초록 ▼

An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the ext

An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

대표청구항 ▼

What is claimed is: 1. A method for manufacturing a semiconductor device, the method comprising:determining an initial mixing amount of an oxidizing agent to be supplied to a preparation tank less than the amount required for the oxidizing agent to match a predetermined target concentration of the o

What is claimed is: 1. A method for manufacturing a semiconductor device, the method comprising:determining an initial mixing amount of an oxidizing agent to be supplied to a preparation tank less than the amount required for the oxidizing agent to match a predetermined target concentration of the oxidizing agent in slurry;under control of a controller, supplying a slurry stock solution and the determined initial mixing amount of the oxidizing agent to the preparation tank and mixing the slurry stock solution and the determined initial mixing amount of the oxidizing agent in the preparation tank so that the concentration of the oxidizing agent in the slurry is less than the predetermined target concentration;detecting the concentration of the oxidizing agent in the slurry; thenunder control of a controller, additionally supplying the oxidizing agent to the preparation tank in accordance with the detected result so that the concentration of the oxidizing agent in the slurry becomes equal to the predetermined value; andpolishing a wafer with the slurry in the preparation tank.