IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0084622
(2006-02-23)
|
등록번호 |
US-7824472
(2010-11-22)
|
우선권정보 |
JP-2005-328582(2005-11-14) |
국제출원번호 |
PCT/JP2006/303306
(2006-02-23)
|
§371/§102 date |
20080507
(20080507)
|
국제공개번호 |
WO07/055035
(2007-05-18)
|
발명자
/ 주소 |
|
출원인 / 주소 |
- Taiyo Nippon Sanso Corporation
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
18 |
초록
▼
In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconducto
In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconductor manufacturing equipment, etc. is recovered in a high concentration with a high recovery percentage, the present invention provides a new PSA method in which the method uses a separation apparatus comprising a lower column and a upper column which are filled with an adsorbent, a material gas storage tank for storing the material gas to be introduced into the lower column, a strong adsorbate storage tank for storing a main component which is easily adsorbed by the adsorbent, and a compressor, and the strong adsorbate which is easily adsorbed by the adsorbent and the weak adsorbate which is not readily adsorbed by the adsorbent are recovered, wherein the method comprises an (a) adsorption step, (b) rinse step, (c) low column depressurization step, (d) upper column depressurization step, and (e) purge step sequentially repeated based on a predetermined sequence.
대표청구항
▼
The invention claimed is: 1. A pressure swing adsorption method in which a mixture gas containing at least two main components is used as a material gas, an adsorbent which easily adsorbs at least one main component in the material gas and does not readily adsorb at least another main component in
The invention claimed is: 1. A pressure swing adsorption method in which a mixture gas containing at least two main components is used as a material gas, an adsorbent which easily adsorbs at least one main component in the material gas and does not readily adsorb at least another main component in the material gas is used, the method uses a separation apparatus comprising a lower column and a upper column which are filled with the adsorbent, a material gas storage tank for storing the material gas to be introduced into the lower column, a strong adsorbate storage tank for storing a main component which is easily adsorbed by the adsorbent, and a compressor for pressurizing gas from the material gas storage tank or the strong adsorbate storage tank and introducing into the lower column, and the strong adsorbate which is easily adsorbed by the adsorbent and the weak adsorbate which is not readily adsorbed by the adsorbent are recovered, wherein the method comprises: a step (a) in which the gas in the material gas storage tank is pressurized and introduced into the lower column, the strong adsorbate in the material gas is adsorbed by the adsorbent, gas from the lower column which contains a less amount of the strong adsorbate is introduced into the upper column, the strong adsorbate contained in the gas is adsorbed by the adsorbent in the upper column, and the weak adsorbate which flows from the upper column is recovered; a step (b) in which the gas in the strong adsorbate storage tank is pressurized by the compressor and introduced into the lower column, the weak adsorbate co-adsorbed by the adsorbent in the lower column and the weak adsorbate remaining in space among the adsorbent are led into the upper column, the strong adsorbate contained in the gas led out from the lower column is adsorbed by the adsorbent in the upper column, and the weak adsorbate which flows from the upper column is recovered; a step (c) in which the lower column is depressurized, the strong adsorbate adsorbed by the adsorbent filled in the lower column is desorbed, and the desorbed strong adsorbate is recovered in the strong adsorbate storage tank; a step (d) in which the upper column is depressurized, the weak adsorbate adsorbed by the adsorbent in the upper column is desorbed, the desorbed gas is introduced into the lower column, and gas which flows from the lower column is recovered in the material gas storage tank; and a step (e) in which the weak adsorbate recovered in the steps (a) and (b) is introduced into the upper column as a counter current purge gas, the strong adsorbate adsorbed by the adsorbent in the upper column is displaced and desorbed, gas which flows from the upper column is introduced into the lower column, the strong adsorbate adsorbed by the adsorbent in the lower column is displaced and desorbed by the gas introduced into the lower column, and gas which flows from the lower column is recovered in the material gas storage tank; and these steps (a) to (e) are sequentially repeated based on a predetermined sequence, and the strong adsorbate and the weak adsorbate in the material gas are simultaneously recovered in a high concentration with a high recovery percentage. 2. A pressure swing adsorption method according to claim 1, wherein the step (b) uses at least two lower columns and at least two upper columns, and contains the following step (i): a step (i) in which the upper column after finishing the step (b) and the other upper column after finishing the step (e) are connected, gas in the upper column after finishing the step (b) is introduced into the other upper column after finishing the step (e), gas in the lower column after finishing the step (b) is introduced into the upper column after finishing the step (b), and gas in the strong adsorbate storage tank is introduced into the lower column, and that the step (e) uses at least two lower columns and at least two upper columns, and contains the following step (j): a step (j) in which the upper column after finishing the step (e) and the other upper column after finishing the step (b) are connected, gas in the upper column after finishing the step (b) is introduced into the other upper column after finishing the step (e), gas in the upper column after finishing the step (e) is introduced into the lower column after finishing the step (e). 