[특허]Methods for preparing semiconductor substrates and interfacial oxides thereon

Arizona Board of Regents, a coporate body organized under Arizona Law, Acting on behalf of Arizona State Univesity

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Methods for preparing semiconductor substrates and interfacial oxides thereon

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/311
미국특허분류(USC)	438/694; 438/689
출원번호	UP-0741563 (2007-04-27)
등록번호	US-7851365 (2011-02-10)
발명자 / 주소	Herbots, Nicole Bradley, James Shaw, Justin Maurice Culbertson, Robert J. Atluri, Vasudeva
출원인 / 주소	Arizona Board of Regents, a coporate body organized under Arizona Law, Acting on behalf of Arizona State Univesity
대리인 / 주소	McDonnell Boehnen Hulbert & Berghoff LLP
인용정보	피인용 횟수 : 4 인용 특허 : 4

초록
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The invention provides novel methods for preparing semiconductor substrates for the growth of an ultra-thin epitaxial interfacial phase thereon. The invention additionally provides the ultra-thin epitaxial interfacial phase formed on a semiconductor substrate prepared by the methods of the invention. Epitaxiality of the interfacial phase is ensured by maintaining the cleaned semiconductor substrate in a static and inert atmosphere prior to oxidation to form the interfacial phase. Such interfacial phase are useful as capping layers and dielectric layers f...

