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Top layers of metal for high performance IC's 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/522
출원번호 US-0138453 (2008-06-13)
등록번호 US8022546 (2011-09-06)
발명자 / 주소
  • Lin, Mou-Shiung
  • Lee, Jin-Yuan
출원인 / 주소
  • Megica Corporation
대리인 / 주소
    McDermott Will & Emery, LLP
인용정보 피인용 횟수 : 0  인용 특허 : 159

초록

The present invention adds one or more thick layers of polymer dielectric and one or more layers of thick, wide metal lines on top of a finished semiconductor wafer, post-passivation. The thick, wide metal lines may be used for long signal paths and can also be used for power buses or power planes,

대표청구항

What is claimed is: 1. A semiconductor chip comprising:a silicon substrate;a transistor in or on said silicon substrate;a metallization structure over said silicon substrate, wherein said metallization structure comprises a first metal layer and a second metal layer over said first metal layer;a die

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