3. A pressure swing adsorption method according to claim 1, wherein the step (b) uses at least two lower columns and at least two upper columns, and contains the following step (g): a step (g) in which the upper column after finishing the step (a) and the other upper column after finishing the step (e) are connected, gas in the upper column after finishing the step (a) is introduced into the other upper column after finishing the step (e), gas in the lower column after finishing the step (a) is introduced into the upper column after finishing the step (a), and gas in the strong adsorbate storage tank is introduced into the lower column, and that the step (e) uses at least two lower columns and at least two upper columns, and contains the following step (j): a step (j) in which the upper column after finishing the step (e) and the other upper column after finishing the step (b) are connected, gas in the upper column after finishing the step (b) is introduced into the other upper column after finishing the step (e), gas in the upper column after finishing the step (e) is introduced into the lower column after finishing the step (e). 4. A pressure swing adsorption method according to claim 1, wherein the adsorbent is an adsorbent which separates the strong adsorbate and the weak adsorbate based on a difference between an equilibrium adsorption amount. 5. A pressure swing adsorption method according to claim 4, wherein the adsorbent which separates the strong adsorbate and the weak adsorbate based on the difference of the equilibrium adsorption amount is selected from the group consisting of an activated carbon, a Na-X type zeolite, a Ca-X type zeolite, a Ca-A type zeolite, and a Li-X type zeolite. 6. A pressure swing adsorption method according to claim 4, wherein the strong adsorbate to the adsorbent is xenon or krypton, and the weak adsorbate to the adsorbent is gas containing one of oxygen, nitrogen, and argon. 7. A pressure swing adsorption method according to claim 1, wherein the adsorbent is an adsorbent which separates the strong adsorbate and the weak adsorbate based on a difference of an adsorption speed. 8. A pressure swing adsorption method according to claim 7, wherein a fine pore diameter of the adsorbent which separates the strong adsorbate and the weak adsorbate based on the difference of the adsorption speed is about 0.4 nm. 9. A pressure swing adsorption method according to claim 7, wherein the weak adsorbate to the adsorbent is xenon or krypton, and the strong adsorbate to the adsorbent is gas containing one of oxygen, nitrogen, and argon. 10. A pressure swing adsorption method in which a mixture gas containing at least two main components is used as a material gas, an adsorbent which easily adsorbs at least one main component in the material gas and does not readily adsorb at least another main component in the material gas is used, the method uses a separation apparatus comprising a lower column and a upper column which are filled with the adsorbent, a material gas storage tank for storing the material gas to be introduced into the lower column, a strong adsorbate low pressure storage tank for storing the strong adsorbate from the lower column, a compressor for pressurizing gas from the material gas storage tank or the strong adsorbate low pressure storage tank and introducing into the lower column, a strong adsorbate high pressure storage tank for storing the strong adsorbate from the lower column, and a weak adsorbate storage tank for storing the weak adsorbate from the upper column, and the strong adsorbate which is easily adsorbed by the adsorbent and the weak adsorbate which is not readily adsorbed by the adsorbent are recovered, wherein the method comprises: a step (a′) in which gas in the material gas storage tank is pressurized by the compressor and introduced into the lower column, the strong adsorbate in the material gas is adsorbed by the adsorbent, gas from the lower column which contains a less amount of the strong adsorbate is introduced into the upper column, the strong adsorbate contained in the gas is adsorbed by the adsorbent in the upper column, and the weak adsorbate which flows from the upper column is recovered in the weak adsorbate storage tank; a step (b′+i′) in which gas from the strong adsorbate low pressure storage tank is pressurized and introduced into the lower column, the weak adsorbate co-adsorbed by the adsorbent in the lower column and the weak adsorbate remaining in space among the adsorbent are introduced into the upper column, the strong adsorbate contained in gas which flows from the lower column is adsorbed by the adsorbent in the upper column, the weak adsorbate flows from the upper column, the weak adsorbate which flows is introduced into the upper column after finishing a step (e′), which is explained below, to depressurize the lower column and the upper column after finishing the step (b′+i′); a step (c′) in which the lower column is depressurized, the strong adsorbate adsorbed by the adsorbent filled in the lower column is desorbed, and the strong adsorbate desorbed is recovered in the strong adsorbate high pressure storage tank, and the strong adsorbate is further desorbed and recovered in the strong adsorbate low pressure storage tank; a step (d′) in which the upper column is depressurized, gas adsorbed by the adsorbent in the upper column is desorbed, the desorbed gas is introduced into the lower column, and gas which flows from the lower column is recovered in the material gas storage tank; and a step (e′) in which the weak adsorbate recovered in the step (a′) is introduced into the upper column as a counter current purge gas, the strong adsorbate adsorbed by the adsorbent in the upper column is displaced and desorbed, gas which flows from the upper column is introduced into the lower column, the strong adsorbate adsorbed by the adsorbent in the lower column is displaced and desorbed by the gas introduced into the lower column, and gas which flows from the lower column is recovered in the material gas storage tank; and a step (j′) in which the weak adsorbate introduced in the step (b′+i′) is introduced into the upper column to pressurize the upper column and the lower column after finishing the step (e′) and these steps (a′), (b′+i′), (c′), (d′), (e′), and (j′) are sequentially repeated based on a predetermined sequence, and the strong adsorbate and the weak adsorbate in the material gas are simultaneously recovered in a high concentration with a high recovery percentage. 11. A pressure swing adsorption method according to claim 10, wherein the time of the step (b′+i′) or the step (j′) is in a range from 10 to 50% relative to a cycle time.
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