isolation slots extend from the central region and terminate before the edge of the housing. 26. The thermal mass flow controller of claim 1 in which the one or more thermal isolation slots extend at a non-zero angle relative to the plane of the top surface of the sensor housing base. 27. The thermal mass flow controller of claim 26 in which the one or more thermal isolation slots extend at an angle of between 10 degrees and 60 degrees relative to the plane of the top surface of the sensor housing base. 28. The thermal mass flow controller of claim 27 in which the one or more slots extend from the edge of the housing to the central portion, the housing thickness of the central region being the same as the housing thickness of the upper and lower portions above and below the central region. 29. The thermal mass flow controller of claim 22 wherein the sensor housing has bottom surface with a raised center region so that when the housing is attached to the base, the center region of the bottom surface of the housing does not make contact with the upper surface of the base. 30. The thermal mass flow controller of claim 22 wherein the housing and the base when attached are only in thermal contact at two points. 31. The thermal mass flow controller of claim 23 wherein said two thermal contact points are located at each lateral end of the housing. 32. A thermal flow meter, comprising: a thermal flow sensor to provide a first signal indicative of a flow rate of a fluid flowing through the thermal flow meter; and a sensor housing enclosing the thermal mass flow sensor, the housing divided into an upper portion and a lower portion by one or more thermal isolation slots, the thermal connection between the upper and lower housing portions being divided into a central region having a high thermal conductivity and side regions having thermal conductivity lower than that of the central region. 33. The thermal flow meter of claim 32 wherein the thermal flow sensor comprises a mass flow sensor including a capillary tube and wire winding to provide a first electrical signal indicative of a mass flow rate of a fluid flowing through the capillary tube. 34. The thermal flow meter of claim 32 wherein the sensor housing has bottom surface with a raised center region so that when the housing is attached to the base, the center region of the bottom surface of the housing does not make contact with the upper surface of the base. 35. The thermal mass flow controller of claim 22 wherein the only the lower portion of the housing is in direct thermal contact with the base. 36. The thermal mass flow controller of claim 23 wherein the lower portion of the housing and the base have two direct thermal contacts, one contact at either lateral end of the lower portion of the housing. 37. A method of measuring flow, comprising passing fluid through a capillary tube, the capillary tube being supported in a sensor housing divided into an upper portion and a lower portion by one or more thermal isolation slots, the thermal connection between the upper and lower housing portions being divided into a central region having a high thermal conductivity and side regions having thermal conductivity lower than that of the central region. 38. A housing for a fluid flow sensor, comprising a thermally conductive block divided into an upper portion and a lower portion by one or more thermal isolation slots, the thermal connection between the upper and lower housing portions being divided into a central region having a high thermal conductivity and side regions having thermal conductivity lower than that of the central region.