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Electromechanical system having a controlled atmosphere, and method of fabricating same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/29
출원번호 US-0403468 (2009-03-13)
등록번호 US8018077 (2011-08-30)
발명자 / 주소
  • Partridge, Aaron
  • Lutz, Markus
  • Kronmueller, Silvia
출원인 / 주소
  • Robert Bosch GmbH
대리인 / 주소
    Kenyon & Kenyon LLP
인용정보 피인용 횟수 : 0  인용 특허 : 60

초록 ▼

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of fabricating or manufacturing MEMS having mechanical structures that operate in controlled or predetermined mechanical damping environments. In this regard, the present inven

대표청구항 ▼

What is claimed is: 1. An electromechanical device comprising:a chamber including a first encapsulation layer having at least one vent;a mechanical structure, wherein the mechanical structure is disposed in the chamber; anda second encapsulation layer, deposited over or in the vent, to thereby seal

이 특허에 인용된 특허 (60)

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