Substrate holder for a vapour deposition system
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C25B-009/00
C23C-014/00
C25B-011/00
C25B-013/00
C23C-016/00
출원번호
UP-0205513
(2005-08-17)
등록번호
US-7790004
(2010-09-27)
발명자
/ 주소
Seddon, Richard I.
출원인 / 주소
JDS Uniphase Corporation
대리인 / 주소
Pequignot, Matthew A.
인용정보
피인용 횟수 :
4인용 특허 :
20
초록▼
The invention relates to a partially disposable substrate holder used in magnetic latches for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor depo
The invention relates to a partially disposable substrate holder used in magnetic latches for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The substrate holder includes a reusable base formed, at least partially, from a ferro-magnetic material, which is attracted to the magnetic latch, and a disposable cover formed from a relatively inexpensive, ferromagnetic, easily formable material, which encourages adherence of coating material and has a low vapor pressure at coating temperatures.
대표청구항▼
I claim: 1. A coating system, comprising: a coating chamber; at least one spindle, located within said coating chamber, rotatable about respective spindle axes; a latch on an end of said spindle, located within said coating chamber, including a mounting surface structurally configured for mounting
I claim: 1. A coating system, comprising: a coating chamber; at least one spindle, located within said coating chamber, rotatable about respective spindle axes; a latch on an end of said spindle, located within said coating chamber, including a mounting surface structurally configured for mounting a substrate holder to said spindle within said coating chamber; and a substrate holder selectively connectable and disconnectable to said mounting surface of said latch when the latch is in a latched position and when the latch is in an unlatched position, respectively, said substrate holder including a base and a cover mounted on an end face of the base for supporting a substrate; wherein the cover includes an opening to expose the substrate, a lip surrounding the opening for holding an edge of the substrate against the base, and a protective region covering the end face of the base for protecting the base from stray coating material, an annular flange extending substantially perpendicularly from said protective region for protecting the base from stray coating material; wherein the cover is made of a sheet metal; wherein the outer free end of the annular flange forms a resilient clip for releasably attaching the cover to said base for removal therefrom; wherein said latch is a magnetic latch which is configured to selectively magnetically connect and disconnect said substrate holder to said mounting surface, and wherein said latch is configured to be operable such that said latch magnetizes and demagnetizes said mounting surface; and wherein said latch includes a first section and a second section and wherein said second section is moveable between a first and a second position, wherein when said second section is in said first position, said mounting surface is magnetized and wherein when said second section is in said second position, said mounting surface is demagnetized. 2. The coating system according to claim 1, further comprising a reciprocating latching surface on said base moveable between a first position engaging said clip and a second position in which the clip is released. 3. The coating system according to claim 2, wherein said latching surface is spring biased into said first position. 4. The coating system according to claim 1, wherein the annular flange extends outwardly away from said cover for facilitating grasping of the substrate holder. 5. A coating system, comprising: a coating chamber; at least one spindle, located within said coating chamber, rotatable about respective spindle axes; a latch on an end of said spindle, located within said coating chamber, including a mounting surface structurally configured for mounting a substrate holder to said spindle within said coating chamber; and a substrate holder selectively connectable and disconnectable to said mounting surface of said latch, said substrate holder including a base and a cover mounted on an end face of the base for supporting a substrate; wherein the cover includes an opening to expose the substrate, a lip surrounding the opening for holding an edge of the substrate against the base, a protective region covering the end face of the base for protecting the base from stray coating material, and an annular flange extending substantially perpendicularly from said protective region for protecting the base from stray coating material; wherein the cover is made of a sheet metal; wherein the cover is releasably attached to said base for removal therefrom; wherein the base comprises a lip, a protective region, and an annular flange opposite the lip, the protective region and the annular flange of the cover, respectively; wherein the lip of the base and the lip of the cover form an annular slot for receiving the substrate; and wherein the annular flange of the base extends adjacent to a side wall of said latch to protect the side wall from stray coating material; wherein the base and the cover have substantially the same structure enabling the substrate holder to be flipped over for coating both sides of the substrate; wherein said latch is a magnetic latch which is configured to selectively magnetically connect and disconnect said substrate holder to said mounting surface, and wherein said latch is configured to be operable such that said latch magnetizes and demagnetizes said mounting surface; and wherein said latch includes a first section and a second section and wherein said second section is moveable between a first and a second position, wherein when said second section is in said first position, said mounting surface is magnetized and wherein when said second section is in said second position, said mounting surface is demagnetized. 6. The coating system according to claim 5, wherein the protective region of the base is spot bonded to the protective region of the cover enabling manual disengagement thereof. 7. The coating system according to claim 6, wherein said latch is a magnetic latch for attracting the base to the spindle. 8. The coating system according to claim 7, wherein said magnetic latch comprises an annular rim for attracting the protective region of the base; wherein the annular flange of the base extends adjacent a side wall of said annular rim to protect the side wall of said annular rim from stray coating material. 9. The coating system according to claim 1, wherein said latch is a magnetic latch for attracting the base to the spindle. 10. The coating system according to claim 9, wherein said magnetic latch includes a first section, and a second section movable relative to the first section between a first position in which the permanent magnet forms a magnetic circuit in which the mounting surface forms a temporary magnet for attracting a substrate holder, and a second position in which the permanent magnet is short circuited and the mounting surface is demagnetized, thereby releasing the substrate holder from the magnetic latch and enabling the substrate and substrate holder to be removed from the magnetic latch and the process chamber. 11. The coating system according to claim 10, wherein each of the first sections comprises a stator including the mounting surface, and poles for aligning with the permanent magnet; and wherein each of the second sections comprises a rotor, including the permanent magnet for rotation between the first position in which the permanent magnet is aligned with the poles of the stator, and the second position in which the permanent magnet is not aligned with the poles of the stator, thereby demagnetizing the stator. 12. The coating system according to claim 11, wherein said magnetic latch further comprises an actuator extending through the spindle for rotating each rotor. 13. The coating system according to claim 11, wherein each rotor includes a plurality of permanent magnets; and each stator includes a plurality of poles for aligning with the plurality of permanent magnets. 14. The coating system according to claim 13, wherein each rotor includes a rotor pole on each side of each permanent magnet for aligning with respective stator poles, which forms a magnetic circuit through the mounting surface when in the first position, and for engaging a single stator pole, which shorts the permanent magnet when in the second position. 15. The coating system according to claim 1, wherein the cover is comprised of a sheet metal stamping of tin-plated steel to encourage adhesion of stray coating material thereto. 16. The coating system according to claim 1, wherein the cover is up to 0.015 inches thick.
Nelson Carl W. (Hayward CA) Weir Richard D. (Agoura Hills CA), Circularly symmetric, large-area, high-deposition-rate sputtering apparatus for the coating of disk substrates.
Cuomo Jerome J. (Lincolndale NY) Gambino Richard J. (Yorktown Heights NY) Harper James M. (Yorktown Heights NY) Kupstis John D. (Yorktown Heights NY), Energetic particle beam deposition system.
Locher Stefan (Alzenau DEX) Wirth Eckhard (Gelnhausen DEX), Planetary gear system with a set of gears, particularly for devices for coating substrates.
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