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Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01F-023/00   
미국특허분류(USC) 073/313
출원번호 US-0577864 (2005-10-24)
등록번호 US7966879 (2011-06-15)
국제출원번호 PCT/US2005/038173 (2005-10-24)
§371/§102 date 20071004 (20071004)
국제공개번호 WO06/047410 (2006-05-04)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Hultquist IP
인용정보 피인용 횟수 : 11  인용 특허 : 60
초록
▼

A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more s...

대표
청구항
▼

What is claimed is: 1. A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel, said monitoring system including (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor...

이 특허에 인용된 특허 (60)

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  9. Wodjenski,Michael J.. Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array. USP2006097104292.
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  13. Luping Wang ; Terry A. Tabler ; James A. Dietz. Fluid distribution system and process, and semiconductor fabrication facility utilizing same. USP2002096453924.
  14. Wang, Luping; Tabler, Terry A.; Dietz, James A.. Fluid distribution system and process, and semiconductor fabrication facility utilizing same. USP2003056561213.
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이 특허를 인용한 특허 피인용횟수: 11

  1. Case, Abby Catherine; Gennrich, David James; Woods, Scott A.; Schweitzer, Chad Anthony. Automatic paper product dispenser with data collection and method. USP2017039604811.
  2. Case, Abby Catherine; Gennrich, David James; Woods, Scott A.; Schweitzer, Chad Anthony. Automatic paper product dispenser with data collection and method. USP2018059963314.
  3. Mayer, James J.; Ray, Richard S.; Kaim, Robert; Sweeney, Joseph D.. Enriched silicon precursor compositions and apparatus and processes for utilizing same. USP2014078779383.
  4. Mayer, James J.; Ray, Richard S.; Kaim, Robert; Sweeney, Joseph D.. Enriched silicon precursor compositions and apparatus and processes for utilizing same. USP2015109171725.
  5. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel. USP2015109170246.
  6. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel. USP2013108555705.
  7. McManus, James V.; Dietz, James; Lurcott, Steven M.. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel. USP2015089097611.
  8. Kaim, Robert; Sweeney, Joseph D.; Avila, Anthony M.; Ray, Richard S.. Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system. USP2014078785889.
  9. Kaim, Robert; Sweeney, Joseph D.; Avila, Anthony M.; Ray, Richard S.. Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system. USP2017099754786.
  10. Kaim, Robert; Sweeney, Joseph D.; Avila, Anthony M.; Ray, Richard S.. Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system. USP2015049012874.
  11. Liebenberg, Adrienne; Trautz, Simone. Pressure vessel. USP2016039285078.

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