초록 ▼

Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central

Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.

대표청구항 ▼

We claim: 1. A heated silicon deposition reactor system, comprising:a plurality of seed particles;a vessel having an outer wall;an insulation layer facing an inner surface of the outer wall;at least one heater positioned inwardly of the insulation layer;a removable concentric liner positioned inward

We claim: 1. A heated silicon deposition reactor system, comprising:a plurality of seed particles;a vessel having an outer wall;an insulation layer facing an inner surface of the outer wall;at least one heater positioned inwardly of the insulation layer;a removable concentric liner positioned inwardly of the at least one heater, the liner having an inner surface which defines a chamber that contains the seed particles;a central inlet nozzle having an upper opening positioned to inject a primary gas comprising a silicon-bearing gas upwardly into the chamber, wherein the central inlet nozzle comprises an inner wall and an outer wall positioned concentrically around the inner wall to channel a flow of the primary gas through a center passageway defined by the inner wall and a flow of a secondary gas through an annular passageway between the inner wall and the outer wall;a plurality of fluidization nozzles, wherein each fluidization nozzle has an outlet opening into the chamber;at least one cooling gas nozzle opening into the chamber below the plurality of fluidization nozzles; andat least one outlet for removing silicon-coated product particles from the vessel.