초록 ▼

Two low cost processes for removing boron, phosphorus, carbon and titanium during the process of converting metallurgical grade silicon to electronic grade silicon are described. A first process removes boron and titanium by using one or more high temperature solids removal devices for the removal o

Two low cost processes for removing boron, phosphorus, carbon and titanium during the process of converting metallurgical grade silicon to electronic grade silicon are described. A first process removes boron and titanium by using one or more high temperature solids removal devices for the removal of solid titanium diboride from a halosilane reactor effluent stream where the high temperature is greater than about 200° C. A second process removes carbon as methane and phosphorus as phosphine by means of a membrane separator which processes all or part of a hydrogen recycle stream to recover hydrogen while rejecting methane and phosphine.

대표청구항 ▼

What is claimed is: 1. A process for removing boron impurities from a silicon production facility comprising the steps of: providing one or more high temperature solids removal devices, and removing titanium diboride as a solid material from a gaseous reactor effluent stream containing primarily ha

What is claimed is: 1. A process for removing boron impurities from a silicon production facility comprising the steps of: providing one or more high temperature solids removal devices, and removing titanium diboride as a solid material from a gaseous reactor effluent stream containing primarily halosilanes, hydrogen and hydrogen halides, and feeding the solid material to a high temperature solids removal device, while preventing substantial contact between the removed titanium dibromide impurities and the hydrogen halide below a temperature of 250° C. 2. The process of claim 1 further comprising selecting a MGS feedstock which has an atomic ratio of titanium to boron in the reactor of at least 1:2. 3. The process of claim 1 wherein said solids removal device includes at least one solids removal device within the reactor. 4. The process of claim 1 wherein said solids removal device comprises one or more cyclones, filters or scrubbers. 5. The of claim 1 further comprising producing a boron containing high purity silicon material suitable for production of solar energy conversion cells. 6. A process for removing one or more of carbon and phosphorus impurities from a silicon production facility comprising the steps of: feeding a gaseous stream containing primarily halosilanes, hydrogen and hydrogen halides with traces of halosilanes, methane and phosphine into a membrane system containing a separation membrane to form a) a low pressure stream comprising a gaseous stream which has passed through the separation membrane, said low pressure stream comprising a first portion of the gaseous stream enriched in hydrogen and hydrogen chloride and depleted in halosilanes, methane and phosphine when compared to the gaseous feed stream, and b) a high pressure stream comprising a second portion of the feed gaseous stream which has not passed through the separation membrane said high pressure stream being depleted of hydrogen and hydrogen chloride and enriched in halosilanes, methane and phosphine when compared to the gaseous feed stream. 7. The process of claim 6 wherein the low pressure stream is fed back to the silicon production facility and the high pressure stream is discarded. 8. The process of claim 6 further comprising the step of a) providing a cooling system to form a condensate comprising at least a portion of the halosilanes in the high pressure gas stream and removing at least a portion of the condensate, producing a halosilane depleted high pressure stream, and b) providing a heating means to vaporize any residual liquids in the high pressure stream following the removal of the condensate, and c) feeding the heated high pressure stream to a membrane separation system. 9. The process of claim 6 wherein at least 50% of the hydrogen halide and hydrogen in the gaseous feed stream passes through the separation membrane and into the low pressure stream. 10. The process of claim 6 wherein said first portion of the gas stream is between between about 20% and 100% of the gaseous stream.