초록 ▼

In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an electrolyte film. An adhesion film i

In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an electrolyte film. An adhesion film is deposited on the substrate and regions of the adhesion film are exposed to oxygen. An overlying stack of cathode films is deposited in successive deposition and annealing steps.

대표청구항 ▼

What is claimed is: 1. A method of fabricating a battery on a substrate, the method comprising:(a) sputter depositing a cathode film on a substrate;(b) annealing the cathode film deposited on the substrate to a first temperature of from about 200 to about 500° C.;(c) forming a stack of the cathode f

What is claimed is: 1. A method of fabricating a battery on a substrate, the method comprising:(a) sputter depositing a cathode film on a substrate;(b) annealing the cathode film deposited on the substrate to a first temperature of from about 200 to about 500° C.;(c) forming a stack of the cathode films on the substrate by repeating steps (a) and (b);(d) annealing the stack of cathode films by heating to a second temperature that is from about 500 to about 700° C., whereby the stack of cathode films exhibits reduced delamination from the surface of the substrate; and(e) depositing a plurality of other battery component films on the substrate that cooperate to form a battery, the battery component films comprising at least another electrode film and an electrolyte.