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An electrically programmable fuse includes an anode, a cathode, and a fuse link conductively connecting the cathode with the anode, which is programmable by applying a programming current. The anode and the fuse link each include a polysilicon layer and a silicide layer formed on the polysilicon lay

An electrically programmable fuse includes an anode, a cathode, and a fuse link conductively connecting the cathode with the anode, which is programmable by applying a programming current. The anode and the fuse link each include a polysilicon layer and a silicide layer formed on the polysilicon layer, and the cathode includes the polysilicon layer and a partial silicide layer formed on a predetermined portion of the polysilicon layer of the cathode located adjacent to a cathode junction where the cathode and the fuse link meet.

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What is claimed is: 1. A fabrication method of an electrically programmable fuse comprising an anode, a cathode and a fuse link, the method comprising:forming a polysilicon layer on a substrate;forming a silicide mask on a portion of the polysilicon layer formed for the cathode to block a formation

What is claimed is: 1. A fabrication method of an electrically programmable fuse comprising an anode, a cathode and a fuse link, the method comprising:forming a polysilicon layer on a substrate;forming a silicide mask on a portion of the polysilicon layer formed for the cathode to block a formation of silicide on the portion;depositing a metal layer on the silicide mask and on the polysilicon layer not covered by the silicide mask;reacting the metal layer with the polysilicon layer not covered by the silicide mask and forming a silicide layer on the polysilicon layer; andremoving the silicide mask for the cathode and un-reacted deposited metal formed on the silicide mask, and exposing the polysilicon layer formed beneath the silicide mask to form the anode, the cathode, and the fuse link.