IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0432923
(2006-05-12)
|
등록번호 |
US-7828504
(2010-11-25)
|
발명자
/ 주소 |
- Pharand, Michel
- Becker, Klaus
- Petry, Klaus
- LaFontaine, Marvin R.
- Mitrano, Michael R.
|
출원인 / 주소 |
- Axcellis Technologies, Inc.
|
대리인 / 주소 |
Eschweiler & Associates, LLC
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
13 |
초록
▼
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus i
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.
대표청구항
▼
What is claimed is: 1. A combination load lock apparatus, comprising: a load lock chamber having a top wall and a bottom wall generally fixed with respect to one another, wherein an interior portion of the load lock chamber is defined between the top wall and the bottom wall, wherein the top wall o
What is claimed is: 1. A combination load lock apparatus, comprising: a load lock chamber having a top wall and a bottom wall generally fixed with respect to one another, wherein an interior portion of the load lock chamber is defined between the top wall and the bottom wall, wherein the top wall of the load lock chamber comprises a generally planar first surface and a recess extending upwardly from the generally planar first surface, and wherein a central region of the load lock chamber is generally defined between the bottom wall and the generally planar first surface of the top wall; two or more valves operably coupled to the load lock chamber, wherein the two or more valves are operable to selectively permit a fluid communication between two or more respective volumes and the interior portion of the load lock chamber; a support member disposed within the interior portion of the load lock chamber, wherein the support member is operable to support a workpiece; a translation apparatus operably coupled to the support member, wherein the translation apparatus is operable to rotate the support member about a first axis and to linearly translate the support member along the first axis between the central region of the load lock chamber and the recess; and a detection apparatus operably coupled to at least the top wall of the load lock chamber, wherein the detection apparatus is operable to detect one or more characteristics of the workpiece when the workpiece is positioned within the recess. 2. The combination load lock apparatus of claim 1, wherein the support member comprises an electrostatic chuck. 3. The combination load lock apparatus of claim 1, wherein the workpiece comprises an indicia associated therewith, and wherein the detection apparatus comprises a sensor operable to detect the indicia. 4. The combination load lock apparatus of claim 3, wherein the indicia comprises a bar code disposed on a backside of the workpiece, and wherein the sensor comprises a barcode scanner. 5. The combination load lock apparatus of claim 3, wherein the indicia comprises a notch defined in the workpiece, and wherein the detection apparatus comprises a sensor operable to detect the notch. 6. The combination load lock apparatus of claim 5, wherein the sensor comprises a camera operable to visually detect the notch in the workpiece. 7. The combination load lock apparatus of claim 5, wherein the sensor device comprises a proximity sensor. 8. The combination load lock chamber of claim 1, wherein the detection apparatus is further operably coupled to the bottom wall of the load lock chamber. 9. The combination load lock apparatus of claim 1, wherein the detection apparatus is operable to detect the one or more characteristics of the workpiece during the rotation of the workpiece about the first axis via the translation apparatus. 10. The combination load lock apparatus of claim 1, wherein the two or more valves comprise two or more gate valves associated with the two or more respective volumes, wherein the two or more gate valves are operable to selectively isolate an environment of each of the respective two or more volumes from interior portion of the load lock chamber. 11. The combination load lock apparatus of claim 1, further comprising a pump port and a vent port associated with the load lock chamber, wherein the pump port is in fluid communication with a vacuum environment and the interior portion of the load lock chamber, wherein the pump port is operable to selectively expose the interior portion of the load lock chamber to the vacuum environment, and wherein the vent port is in fluid communication with a pressurized environment and the interior portion of the load lock chamber, wherein the vent port is operable to selectively expose the interior portion of the load lock chamber to the pressurized environment. 12. The combination load lock apparatus of claim 11, wherein the pump port is associated with a bottom portion of the load lock chamber. 13. The combination load lock apparatus of claim 11, further comprising a filter in fluid communication with the vent port, wherein the filter is operable to substantially filter particles associated with the pressurized environment. 14. The combination load lock apparatus of claim 1, further comprising a temperature control apparatus associated with the load lock chamber, wherein the temperature control apparatus is operable to provide one or more of a heating and cooling of the workpiece within the load lock chamber. 15. The combination load lock apparatus of claim 1, wherein a shape of the recess generally conforms to a shape of the workpiece when viewed from the bottom wall toward the top wall of the load lock chamber. 16. The combination load lock apparatus of claim 15, wherein the recess is generally circular in shape having diameter slightly larger than a diameter of the workpiece. 17. A combination load lock apparatus, comprising: a load lock chamber having a generally fixed top wall and a generally fixed bottom wall, wherein an interior portion of the load lock chamber is defined between the top wall and the bottom wall, wherein the top wall of the load lock chamber comprises a generally planar first surface and a recess extending upwardly from the generally planar first surface, and wherein a central region of the load lock chamber is generally defined between the bottom wall and the generally planar first surface of the top wall; two or more valves operably coupled to the load lock chamber, wherein the two or more valves are operable to selectively permit a fluid communication between two or more respective volumes and the interior portion of the load lock chamber; a support member disposed within the interior portion of the load lock chamber, wherein the support member is operable to support a workpiece; a translation apparatus operably coupled to the support member, wherein the translation apparatus is operable to rotate the support member about a first axis and to linearly translate the support member along the first axis, wherein the translation apparatus is configured to translate the workpiece between the central region of the load lock chamber and the recess; and a detection apparatus operably coupled to the top wall of the load lock chamber or the top wall and bottom wall of the load lock chamber, wherein the detection apparatus is operable to detect one or more characteristics of the workpiece when the workpiece is positioned within the recess. 18. The combination load lock apparatus of claim 17, further comprising: a pump port associated with the bottom wall of the load lock chamber, wherein the pump port is in selective fluid communication with the interior portion of the load lock chamber and a vacuum environment; a vent port associated with the recess, wherein the vent port in selective fluid communication with the interior portion of the load lock chamber and a pressurized environment; a controller configured to control a position of the workpiece via the translation apparatus, and wherein the controller is further configured to control an actuation of the pump port and vent port in order to provide a flow of a gas from the vent port to the pump port when the workpiece is positioned within the recess. 19. The combination load lock apparatus of claim 18, further comprising a temperature control apparatus configured to heat and/or cool the gas from the pressurized environment.
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