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Methods for making substrates and substrates formed therefrom 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/52
  • H01L-023/48
  • H01L-021/762
  • H01L-021/46
  • H01L-021/30
출원번호 UP-0536082 (2009-08-05)
등록번호 US-7839001 (2011-01-22)
우선권정보 FR-00 15279(2000-11-27); FR-02 07132(2002-06-11); FR-03 00780(2003-01-24); FR-05 13045(2005-12-21)
발명자 / 주소
  • Boussagol, Alice
  • Faure, Bruce
  • Ghyselen, Bruno
  • Letertre, Fabrice
  • Rayssac, Olivier
  • Rayssac, legal representative, Pierre
  • Rayssac, legal representative, Giséle
출원인 / 주소
  • S.O.I.Tec Silicon on Insulator Technologies
대리인 / 주소
    Winston & Strawn LLP
인용정보 피인용 횟수 : 7  인용 특허 : 23

초록

A method for making substrates for use in optics, electronics, or opto-electronics. The method may include transferring a seed layer onto a receiving support and depositing a useful layer onto the seed layer. The thermal expansion coefficient of the receiving support may be identical to or slightly

대표청구항

What is claimed is: 1. A substrate comprising: a receiving support having a thermal expansion coefficient; a seed layer having a thermal expansion coefficient, wherein the seed layer is operably connected to the receiving support, and wherein the receiving support and the seed layer have identical

이 특허에 인용된 특허 (23)

  1. Bruel Michel,FRX ; Aspar Bernard,FRX, Method for achieving a thin film of solid material and applications of this method.
  2. Lee Sahng Kyoo,KRX ; Park Sang Kyun,KRX, Method for fabricating semiconductor wafers.
  3. Steckl Andrew J. ; Yuan Chong, Method for forming SiC-SOI structures.
  4. Aspar Bernard,FRX ; Bruel Michel,FRX, Method for making a thin film of solid material.
  5. Bowers John E. ; Sink R. Kehl ; Denbaars Steven P., Method for making cleaved facets for lasers fabricated with gallium nitride and other noncubic materials.
  6. Baker James W. (Gilbert AZ), Method for making intrinsic gettering sites in bonded substrates.
  7. Goesele Ulrich M. ; Tong Q.-Y., Method for the transfer of thin layers of monocrystalline material to a desirable substrate.
  8. Moriceau, Hubert; Bruel, Michel; Aspar, Bernard; Maleville, Christophe, Method for transferring a thin film comprising a step of generating inclusions.
  9. Barge,Thierry; Auberton Herve,Andr챕; Aga,Hiroji; Tate,Naoto, Method for treating substrates for microelectronics and substrates obtained according to said method.
  10. Oliver Steven A. ; Zavracky Paul ; McGruer Nicol E. ; Vittoria Carmine, Method of fabricating an integrated complex-transition metal oxide device.
  11. Faure, Bruce; Letertre, Fabrice, Method of fabricating heteroepitaxial microstructures.
  12. Aspar Bernard,FRX ; Biasse Beatrice,FRX ; Bruel Michel,FRX, Method of obtaining a thin film of semiconductor material.
  13. Aspar Bernard,FRX ; Bruel Michel,FRX ; Poumeyrol Thierry,FRX, Method of producing a thin layer of semiconductor material.
  14. Aspar Bernard,FRX ; Bruel Michel,FRX ; Poumeyrol Thierry,FRX, Method of producing a thin layer of semiconductor material.
  15. Letertre, Fabrice; Ghyselen, Bruno, Methods for fabricating a substrate.
  16. Ghyselen, Bruno; Letertre, Fabrice, Methods for fabricating final substrates.
  17. Sakaguchi, Kiyofumi; Yonehara, Takao; Nishida, Shoji; Yamagata, Kenji, Process for producing semiconductor article.
  18. Sato Nobuhiko,JPX ; Yonehara Takao,JPX ; Sakaguchi Kiyofumi,JPX, Process for producing semiconductor substrate by heating to flatten an unpolished surface.
  19. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
  20. Ohshima Hisayoshi,JPX ; Matsui Masaki,JPX ; Onoda Kunihiro,JPX ; Yamauchi Shoichi,JPX, Semiconductor substrate manufacturing method.
  21. Soref Richard A. ; Namavar Fereydoon, SiC/111-V-nitride heterostructures on SiC/SiO.sub.2 /Si for optoelectronic devices.
  22. Kub Francis J. ; Hobart Karl D., Single-crystal material on non-single-crystalline substrate.
  23. Kiyofumi Sakaguchi JP; Kazuaki Ohmi JP; Kazutaka Yanagita JP, Substrate processing method and method of manufacturing semiconductor substrate.

이 특허를 인용한 특허 (7)

  1. Letertre, Fabrice; Ghyselen, Bruno; Rayssac, Olivier, Fabrication of substrates with a useful layer of monocrystalline semiconductor material.
  2. Saeki, Ryo, Light-emitting device and method for producing light emitting device.
  3. Saeki, Ryo, Light-emitting device and method for producing light emitting device.
  4. Saeki, Ryo, Light-emitting device and method for producing light emitting device.
  5. Bruel, Michel, Method for treating a part made from a decomposable semiconductor material.
  6. Liu, Martin; Chu, Richard; Lin, Hung Hua; Huang, Hsin-Ting; Peng, Jung-Huei; Hsieh, Yuan-Chih; Chao, Lan-Lin; Cheng, Chun-Wen; Tsai, Chia-Shiung, Wafer level packaging bond.
  7. Liu, Ping-Yin; Chu, Li-Chen; Lin, Hung-Hua; Huang, H. T.; Peng, Jung-Huei; Hsieh, Yuan-Chih; Lan-Lin; Cheng, Chun-Wen; Tsai, Chia-Shiung, Wafer level packaging bond.
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