초록 ▼

This invention relates to a FOUP opener in which a FOUP is placed and the FOUP door of the FOUP can be detached so as to allow access to the interior of the FOUP. The FOUP opener includes a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mech

This invention relates to a FOUP opener in which a FOUP is placed and the FOUP door of the FOUP can be detached so as to allow access to the interior of the FOUP. The FOUP opener includes a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mechanism for holding the FOUP door to be detached, and a port door moving unit for moving said port door holding the FOUP door so as that the FOUP is opened. The port door has a main structure in which said attaching/detaching mechanism is arranged and a surface panel to cover said main structure. The surface panel is detachable from said main structure at a front side of the FOUP opener.

대표청구항 ▼

What is claimed is: 1. A FOUP opener in which a FOUP is placed and a FOUP door of the FOUP can be detached so as to allow access to an interior of the FOUP, said FOUP opener comprising:a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mechani

What is claimed is: 1. A FOUP opener in which a FOUP is placed and a FOUP door of the FOUP can be detached so as to allow access to an interior of the FOUP, said FOUP opener comprising:a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mechanism for holding the FOUP door to be detached; andport door moving means for moving said port door holding the FOUP door so that the FOUP is opened,wherein said port door includes:a main structure in which said attaching/detaching mechanism is arranged on a first surface of said main structure and said holding mechanism is arranged on a second surface of said main structure;a first surface panel covering the first surface of said main structure; anda second surface panel covering the second surface of said main structure, andwherein said first and second surface panels are detachable from said main structure to allow access to an interior of the main structure of the port door and re-attachable after said panels have been detached.