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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0221828 (2008-08-07) |
등록번호 | US7876114 (2011-01-10) |
발명자 / 주소 |
|
출원인 / 주소 |
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대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 15 인용 특허 : 945 |
A wafer probe comprises a contact conductively interconnected with the wall of a waveguide channel and supported by a substrate that projects from an end of a waveguide channel.
We claim: 1. An apparatus for probing a device under test; said apparatus comprising:(a) an elongate waveguide comprising a waveguide wall including a waveguide end portion and a surface defining a waveguide channel, said waveguide channel defined by a major dimension and a shorter minor dimension,
We claim: 1. An apparatus for probing a device under test; said apparatus comprising:(a) an elongate waveguide comprising a waveguide wall including a waveguide end portion and a surface defining a waveguide channel, said waveguide channel defined by a major dimension and a shorter minor dimension, said major dimension and said minor dimension measured substantially normal to a longitudinal axis of said waveguide channel;(b) a dielectric substrate comprising a first substrate portion affixed to said waveguide wall adjacent a bisector of said major dimension of said waveguide channel and extending from a point of attachment to said waveguide wall toward an opposing side of said waveguide channel and a second substrate portion supported by said first substrate portion and extending from said waveguide channel a distance beyond said waveguide end portion;(c) a contact supported by said substrate and engageable with a probe pad of a device under test; and(d) an electrical conductor conductively interconnected with said contact and including a conductor end portion supported by a surface of said substrate, said conductor end portion conductively interconnected with said waveguide wall proximate said bisector of said major dimension of said waveguide channel.
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