초록 ▼

A periodic structure is to be successively formed over an extensive area with a uniaxial laser beam. Such method includes irradiating a uniaxial laser beam near an ablation threshold to a surface of a material; and executing an overlapped scanning on the irradiated region, so as to cause an ablation

A periodic structure is to be successively formed over an extensive area with a uniaxial laser beam. Such method includes irradiating a uniaxial laser beam near an ablation threshold to a surface of a material; and executing an overlapped scanning on the irradiated region, so as to cause an ablation by interference between an incident beam and a surface scattered wave along the material surface; increasing the scattered wave; causing an interference at an interval equal to a wavelength of the laser beam, to thereby cause spontaneous formation of a periodic structure. The periodic structure can be made to have a different ripple spacing by changing an incident angle of the laser beam to the material surface. When the laser incident beam has an angle, the ripple spacing can be changed by changing a scanning direction.

대표청구항 ▼

What is claimed is: 1. A method of forming a periodic structure, comprising:irradiating a surface of a material with a linearly polarized single laser beam of a femtosecond laser, of which a fluence is above but nearly as low as ablation threshold; andexecuting an overlapped scanning in which the la

What is claimed is: 1. A method of forming a periodic structure, comprising:irradiating a surface of a material with a linearly polarized single laser beam of a femtosecond laser, of which a fluence is above but nearly as low as ablation threshold; andexecuting an overlapped scanning in which the laser beam is scanned on the material surface with a laser scanning speed being set such that the number of pulses of the laser beam irradiated on an identical position of the material surface is within a range of 10 to 300, so as to cause the ablation on the material surface at a section where interference has taken place between a p-polarization component of an incident beam and a p-polarization component of a surface scattered wave generated along the material surface, and to thereby form a periodic structure on the material surface, wherein the periodic structure has ripples spacing near a wavelength of the incident beam in a direction perpendicular to a polarization direction of the incident beam.