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A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a t

A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

대표청구항 ▼

That which is claimed: 1. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressur

That which is claimed: 1. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port wherein the second chamber is physically oriented between the first and third chambers; a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective electro-statically actuated valves, the controller being further configured to apply a first electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber, removing the first electrical potential as the first electrical signal, and after removing the first electrical potential, applying a second electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber wherein the first and second electrical potentials have reversed polarities. 2. A valve assembly according to claim 1 wherein the main housing further defines a fourth chamber configured to be coupled to a second output port, and a fifth chamber configured to be coupled to a low pressure exhaust port wherein the fourth chamber is physically oriented between the first and fifth chambers, the valve further comprising: a third electro-statically actuated valve between the first and fourth chambers wherein the third electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the fourth chamber responsive to a third electrical signal; and a fourth electro-statically actuated valve between the fourth and fifth chambers wherein the fourth electro-statically actuated valve allows or substantially blocks fluid communication between the fourth chamber and the fifth chamber responsive to a fourth electrical signal. 3. A valve assembly according to claim 2 wherein the first, second, third, and fourth electro-statically actuated valves are provided on a same substrate. 4. A valve assembly according to claim 2 wherein the third and fifth chambers are coupled to a same low pressure exhaust port. 5. A valve assembly according to claim 2 wherein the third and fifth chambers are coupled to different low pressure exhaust ports. 6. A valve assembly according to claim 1 wherein the first and second electro-statically actuated valves comprise respective first and second valve chips with each valve chip including at least one respective electro-statically actuated valve flap thereon. 7. A valve assembly according to claim 6 wherein the first valve chip is spaced apart from the second valve chip. 8. A valve assembly according to claim 6 wherein the first valve chip is non-parallel with respect to the second valve chip. 9. A valve assembly according to claim 6 wherein the first valve chip comprises, a substrate having first and second opposing faces, at least one hole through the substrate between the first and second faces, and a pair of input pads thereon, and at least one electro-statically actuated valve flap on the substrate with the at least one valve flap being associated with the at least one hole in the substrate, wherein the at least one flexible valve flap is configured to open or substantially block the at least one hole responsive to the first electrical signal applied to the pair of input pads, wherein the substrate is supported in the housing at edges thereof so that central portions of the first and second faces of the substrate are respectively exposed to the first and second chambers and so that a fluid seal is provided between the housing and edges of the substrate. 10. A valve assembly according to claim 1 wherein the main housing further defines a fourth chamber configured to be coupled to a second output port and a fifth chamber configured to be coupled to a low pressure exhaust port, the valve assembly further comprising: a third electro-statically actuated valve between the first and fourth chambers wherein the third electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the fourth chamber responsive to a third electrical signal; a fourth electro-statically actuated valve between the fourth and fifth chambers wherein the fourth electro-statically actuated valve allows or substantially blocks fluid communication between the fourth chamber and the fifth chamber responsive to a fourth electrical signal; and wherein the controller is configured to generate the first, second, third, and fourth electrical signals for the respective electro-statically actuated valves. 11. A valve assembly according to claim 1 wherein the controller is configured to generate the first and second electrical signals for the respective electro-statically actuated valves. 12. A valve assembly according to claim 11 wherein the controller includes memory programmed with first operating instructions defining a first sequence of operations and second operating instructions defining a second sequence of operations, wherein one of the first and second operating instructions are selected for operation at a given time. 13. A valve assembly according to claim 12 wherein the first operating instructions are selected for use during a first time period and wherein the second operating instructions are selected for use during a second time period. 14. A valve assembly according to claim 11 wherein the controller generates the electrical signals using electrical energy from at least one of a battery, a capacitor, a fuel cell, and/or a radio isotope. 15. A valve assembly according to claim 11 wherein the controller includes a rechargeable power supply, wherein the controller generates the electrical signals using electrical energy from the rechargeable power source. 16. A valve assembly according to claim 11 wherein the controller generates the electrical signals using an external power source. 17. A valve assembly according to claim 16 wherein the external power source comprises a DC power source in the range of about 3 volts DC to about 48 volts DC and/or an AC power source in the range of about 24 volts AC to about 240 volts AC. 18. A valve assembly according to claim 11 wherein the controller includes a transistor coupled in series with a power source and a coil wherein the transistor and the coil are configured to generate electrical power for the electrical signals having a higher voltage than the power source. 19. A valve assembly according to claim 11 wherein the controller includes a capacitive charge pump configured to generate electrical power for the electrical signals having a higher voltage than the power source. 20. A valve assembly according to claim 11 wherein the controller includes a transistor coupled in series with a power source and a transformer wherein the transistor and the transformer are configured to generate electrical power for the electrical signals having a higher voltage than the power source. 21. A valve assembly according to claim 11 wherein the controller includes a transistor coupled in series with a power source and an autotransformer wherein the transistor and autotransformer are configured to generate electrical power for the electrical signals having a higher voltage than the power source. 