초록 ▼

A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engageme

A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve.

대표청구항 ▼

The invention claimed is: 1. A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for said one or more valves, each valve comprising:an inlet port;an outlet port;a weir positioned between said inlet and outlet ports, said weir having a sealing surface;

The invention claimed is: 1. A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for said one or more valves, each valve comprising:an inlet port;an outlet port;a weir positioned between said inlet and outlet ports, said weir having a sealing surface;a diaphragm membrane for sealing engagement with said sealing surface; andat least one thermal bend actuator for moving said diaphragm membrane between a closed position in which said membrane is sealingly engaged with said sealing surface and an open position in which said membrane is disengaged from said sealing surface,