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We claim: 1. A method for depositing an ultra-thin epitaxial interfacial phase having at least either a tetragonal distortion up to 100% or a surface atomic step greater than or equal to 100 Å or both on a cleaned semiconductor substrate, the method comprising the steps of: cleaning a sealable container according to a semiconductor-grade cleaning process comprising a peroxide solution, to provide a cleaned sealable container; cleaning the surface of a semiconductor substrate to provide an initially cleaned semiconductor substrate, wherein the cleaning of the surface of the semiconductor substrate comprises a Herbots-Atluri clean, and a Herbots-Atluri clean is the final cleaning performed prior to maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere; maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere inside of the cleaned sealable container to provide a cleaned semiconductor substrate having decreased surface carbon contamination with respect to the initially cleaned semiconductor substrate; and oxidizing the cleaned semiconductor substrate, wherein the initially cleaned semiconductor substrate is maintained in the static and inert atmosphere from the conclusion of the cleaning step until the beginning of the oxidization step; and wherein the oxidizing results in deposition of the ultra-thin epitaxial interfacial phase having at least either a tetragonal distortion up to 100% or a surface atomic step greater than or equal to 100 Å or both on the cleaned semiconductor substrate. 2. The method of claim 1, wherein the initially cleaned semiconductor substrate is maintained in the static and inert atmosphere for about 30 seconds to 12 months. 3. The method of claim 1, wherein the static and inert atmosphere comprises a noble gas, nitrogen, or mixtures thereof. 4. The method of claim 3, wherein the static and inert atmosphere comprises semiconductor-grade nitrogen. 5. The method of claim 1, wherein the semiconductor substrate comprises a semiconductor material selected from the group consisting of Si, SixGe1-x, GaAs, Si1-x-yGexCy, Si3(1-x)Ge3xN4(1-δ), Ge, Ga1-xAlxAs, SixGe(1-x)(OyN1-y)n, Si1-x-yGexCy(OxN1-x)n, and (Si1-x-yGexCy)3N4-x-y. 6. The method of claim 5, wherein the semiconductor substrate comprises Si; and the ultra-thin epitaxial interfacial phase comprises SiO2. 7. The method of claim 6, wherein the ultra-thin epitaxial interfacial phase comprises beta-cristobalite-SiO2. 8. The method of claim 1, wherein the cleaned semiconductor substrate is oxidized by a semiconductor oxidation process. 9. The method of claim 8, wherein the oxidation process is selected from the group consisting of native oxide formation in ambient air, thermal oxidation, rapid thermal oxidation, and annealing in nitrogen, hydrogen, or a combination thereof. 10. An ultra-thin epitaxial interfacial phase having at least either a tetragonal distortion up to 100% or a surface atomic step greater than or equal to 100 Å or both on a cleaned semiconductor substrate prepared by a process comprising the steps of: cleaning a sealable container according to a semiconductor-grade cleaning process comprising a peroxide solution to provide a cleaned sealable container; cleaning the surface of a semiconductor substrate to provide an initially cleaned semiconductor substrate, wherein the cleaning of the surface of the semiconductor substrate comprises a Herbots-Atluri clean, and a Herbots-Atluri clean is the final cleaning performed prior to maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere; maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere inside of the cleaned sealable container to provide a cleaned semiconductor substrate having decreased surface carbon contamination with respect to the initially cleaned semiconductor substrate; and oxidizing the cleaned semiconductor substrate, wherein the initially cleaned semiconductor substrate is maintained in the static and inert atmosphere from the conclusion of the cleaning step until the beginning of the oxidization step; and wherein the oxidizing results in deposition of the ultra-thin epitaxial interfacial phase having at least either a tetragonal distortion up to 100% or a surface atomic step greater than or equal to 100 Å or both on the cleaned semiconductor substrate. 11. The interfacial phase of claim 10, wherein the static and inert atmosphere comprises a noble gas, nitrogen, or mixtures thereof. 12. The interfacial phase of claim 10, wherein the initially cleaned semiconductor substrate is maintained in the static and inert atmosphere for about 30 seconds to 12 months. 13. The interfacial phase of claim 10, wherein the semiconductor substrate comprises a semiconductor material selected from the group consisting of Si, SixGe1-x, GaAs, Si1-x-yGexCy, Si3(1-x)Ge3xN4(1-δ), Ge, Ga1-xAlxAs, SixGe(1-x)(OyN1-y)n, Si1-x-yGexCy(OxN1-x)n, and (Si1-x-yGexCy)3N4-x-y. 14. The interfacial phase of claim 13, wherein the semiconductor substrate is Si(100). 15. The interfacial phase of claim 10, wherein the ultra-thin interfacial phase comprises SiO2; and the semiconductor substrate comprises Si. 16. The interfacial phase of claim 15, wherein the ultra-thin epitaxial interfacial phase comprises beta-cristobalite SiO2. 17. The interfacial phase of claim 15, wherein the ultra-thin epitaxial interfacial phase has a silicon surface peak at zero oxygen coverage of less than bulk Si(100) as measured along the <111> axis by ion beam analysis. 18. The interfacial phase of claim 15, wherein the interfacial phase is a cubic cristobalite phase or a tetragonally distorted cristobalite phase. 19. The interfacial phase of claim 18, wherein the interfacial phase is tetragonally distorted normal to the semiconductor substrate surface interface, with an expansion of the crystal unit cell dimensions ranging from 0 to 150% along the surface normal, wherein substantially all atoms are arranged in unit cells whose main axes are aligned in the same orientation; only the <100> axes of the interfacial phase are aligned with the Si substrate; and the <110> and <111> axes of the interfacial phase are shifted to accommodate the tetragonal distortion of the phase. 20. A semiconductor structure comprising a cleaned semiconductor substrate, an ultra-thin epitaxial interfacial phase comprising cubic cristobalite phase or a tetragonally distorted cristobalite phase and having at least either a tetragonal distortion up to 100% or a surface atomic step greater than or equal to 100 Å or both, and a high-k dielectric, wherein the interfacial phase is between the cleaned semiconductor substrate and the dielectric, and is prepared according to the method comprising the steps of, cleaning a sealable container according to a semiconductor-grade cleaning process comprising a peroxide solution to provide a cleaned sealable container; cleaning the surface of a semiconductor substrate to provide an initially cleaned semiconductor substrate, wherein the cleaning of the surface of the semiconductor substrate comprises a Herbots-Atluri clean, and a Herbots-Atluri clean is the final cleaning performed prior to maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere; maintaining the initially cleaned semiconductor substrate in a static and inert atmosphere inside of the cleaned sealable container to provide a cleaned semiconductor substrate having decreased surface carbon contamination with respect to the initially cleaned semiconductor substrate; and oxidizing the cleaned semiconductor substrate, wherein the initially cleaned semiconductor substrate is maintained in the static and inert atmosphere from the conclusion of the cleaning step until the beginning of the oxidization step. 21. The semiconductor structure of claim 20, wherein the high-k dielectric comprises HfO2, HfSiON, or ZrO2. 22. The semiconductor structure of claim 20, wherein the semiconductor substrate comprises Si. 23. The semiconductor structure of claim 22, wherein the semiconductor substrate is Si(100).

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