22. A valve assembly according to claim 11 wherein the controller generates the electrical signals using electrical energy generated using at least one of light, heat, and/or mechanical vibration. 23. A valve assembly according to claim 11 wherein the controller generates the electrical signals using electrical energy generated using an environmental source of energy proximate to the controller. 24. A valve assembly according to claim 23 wherein the controller generates the electrical energy using at least one of light, heat, and/or mechanical vibration, and wherein the electrical energy is stored using at least one of a battery, capacitor, and/or inductor. 25. A valve assembly according to claim 1 wherein the controller includes memory configured to be programmed with first operating instructions defining a first sequence of operations and to be reprogrammed with second operating instructions defining a second sequence of operations. 26. A valve assembly comprising: a main housing defining at Least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port wherein the second chamber is physically oriented between the first and third chambers; a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal wherein the first electro-statically actuated valve comprises a substrate having an electro- statically actuated valve member thereon and a pair of terminals, and wherein the electro- statically actuated valve member is configured to allow fluid communication between the first and second chambers in an open position spaced apart from the substrate and to substantially block fluid communication between the first and second chambers in a closed position adjacent the substrate wherein the first electrical signal is applied to the pair of terminals; a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective electro-statically actuated valves, the controller being further configured to apply a first electrical potential having a first magnitude as the first electrical signal applied to the pair of terminals when the valve member is in the open position spaced apart from the substrate to actuate the valve member to the closed position adjacent -the substrate substantially blocking fluid communication between the first and second chambers, and after actuating the valve member to the closed position adjacent the substrate, to apply a second electrical potential having a second magnitude as the first electrical signal applied to the pair of terminals to maintain the valve member in the closed position adjacent the substrate to thereby maintain substantial blocking of fluid communication between the first and second chambers, wherein the first magnitude is greater than the second magnitude. 27. A valve assembly according to claim 26 wherein the controller is further configured to apply a first electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber, removing the first electrical potential as the first electrical signal, and after removing the first electrical potential, applying a second electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber wherein the first and second electrical potentials have reversed polarities. 28. A valve assembly according to claim 1 wherein the first and second electro-statically actuated valves are provided on a same substrate. 29. A valve assembly according to claim 1 wherein the first and second electro-statically actuated valves are provided on respective first and second substrates. 30. A valve assembly according to claim 29 wherein the first and second substrates are provided in a non-parallel arrangement. 31. A valve assembly according to claim 1 further comprising: a pressure sensor configured to measure a pressure in the second chamber; and wherein the controller is coupled to the pressure sensor and to the first and second electro-statically actuated valves, wherein the controller is configured to generate the first and second electrical signals for the respective electro-statically actuated valves to maintain a pressure in the second chamber responsive to the pressure measured in the second chamber. 32. A valve assembly according to claim 1 further comprising: a spool-type valve including a body defining a central cavity and a supply and actuator ports coupled to the central cavity and including a spool in the central cavity, wherein the spool is moveable between first and second positions in the central cavity so that in the first position of the spool fluid communication is provided between the supply and actuator ports and so that in the second position of the spool fluid communication is substantially blocked between the supply and actuator ports, and wherein an end of the cavity is in fluid communication with the second chamber; and wherein the controller is coupled to the first and second electro-statically actuated valves, wherein the controller is configured to generate the first and second electrical signals for the respective electro-statically actuated valves to control movement of the spool between the first and second positions. 33. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port, wherein the second chamber is physically oriented between the first and third chambers; a first photo-lithographically fabricated valve between the first and second chambers wherein the first photo-lithographically fabricated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal wherein the first photo-lithographically fabricated valve comprises a substrate having an electro-statically actuated valve member thereon and a pair of terminals, and wherein the electro-statically actuated valve member is configured to allow fluid communication between the first and second chambers in an open position spaced apart from the substrate and to substantially block fluid communication between the first and second chambers in a closed position adjacent the substrate wherein the first electrical signal is applied to the pair of terminals; a second photo-lithographically fabricated valve between the second and third chambers wherein the second photo-lithographically fabricated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective photo -lithographically fabricated valves, the controller being further configured to apply a first electrical potential having a first magnitude as the first electrical signal applied to the pair of terminals when the valve member is in the open position spaced apart from the substrate to actuate the valve member to the closed position adjacent the substrate substantially blocking fluid communication between the first and second chambers, and after actuating the valve member to the closed position adjacent the substrate, to apply a second electrical potential having a second magnitude as the first electrical signal applied to the pair of terminals to maintain the valve member in the closed position adjacent the substrate to thereby maintain substantial blocking of fluid communication between the first and second chambers, wherein the first magnitude is greater than the second magnitude. 