IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0341917
(2006-01-26)
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등록번호 |
US-7811280
(2010-11-01)
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발명자
/ 주소 |
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출원인 / 주소 |
- AMO Manufacturing USA, LLC.
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인용정보 |
피인용 횟수 :
1 인용 특허 :
46 |
초록
▼
Systems and method for determining ablation beam characteristics are provided. Methods include ablating an article with the ablation beam to form a test location having an ablation depth, transmitting a first beam through the test location of the article, transmitting a second beam through a referen
Systems and method for determining ablation beam characteristics are provided. Methods include ablating an article with the ablation beam to form a test location having an ablation depth, transmitting a first beam through the test location of the article, transmitting a second beam through a reference location, and determining an ablation beam characteristic based on a phase relationship of the first beam and the second beam downstream of the article. Systems include a light source assembly transmitting a first beam through an ablated test location of an article and a second beam through a reference location disposed outside of the test location, a sensor assembly detecting a first beam and second beam superimposition downstream of the article, and a phase relationship code module for determining a phase relationship between the first beam and the second beam, based on the first beam and second beam superimposition.
대표청구항
▼
What is claimed is: 1. A method of calibrating an ablation system that generates an ablation beam, the method comprising: ablating an article with the ablation beam generated by the ablation system so as to form a test location having an ablation depth, wherein the article comprises a test article
What is claimed is: 1. A method of calibrating an ablation system that generates an ablation beam, the method comprising: ablating an article with the ablation beam generated by the ablation system so as to form a test location having an ablation depth, wherein the article comprises a test article material; separating light from a light source into a first beam and a second beam; transmitting the first beam through a first thickness of test article material at the test location while transmitting the second beam through a second thickness of test article material at a reference location, the reference location disposed outside of the test location and the first thickness different from the second thickness; determining an ablation beam characteristic based on a phase relationship of the transmitted first beam and the transmitted second beam; and calibrating the ablation system based on the determined ablation beam characteristic. 2. The method of claim 1, wherein the ablation beam characteristic is based on a phase relationship of the transmitted first beam and the transmitted second beam at a target zone. 3. The method of claim 1, wherein the ablation beam comprises a pulsed ultraviolet laser. 4. The method of claim 1, wherein the article comprises a clear plastic. 5. The method of claim 1, wherein the phase relationship is determined based on a superimposition of the first beam and the second beam at a target zone. 6. The method of claim 1, wherein the ablation depth of the test location is determined based on the phase relationship, and the ablation beam characteristic is determined based on the ablation depth. 7. The method of claim 1, wherein the first beam is transmitted at a known phase relationship with the second beam. 8. The method of claim 1, wherein the first beam is transmitted along a first beam path that travels through a transmission zone, through the test location, to the target zone, the second beam is transmitted along a second beam path that travels through the transmission zone, through the reference location, to the target zone, and the ablation beam characteristic is determined based on a first beam phase at the transmission zone, a second beam phase at the transmission zone, and the phase relationship of the first beam and second beam at the target zone. 9. The method of claim 1, wherein the article comprises the reference location, wherein the first beam and the second beam both originate from a common input source beam and impinge the article and emerge from the article as separated beams, and wherein the method further comprises superimposing the first beam and the second beam. 10. The method of claim 1, wherein the ablation beam characteristic comprises a member selected from the group consisting of an ablation beam pulse energy, an ablation beam pulse rate, an ablation beam cross-section, and an ablation beam energy distribution profile. 11. A system for calibrating an ablation beam, the system comprising: an article having a test location and a reference location and comprising a test article material, wherein the test location has been ablated by the ablation beam; a light source assembly configured to transmit a first beam through a first thickness of test article material at the test location of the article and a second beam through a second thickness of the test article material at the reference location, the reference location disposed outside of the test location and the first thickness different from the second thickness; a sensor assembly configured to detect a superimposition of the transmitted first beam and the transmitted second beam; a processor coupled with the sensor assembly; and a memory coupled with the processor, the memory embodying a phase relationship code module for determining a phase relationship between the first beam and the second beam, based on the first beam and second beam superimposition. 12. The system according to claim 11, the memory further comprising a calibration code module for determining a depth of the ablation beam based on the phase relationship. 13. The system according to claim 11, wherein the article comprises a clear plastic. 14. The system according to claim 11, wherein the light source assembly is configured to transmit the first beam at a known phase relationship with the second beam. 15. The system according to claim 11, wherein the light source assembly is configured to transmit the first beam from a transmission zone through the test location to a target zone, and the second beam from the transmission zone through the reference location to the target zone, and the calibration code module is configured to determine the depth of the ablation beam based on a first beam phase at the transmission zone, a second beam phase at the transmission zone, and the phase relationship of the first beam and second beam at the target zone. 16. The system according to claim 11, wherein the light assembly comprises a light source and a splitter configured to split a light beam from the light source into the first beam and the second beam. 17. The system according to claim 11, wherein the calibration comprises an adjustment of an ablation beam characteristic, the ablation beam characteristic comprising a member selected from the group consisting of an ablation beam pulse energy, an ablation beam pulse rate, an ablation beam cross-section, and an ablation beam energy distribution profile. 18. A method of calibrating an ablation beam, the method comprising: ablating a region of an article with the ablation beam, wherein the article comprises a test article material; transmitting a first beam through a first thickness of the test article material at the ablated region to a target zone while transmitting a second beam through a second thickness of the test article material to the target zone outside of the ablated region; determining an ablation beam characteristic based on a phase relationship of the transmitted first beam and the transmitted second beam at the target zone; and calibrating the ablation beam based on the ablation beam characteristic. 19. The method of claim 18, wherein the ablation beam comprises a pulsed ultraviolet laser.
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