초록 ▼

A scratch resistant coated article is provided which is also resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In certain example embodiments, an anti-etch layer(s) is provided on a glass substrate in order to protect the glass substrate from attacks by f

A scratch resistant coated article is provided which is also resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In certain example embodiments, an anti-etch layer(s) is provided on a glass substrate in order to protect the glass substrate from attacks by fluoride-based etchant(s), and an underlayer(s) deposited by flame pyrolysis may be provided under at least the anti-etch layer(s).

대표청구항 ▼

The invention claimed is: 1. A coated article comprising: a substrate; a flame pyrolysis-deposited underlayer comprising silicon oxide on the substrate; and an anti-etch layer comprising at least one material selected from the group consisting of: zirconium oxycarbide, tin oxycarbide, indium oxide

The invention claimed is: 1. A coated article comprising: a substrate; a flame pyrolysis-deposited underlayer comprising silicon oxide on the substrate; and an anti-etch layer comprising at least one material selected from the group consisting of: zirconium oxycarbide, tin oxycarbide, indium oxide and cerium oxide; and wherein the anti-etch layer is on the substrate over at least the underlayer comprising silicon oxide, and wherein the anti-etch layer is resistant to at least some fluoride-based glass etchants. 2. The coated article of claim 1, wherein the anti-etch layer comprises zirconium oxycarbide, and wherein the substrate is a glass substrate. 3. The coated article of claim 1, wherein the coated article is a window. 4. The coated article of claim 1, wherein the coated article has a visible transmission of at least about 50%. 5. The coated article of claim 1, further comprising an ion beam-deposited layer comprising diamond-like carbon (DLC) on the glass substrate over the anti-etch layer. 6. The coated article of claim 1, wherein the anti-etch layer is resistant to corrosion by fluoride inclusive etchants. 7. The coated article of claim 1, wherein the anti-etch layer is at least about 2,500 Å thick. 8. The coated article of claim 1, wherein the anti-etch layer is at least partially nitrided.