34. A valve assembly according to claim 33 wherein the first photo -lithographically fabricated valve comprises a substrate of at least one of glass, silicon, and/or quartz having at least one hole through the substrate. 35. A valve assembly according to claim 34 wherein the first photo- lithographically fabricated valve comprises at least one electro-statically actuated valve member adjacent to the at least one hole through the substrate. 36. A valve assembly according to claim 35 wherein the valve member comprises a flexible valve flap. 37. A valve assembly according to claim 1, wherein the second chamber is configured to be coupled to the output port is separate from the first and third chambers. 38. A valve assembly according to claim 29 wherein the first and second substrates are spaced apart. 39. A valve assembly according to claim 38 wherein the first and second substrates are arranged in different planes. 40. A valve assembly according to claim 1 further comprising: a pneumatic actuator including an actuator housing and a moveable piston in the actuator housing, wherein the moveable piston separates first and second actuator chambers of the actuator housing and wherein the output port provides fluid coupling between the second chamber of the main housing and the first actuator chamber; and wherein the controller is coupled to the first and second electro-statically actuated valves, wherein the controller is configured to generate the first and second electrical signals for the respective electro-statically actuated valves to control movement of the piston. 41. A valve assembly according to claim 18 wherein the controller includes a transistor coupled in series with a power source and a transformer wherein the transistor and the transformer are configured to generate electrical power for the electrical signals having a higher voltage than the power source. 42. A valve assembly according to claim 18 wherein the controller includes a transistor coupled in series with a power source and an autotransformer wherein the transistor and autotransformer are configured to generate electrical power for the electrical signals having a higher voltage than the power source. 43. A valve assembly according to claim 1 wherein the first electro-statically actuated valve is physically oriented between the first and second chambers and between the first and third chambers, and wherein the second electro-statically actuated valve is physically oriented between the second and third chambers and between the first and third chambers. 44. A valve assembly according to claim 2 wherein the first electro-statically actuated valve is physically oriented between the first and second chambers and between the first and third chambers, wherein the second electro-statically actuated valve is physically oriented between the second and third chambers and between the first and third chambers, wherein the third electro-statically actuated valve is physically oriented between the first and fourth chambers and between the first and fifth chambers, and wherein the fourth electro-statically actuated valve is physically oriented between the fourth and fifth chambers and between the first and fifth chambers. 45. A valve assembly according to claim 3 wherein the same substrate comprises a same planar substrate. 46. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port; a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective electro- statically actuated valves, the controller being further configured to apply a first electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber, removing the first electrical potential as the first electrical signal, and after removing the first electrical potential, applying a second electrical potential as the first electrical signal to actuate the first electro-statically actuated valve thereby substantially blocking fluid communication between the first chamber and the second chamber wherein the first and second electrical potentials have reversed polarities. 47. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port; a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal wherein the first electro-statically actuated valve comprises a substrate having an electro- statically actuated valve member thereon and a pair of terminals wherein the electro-statically actuated valve member is configured to allow fluid communication between the first and second chambers in an open position spaced apart from the substrate and to substantially block fluid communication between the first and second chambers in a closed position adjacent the substrate wherein the first electrical signal is applied to the pair of terminals; a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective electo- statically actuated valves, the controller being further configured to apply a first electrical potential having a first magnitude as the first electrical signal applied to the pair of terminals when the valve member is in the open position spaced apart from the substrate to actuate the valve member to the closed position adjacent the substrate substantially blocking fluid communication between the first and second chambers, and after actuating the valve member to the closed position adjacent the substrate, to apply a second electrical potential having a second magnitude as the first electrical signal applied to the pair of terminals to maintain the valve member in the closed position adjacent the substrate to thereby maintain substantial blocking of fluid communication between the first and second chambers, wherein the first magnitude is greater than the second magnitude. 48. A valve assembly comprising: a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port, wherein the second chamber is physically oriented between the first and third chambers; a first photo-lithographically fabricated valve between the first and second chambers wherein the first photo-lithographically fabricated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; a second photo-lithographically fabricated valve between the second and third chambers wherein the second photo-lithographical fabricated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal; and a controller configured to generate the electrical signals for the respective photo- lithographically fabricated valves, the controller being further configured to apply a first electrical potential as the first electrical signal to actuate the first photo-lithographically fabricated valve thereby substantially blocking fluid communication between the first chamber and the second chamber, removing the first electrical potential as the first electrical signal, and after removing the first electrical potential, applying a second electrical potential as the first electrical signal to actuate the first photo-lithographically fabricated valve thereby substantially blocking fluid communication between the first chamber and the second chamber wherein the first and second electrical potentials have reversed polarities.