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Method and structure for fabricating solar cells using a layer transfer process 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/30
출원번호 US-0685686 (2007-03-13)
등록번호 US7863157 (2010-12-20)
발명자 / 주소
  • Henley, Francois J.
  • Ong, Philip James
출원인 / 주소
  • Silicon Genesis Corporation
대리인 / 주소
    Townsend and Townsend and Crew LLP
인용정보 피인용 횟수 : 12  인용 특허 : 78

초록

A photovoltaic cell device, e.g., solar cell, solar panel, and method of manufacture. The device has an optically transparent substrate comprises a first surface and a second surface. A first thickness of material (e.g., semiconductor material, single crystal material) having a first surface region

대표청구항

What is claimed is: 1. A method of fabricating substrates for photovoltaic materials, the method comprising:providing a donor substrate, the donor substrate including a cleave region, a surface region, and a first thickness of silicon or germanium material defined between the cleave region and the s

이 특허에 인용된 특허 (78)

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  14. Henley Francois J. ; Cheung Nathan W., Economical silicon-on-silicon hybrid wafer assembly.
  15. Mukai Ryoichi (Kawasaki JPX), Epitaxial growth process and growing apparatus.
  16. Kub Francis J. ; Hobart Karl D., Fabrication ultra-thin bonded semiconductor layers.
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  18. Ovshinsky Stanford R. (Bloomfield Hills MI) Guha Subhendu (Clawson MI) Nath Prem (Rochester MI) Yang Chi Chung (Troy MI) Fournier Jeffrey (St. Clair Shores MI) Kulman James (Detroit MI), Gas mixtures for the vapor deposition of semiconductor material.
  19. Nathan W. Cheung ; Francois J. Henley, Generic layer transfer methodology by controlled cleavage process.
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  29. Kalfaian Meguer V. (962 Hyperion Ave. Los Angeles CA 90029), Method and apparatus of implanting electrons in a solid for electrical generation.
  30. Henley Francois J. ; Cheung Nathan W., Method for controlled cleaving process.
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  61. Henley Francois J. ; Cheung Nathan W., Silicon-on-silicon wafer bonding process using a thin film blister-separation method.
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  66. Glavish Hilton F. (Incline Village NV), System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic.
  67. Glavish Hilton F. (803 Tyner Way Incline Village NV 89450), System and method for producing superimposed static and time-varying magnetic fields.
  68. Glavish Hilton F. (Incline Village NV) Guerra Michael A. (late of Exeter NH by Sarah B. Cutler ; executor) Kawai Tadashi (Kyoto JPX) Naito Masao (Kyoto JPX) Nagai Nobuo (Kyoto JPX), System and method for unipolar magnetic scanning of heavy ion beams.
  69. Glavish Hilton F. (Incline Village NV), System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning.
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  76. Hanley Peter R. (Rowley MA) Turner Norman L. (Gloucester MA), Unitary electromagnet for double deflection scanning of charged particle beam.
  77. Enquist, Paul M.; Tong, Qin-Yi; Fountain, Jr., Gaius Gillman; Markunas, Robert, Wafer bonding hermetic encapsulation.
  78. Ota,Kan; Asdigha,Mehran, Work piece transfer system for an ion beam implanter.

이 특허를 인용한 특허 (12)

  1. Henley, Francois J.; Kang, Sien; Zhong, Mingyu; Li, Minghang, Bond and release layer transfer process.
  2. Henley, Francois J.; Kang, Sien; Zhong, Mingyu; Li, Minghang, Bond and release layer transfer process.
  3. Shyu, Yann-Mou; Huang, Yi-Ya; Shin, Hwa-Yuh; Chu, Yi-Shou, Condensing lens for high concentration photovoltaic module and manufacturing method thereof.
  4. Kim, Yu-Sik; Park, Sang-Joon, Light emitting element, a light emitting device, a method of manufacturing a light emitting element and a method of manufacturing a light emitting device.
  5. Kell, Adam; Clark-Phelps, Robert; Gillespie, Joseph D.; Prabhu, Gopal; Sakase, Takao; Smick, Theodore H.; Zuniga, Steve; Bababyan, Steve, Method and apparatus for forming a thin lamina.
  6. Kell, Adam; Clark-Phelps, Robert; Gillespie, Joseph D.; Prabhu, Gopal; Sakase, Takao; Smick, Theodore H.; Zuniga, Steve; Bababyan, Steve, Method and apparatus for forming a thin lamina.
  7. Campbell, James P; Campbell, Harry R; Campbell, Ann B; Farber, Joel F, Method for producing high temperature thin film silicon layer on glass.
  8. Henley, Francois J., Method of cleaving a thin sapphire layer from a bulk material by implanting a plurality of particles and performing a controlled cleaving process.
  9. Kumar, Santosh, Pyroelectric solar technology apparatus and method.
  10. Bedell, Stephen W.; Fogel, Keith E.; Hekmatshoartabari, Bahman; Lauro, Paul A.; Li, Ning; Sadana, Devendra K.; Shahidi, Ghavam G.; Shahrjerdi, Davood, Removal of stressor layer from a spalled layer and method of making a bifacial solar cell using the same.
  11. Henley, Francois J., Seed wafer for GaN thickening using gas- or liquid-phase epitaxy.
  12. Bedell, Stephen W.; Cheng, Cheng-Wei; Kim, Jeehwan; Sadana, Devendra K.; Shiu, Kuen-Ting; Sosa Cortes, Norma E., Wafer bonded solar cells and fabrication methods.
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