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Microfabricated elastomeric valve and pump systems

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F15C-001/06
출원번호 US-0934235 (2007-11-02)
등록번호 US8002933 (2011-08-08)
발명자 / 주소
  • Unger, Marc A.
  • Chou, Hou-Pu
  • Thorsen, Todd A.
  • Scherer, Axel
  • Quake, Stephen R.
출원인 / 주소
  • California Institute of Technology
대리인 / 주소
    Kilpatrick Townsend & Stockton LLP
인용정보 피인용 횟수 : 14  인용 특허 : 105

초록

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se

대표청구항

What is claimed is: 1. A method of microfabricating an elastomeric structure, comprising:microfabricating a first elastomeric layer, wherein the first elastomeric layer has a first Young's modulus between 20 Pa and 1 GPa;micro fabricating a second elastomeric layer wherein the second elastomeric lay

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  3. Dummer, Matthew M.; Hogan, William; Hibbs-Brenner, Mary K.; Johnson, Klein L.; Cole, Garrett D., Method and apparatus including movable-mirror mems-tuned surface-emitting lasers.
  4. Vom, Eduardo; Roy, Tammie Kim; Lewis, Craig Matthews; Hobbs, Benjamin Rawlingson; Hobbs, Simon James, Method, system and apparatus for improved micromanipulation and storage.
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