초록 ▼

A substrate processing apparatus comprises a substrate handling chamber, a pair of position sensors, and a substrate transfer robot. Each of the sensors comprises an emitter configured to emit a beam of light, and a receiver configured to receive the light beam. The substrate transfer robot comprise

A substrate processing apparatus comprises a substrate handling chamber, a pair of position sensors, and a substrate transfer robot. Each of the sensors comprises an emitter configured to emit a beam of light, and a receiver configured to receive the light beam. The substrate transfer robot comprises an end effector and a robot actuator. The end effector is configured to hold a substrate such that the substrate has a same expected position with respect to the end effector every time the substrate is held. The robot actuator is configured to move the end effector within the handling chamber to transfer substrates among a plurality of substrate stations. An edge of a substrate held in the expected position by the end effector can partially block a light beam of one of the position sensors, while another end of the end effector partially blocks a light beam of the other position sensor.

대표청구항 ▼

What is claimed is: 1. A semiconductor substrate processing apparatus, comprising:a substrate handling chamber;a first pair of position sensors each comprising:a light beam emitter configured to emit a beam of light; anda receiver configured to receive the light beam; anda substrate transfer robot w

What is claimed is: 1. A semiconductor substrate processing apparatus, comprising:a substrate handling chamber;a first pair of position sensors each comprising:a light beam emitter configured to emit a beam of light; anda receiver configured to receive the light beam; anda substrate transfer robot within the handling chamber, the robot comprising:an elongated end effector having a distal end and a proximal end, the end effector configured to pick up and hold a semiconductor substrate at the distal end such that the substrate has a same expected position with respect to the end effector every time the substrate is picked up and held by the end effector; anda robot actuator configured to move the end effector within the handling chamber to transfer substrates among a plurality of substrate stations;wherein the end effector has a length such that it is possible for an edge of a substrate held in the expected position by the end effector to partially block a light beam emitted from the emitter of one of the position sensors, while the proximal end of the end effector partially blocks a light beam emitted from the emitter of the other position sensor.