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Tin phosphate barrier film, method, and apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 UP-0553469 (2009-09-03)
등록번호 US-7749811 (2010-07-26)
발명자 / 주소
  • Aitken, Bruce Gardiner
  • An, Chong Pyung
  • Hanson, Benjamin Zain
  • Quesada, Mark Alejandro
출원인 / 주소
  • Corning Incorporated
대리인 / 주소
    Able, Kevin M.
인용정보 피인용 횟수 : 7  인용 특허 : 25

초록

A method is disclosed for inhibiting oxygen and moisture penetration of a device comprising the steps of depositing a tin phosphate low liquidus temperature (LLT) inorganic material on at least a portion of the device to create a deposited tin phosphate LLT material, and heat treating the deposited

대표청구항

What is claimed is: 1. A method of inhibiting oxygen and moisture penetration of a device, comprising the steps of: heating a tin phosphate starting material in a tungsten boat to react the tungsten of the boat with the tin phosphate starting material; evaporating the reacted tin phosphate starting

이 특허에 인용된 특허 (25)

  1. Ohkawa, Koujiro; Tsuzuki, Atsuo; Yoshikata, Kuniaki, Barrier film and method for production thereof.
  2. Suh Dong-hack,KRX ; Chung Eun-young,KRX ; Rhee Tae-hyung,KRX, Bis(dialkylmaleimide) derivative and polyetherimide for optical communications formed therefrom.
  3. Tonar William L. ; Van Ast Michael J., Electrochromic assembly including at least one polymeric substrate.
  4. Weaver, Michael S., Electrode structure of el device.
  5. Graff, Gordon Lee; Martin, Peter Maclyn; Gross, Mark Edward; Shi, Ming Kun; Hall, Michael Gene; Mast, Eric Sidney, Encapsulated display devices.
  6. Graff, Gordon L.; Gross, Mark E.; Affinito, John D.; Shi, Ming-Kun; Hall, Michael; Mast, Eric, Environmental barrier material for organic light emitting device and method of making.
  7. Carcia, Peter Francis; McLean, Robert Scott, Flexible organic electronic device with improved resistance to oxygen and moisture degradation.
  8. Haluska Loren Andrew, Hermetic substrate coatings in an inert gas atmosphere.
  9. Bailey Richard A., Hydrogen barrier encapsulation techniques for the control of hydrogen induced degradation of ferroelectric capacitors in conjunction with multilevel metal processing for non-volatile integrated circu.
  10. Tsu Robert ; Asano Isamu,JPX ; Iijima Shinpei,JPX ; McKee William R., Integrated circuit capacitor.
  11. Dumesnil Maurice E. (Los Altos Hills CA) Finkelstein Leo (San Francisco CA), Low temperature sealing glass compositions.
  12. Hwang Ki-hyun,KRX ; Park Jae-young,KRX ; Byun Jae-ho,KRX, Method for forming a tantalum oxide capacitor using two-step rapid thermal nitridation.
  13. Jean-Pierre Tahon BE; Bart Verlinden BE; Luc Leenders BE; Rudi Goedeweeck BE, Method for making an electric or electronic module comprising a glass laminate.
  14. Lou Chine-Gie,TWX, Method for manufacturing stacked capacitor.
  15. Themont Jean-Pierre,FRX ; Theron Jean-Jacques B.,FRX, Method of making glass structures for flat panel displays.
  16. Francis Gaylord L. (Painted Post NY) Morena Robert (Caton NY), Non-lead sealing glasses.
  17. Leong Daniel,GBX ; Harry Milton Anthony,CAX ; Homewood Kevin,GBX ; Reeson Kirkby Karen Joy,GBX, Optoelectronic semiconductor devices.
  18. Hokamura Sadakazu (Yamato JPX) Shinohara Toshio (Yokohama JPX) Nomura Ryoichi (Yokohama JPX) Aritomi Mitsutoshi (Ibaraki JPX) Yoshida Yuji (Ibaraki JPX), Process for forming a corrosion resistant high-build type coating.
  19. Finkelstein Leo (San Francisco CA) Dumesnil Maurice E. (Los Altos Hills CA) Tetschlag Richard R. (San Jose CA), Sealing glass compositions.
  20. Cheng-Lien Chiang TW, Semiconductor module with encapsulant base.
  21. Dumesnil Maurice E. (Los Altos Hills CA) Finkelstein Leo (San Francisco CA), Silver phosphate glass die-attach composition.
  22. Tick, Paul A., Tin-phosphorus oxyfluoride glass containing aromatic organic compound.
  23. Sanford Leon M. (Painted Post NY) Tick Paul A. (Corning NY), Tin-phosphorus oxyfluoride glasses.
  24. Gordon Lee Graff ; Mark Edward Gross ; Ming Kun Shi ; Michael Gene Hall ; Peter Maclyn Martin ; Eric Sidney Mast, Ultrabarrier substrates.
  25. Jimenez Jorge R. ; Pellegrini Paul W., Voltage tunable schottky diode photoemissive infrared detector.

이 특허를 인용한 특허 (7)

  1. Kim, Min-Soo; Park, Jin-Woo; Hyun, Won-Sik, Display panel and manufacturing method of the same.
  2. Aitken, Bruce Gardiner; Bookbinder, Dana Craig; Garner, Sean Matthew; Quesada, Mark Alejandro, Flexible substrates having a thin-film barrier.
  3. Bellman, Robert Alan; Chuang, Ta-Ko; Manley, Robert George; Quesada, Mark Alejandro; Sachenik, Paul Arthur, High rate deposition systems and processes for forming hermetic barrier layers.
  4. Park, Jin-Woo, Method of preparing organic light-emitting device, substrate for transiting inorganic layer, and organic light-emitting device.
  5. Song, Seung-Yong; Jung, Sun-Young, Organic light emitting display apparatus and method of manufacturing the same.
  6. Park, Jin-Woo, Organic light-emitting device having low temperature viscosity transition (LVT) inorganic material.
  7. Lee, Jae-Sun; Choi, Su-Hyuk; Lee, Ung-Soo, Organic light-emitting display device and method of manufacturing the same.
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