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A filter membrane, methods of making such filter membrane and apparatus employing such filter membrane are disclosed, in which the filter membrane is a monolithic polymeric membrane that includes a polymeric filter layer including a micron-scale precision-shaped pores and a polymeric support layer t

A filter membrane, methods of making such filter membrane and apparatus employing such filter membrane are disclosed, in which the filter membrane is a monolithic polymeric membrane that includes a polymeric filter layer including a micron-scale precision-shaped pores and a polymeric support layer that has a precision-shaped porous support structure for the filter layer. Several methods are disclosed for making such a membrane using micromachining techniques, including lithographic, laser ablation and x-ray treatment techniques. Several filter apparatus employing such a membrane are also disclosed.

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The invention claimed is: 1. A method for making a monolithic polymeric filter membrane comprising at least a filter layer including micron-scale precision-shaped pores and a support layer including a precision-shaped support structure for the filter layer, the method comprising: providing a polyme

The invention claimed is: 1. A method for making a monolithic polymeric filter membrane comprising at least a filter layer including micron-scale precision-shaped pores and a support layer including a precision-shaped support structure for the filter layer, the method comprising: providing a polymeric film having first and second sides; forming the filter membrane layer by removing selected material from the first side of the polymeric film to define the precision-shaped micron-scale pores of the filter layer; and forming the support structure layer by removing selected material from the second side of said polymeric film to define the precision-shaped porous support structure, the pores communicating with the porous support structure to allow the passage of filtrate therethrough. 2. The method of claim 1 in which the at least one layer is formed by exposing the film to laser light through a mask defining a pattern to remove selected portions of said polymeric film defined by pattern to form the pores or support layer. 3. The method of claim 1 in which at least one of the steps of removing material includes ablating the film by laser. 4. The method of claim 3 employing an excimer laser to ablate said film. 5. The method of claim 1 in which the support layer is thicker than the filter layer. 6. The method of claim 5 wherein the support layer is thicker than the filter layer by a factor of between about 2 and 250. 7. The method of claim 2 wherein a continuous web of the photoimageable polymeric film is continuously supplied and the pattern is progressively created on said film and selected material is progressively removed to define the pores or support structure. 8. The method of claim 1 in which a continuous web of laser ablatable polymeric film is continuously supplied and selected material is progressively removed to define the pores or support structure. 9. The method of claim 2 in which said polymeric film comprises a polyimide. 10. The method of claim 1 in which the support structure comprises a first plurality of spaced apart support struts in which said struts are spaced apart a distance substantially greater than the size of said micron-scale pores. 11. The method of claim 10 in which said support structure comprises a second plurality of spaced apart struts intersecting said first plurality of struts to define a support grid. 12. The method of claim 10 in which said struts are spaced apart a distance in the range of about 50 to 1000 microns. 13. The filter membrane of claim 10 in which the struts are between about 10 and 100 microns in width. 14. The method of claim 1 in which the support structure comprises a grid. 15. The method of claim 1 in which the support structure comprises at least two sublayers, a first sublayer of a selected porosity and a second sublayer of different porosity than the first sublayer and disposed between the first sublayer and the filter layer. 16. The method of claim 14 in which the support grid comprises at least two subgrids, a first subgrid comprising struts of selected width and spaced apart a selected distance and a second subgrid disposed between the first subgrid and the filter layer, the second subgrid including support struts of different width or spacing than the struts in the first subgrid. 17. The method of claim 14 in which the grid comprises a plurality of intersecting walls, said walls being curved at least at the intersections. 18. The method of claim 17 in which the grid comprises a plurality of intersecting walls defined by spaced apart, generally cylindrically or elliptically shaped pores. 19. The method of claim 1 in which the filter membrane is flexible. 20. The method of claim 19 in which the filter membrane is sufficiently flexible to be disposed along a radius of curvature of ½ inch. 21. A method for making a monolithic filter membrane comprising: providing a flexible film having opposed, generally planar surfaces and a thickness between the surfaces; ablating selected areas of one of the surfaces to a first selected depth to define a plurality of micron-scale precision-shaped pores on the one surface; and ablating selected areas of the other of the surfaces to a second selected depth to define a porous precision-shaped support structure, the pores communicating with the porous support structure to allow the passage of filtrate therethrough. 22. The method of claim 21 in which the ablation is carried out by laser.