초록 ▼

A method for simulating the effect of trapped charge in an electrostatic chuck on the chuck performance comprises creating a trapped-charge electrical model having a trapped-charge capacitor and a gap-trapped resistor, and coupling the model to a plurality of voltage sources. The trapped-charge capa

A method for simulating the effect of trapped charge in an electrostatic chuck on the chuck performance comprises creating a trapped-charge electrical model having a trapped-charge capacitor and a gap-trapped resistor, and coupling the model to a plurality of voltage sources. The trapped-charge capacitor and the gap-trapped resistor may be varied in relation to a plurality of electrostatic chuck physical parameters.

대표청구항 ▼

What is claimed is: 1. A method of using a circuit simulator to simulate an effect of trapped charge in an electrostatic chuck on the electrostatic chuck performance, the method comprising:creating a trapped-charge electrical model by coupling a trapped charge capacitor to a gap-trapped resistor and

What is claimed is: 1. A method of using a circuit simulator to simulate an effect of trapped charge in an electrostatic chuck on the electrostatic chuck performance, the method comprising:creating a trapped-charge electrical model by coupling a trapped charge capacitor to a gap-trapped resistor and to a grain resistor;selecting a capacitance value Ctrapped for the trapped charge capacitor;selecting a resistance value Rgap-trapped for the gap-trapped resistor;selecting a resistance value Rgrain for the grain resistor;creating an electrostatic chuck simulation circuit by coupling a substrate-to-chuck interface gap capacitor with a substrate-to-chuck interface gap resistor, a substrate resistor, at least one cable resistor, and a plurality of voltage sources;configuring at least one of the plurality of voltage sources to provide a time-varying voltage;coupling the trapped-charge electrical model with the electrostatic chuck simulation circuit; andexecuting a first simulation in the circuit simulator to determine time-varying voltage and currents responses within a plurality of circuit nodes in the electrostatic chuck simulation circuit.