초록 ▼

A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-fo

A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-form silicon and the silicon dust is introduced directly into the reactor.

대표청구항 ▼

What is claimed is: 1. A process for the commercial preparation of trichlorosilane comprising reacting silicon dust particles with hydrogen chloride in a fluidized bed reactor, the silicon dust consisting essentially of metallurgical grade silicon dust, said silicone dust directly obtained as a wast

What is claimed is: 1. A process for the commercial preparation of trichlorosilane comprising reacting silicon dust particles with hydrogen chloride in a fluidized bed reactor, the silicon dust consisting essentially of metallurgical grade silicon dust, said silicone dust directly obtained as a waste product in the preparation of defined silicon particle size fractions from metallurgical grade lump-form silicon, the silicon dust having a silicon dust particle size distribution within the bounds of Type 1 and Type 4 silicon dusts of FIG. 1, and separating trichloromonosilane from a product gas stream, wherein the trichlorosilane is suitable for the preparation of ultrapure silicon in the semiconductor and photovoltaic industries.