초록 ▼

A RF matching network is described, and which includes a 1st to nth RF generators, and wherein each RF generator has a different frequency, and wherein the frequencies of the 1st to the nth RF input ports decline in sequence, and wherein between the ith frequency RF input port, and the output port i

A RF matching network is described, and which includes a 1st to nth RF generators, and wherein each RF generator has a different frequency, and wherein the frequencies of the 1st to the nth RF input ports decline in sequence, and wherein between the ith frequency RF input port, and the output port is a ith circuit, which has a high impedance at the output port to all RF generator frequencies other than the ith frequency; and wherein the ith circuit, when connected to a RF generator with the ith frequency, and wherein measuring from the output port to the ith circuit, the ith circuit has a first impedance at the ith frequency; and when measuring from the output port in the opposite direction to the ith circuit, the ith circuit has a second impedance at the ith frequency; and wherein the first impedance is a substantial conjugate match of the second impedance.

대표청구항 ▼

I claim: 1. A RF matching network comprising:1st to nth RF input ports connected respectively with a 1st to nth RF generator, and wherein each RF generator has a different frequency, and an output port that outputs energy of the respective RF generators to a vacuum processing chamber, and wherein th

I claim: 1. A RF matching network comprising:1st to nth RF input ports connected respectively with a 1st to nth RF generator, and wherein each RF generator has a different frequency, and an output port that outputs energy of the respective RF generators to a vacuum processing chamber, and wherein the frequencies of the 1st to the nth RF input ports decline in sequence; and whereinbetween the ith frequency RF input port, and the output port is an ith circuit, and wherein the ith circuit has a high impedance at the output port to all RF generator frequencies other than the ith frequency; and whereinthe ith circuit, when connected to the RF generator with the ith frequency, and when measuring from the output port to the ith circuit, has a first impedance at the ith frequency; and wherein when measuring from the output port, and in the opposite direction to the ith circuit, the ith circuit has a second impedance at the ith frequency; and wherein the first impedance is a substantial conjugate match of the second impedance.