초록 ▼

A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond

A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.

대표청구항 ▼

What is claimed is: 1. A flow sensor apparatus, said apparatus comprising:a flow sense element including a flow sensing bridge, wherein said flow sense element and said flow sensing bridge are mounted on a housing and together sense a mass flow of a flow path; anda seal with a conductive interconnec

What is claimed is: 1. A flow sensor apparatus, said apparatus comprising:a flow sense element including a flow sensing bridge, wherein said flow sense element and said flow sensing bridge are mounted on a housing and together sense a mass flow of a flow path; anda seal with a conductive interconnect, wherein said seal is positioned adjacent said flow sensing bridge such that said seal with said conductive interconnect physically isolates said flow sensing bridge physically from an external environment;a signal conditioning circuit that converts a sensed flow into a proportional analog output signal, wherein said signal conditioning circuit is electrically connected to said flow sensing bridge; andwherein said seal with said conductive interconnect conducts a power signal along at least part of a path from said signal conditioning circuit to said flow sensing bridge, and conducts an output signal along at least part of a path from said flow sensing bridge to said signal conditioning circuit.