IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0621689
(2009-11-19)
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등록번호 |
US-8089050
(2012-01-03)
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발명자
/ 주소 |
- Purser, Kenneth Harry
- Park, William H.
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출원인 / 주소 |
- Twin Creeks Technologies, Inc.
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대리인 / 주소 |
The Mueller Law Office, P.C.
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인용정보 |
피인용 횟수 :
0 인용 특허 :
5 |
초록
▼
A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations along the length of the bar of turns per unit length. In an example, one coil structure may have uniform t
A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations along the length of the bar of turns per unit length. In an example, one coil structure may have uniform turns per unit length along the bar, so that energizing the coil structures forms a magnetic field component extending across the gap between the bars with a quadrupole intensity distribution. A second coil structure may have turns per unit length varying to produce a hexapole magnetic field intensity distribution. Further coil structures may be provided to produce octopole and decapole magnetic field distributions. The coil structures may be energized to produce magnetic fields parallel to the bars which vary along the length of the bars, to twist or flatten the ribbon-shaped beam.
대표청구항
▼
1. A method of modifying a ribbon-shaped ion beam having an elongate cross-section normal to a beam direction, wherein at any position along said ribbon-shaped beam an orthogonal (x, y, z) Cartesian co-ordinate system is defined in which a z-axis of the co-ordinate system extends in the beam directi
1. A method of modifying a ribbon-shaped ion beam having an elongate cross-section normal to a beam direction, wherein at any position along said ribbon-shaped beam an orthogonal (x, y, z) Cartesian co-ordinate system is defined in which a z-axis of the co-ordinate system extends in the beam direction at a center line of said ribbon-shaped beam, an x-axis extends in a long direction of said elongate cross-section of said ribbon-shaped beam, and a y-axis extends in a short direction of said elongate cross-section, the method comprising the steps of: providing opposed ferromagnetic bars each having a length and defining between them an elongate open space to accommodate said ribbon-shaped beam passing between the bars with the x-axis of the beam extending along a length of said elongate space;providing, on each of said opposed ferromagnetic bars, a respective first coil structure comprising a continuous winding which has a first predetermined distribution along said length of the bar of turns per unit of length, said first predetermined distribution being selected to provide, when said first coil structures are selectively energized, a first component magnetic field in a y-direction in said elongate open space between said opposed ferromagnetic bars, said first component magnetic field having a corresponding first distribution of magnetic field intensity over said length of said open space in an x-direction;providing, on each of said opposed ferromagnetic bars, at least a respective second coil structure comprising at least one continuous winding which has a second predetermined distribution along said length of the bar of turns per unit length, said second predetermined distribution being selected to provide, when said second coil structures are selectively energized, a second component magnetic field in said y-direction in said elongate open space between said opposed ferromagnetic bars, said second component magnetic field having a corresponding second distribution of magnetic field intensity over at least a part of said length of said open space in said x-direction; andpassing said ribbon-shaped beam through said elongate open space between said opposed ferromagnetic bars; and selectively energizing said respective first and second coil structures with electric currents to apply a desired modification to said ribbon-shaped ion beam. 2. A method as claimed in claim 1, further comprising the steps of providing, on each of said opposed ferromagnetic bars as said respective second coil structure, a further continuous winding in addition to said one continuous winding, said one and said further continuous windings being located on opposite sides of a mid-point of the length of said ferromagnetic bar and together providing said second predetermined distribution of turns per unit length, whereby said second component magnetic field provided when both said one and said further continuous windings are selectively energized has said corresponding second distribution of magnetic field intensity over the length of said elongate open space; and selectively and independently energizing said one and said further continuous windings of said second coil structures. 3. A method as claimed in claim 1, wherein said first distribution of magnetic field intensity is a quadrupole distribution. 4. A method as claimed in claim 3, wherein said second distribution of magnetic field intensity is a hexapole distribution. 5. A method as claimed in claim 1, comprising the further step of providing on each of said opposed ferromagnetic bars, a respective third coil structure comprising at least one continuous winding which has a third predetermined distribution along said length of the bar of turns per unit length, said third predetermined distribution being selected to provide, when said third coil structures are selectively energized, a third component magnetic field in said y-direction in said elongate open space between said opposed ferromagnetic, said third component magnetic field having a corresponding third distribution of magnetic field intensity over at least a part of said length of said open space in said x-direction; and further selectively energizing said respective third coil structures. 6. A method as claimed in claim 5, further comprising the steps of providing, on each of said opposed ferromagnetic bars as said respective third coil structure, a further continuous winding in addition to said one continuous winding, said one and said further continuous windings being located on opposite sides of a mid-point of the length of said ferromagnetic bar and together providing said third predetermined distribution of turns per unit length, whereby said third component magnetic field provided when both said one and said further continuous windings are selectively energized has said corresponding third distribution of magnetic field intensity over the length of said elongate open space; andselectively and independently energizing said one and said further continuous windings of said third coil structures. 7. A method as claimed in claim 5, wherein said first, second and third distributions of magnetic field intensity are respectively quadrupole, hexapole and octopole distributions. 8. A method as claimed in claim 5, comprising the further step of providing on each of said opposed ferromagnetic bars, a respective fourth coil structure comprising at least one continuous winding which has a fourth predetermined distribution along said length of the bar of turns per unit length, said fourth predetermined distribution being selected to provide, when said fourth coil structures are selectively energized, a fourth component magnetic field in said y-direction in said elongate open space between said opposed ferromagnetic bars, said fourth component magnetic field having a corresponding fourth distribution of magnetic field intensity over at least a part of said length of said open space in said x-direction; andfurther selectively energizing said respective fourth coil structures. 9. A method as claimed in claim 8, further comprising the steps of providing, on each of said opposed ferromagnetic bars as said respective fourth coil structure, a further continuous winding in addition to said one continuous winding, said one and said further continuous windings being located on opposite sides of a mid-point of the length of said ferromagnetic bar and together providing said fourth predetermined distribution of turns per unit length, whereby said fourth component magnetic field provided when both said one and said further continuous windings are selectively energized has said corresponding fourth distribution of magnetic field intensity over the length of said elongate open space; and selectively and independently energizing said one and said further continuous windings of said fourth coil structures. 10. A method as claimed in claim 8, wherein said first, second, third and fourth distributions of magnetic field intensity are respectively quadrupole, hexapole, octopole and decapole distributions. 11. A method as claimed in claim 1, comprising the further step of controlling a dipole component of magnetic field intensity across said elongate open space between said opposed ferromagnetic bars. 12. A method as claimed in claim 11, wherein said dipole field intensity is controlled by connecting a ferromagnetic yoke between mid-points of said opposed ferromagnetic bars. 13. A method as claimed in claim 1, wherein at least one of said first coil structures and said second coil structures are energized to provide an additional component magnetic field which is directed in the x-direction along said length of said elongate space to apply y-deflections about said x-axis to ions of the ribbon-shaped beam. 14. A method as claimed in claim 3, wherein at least said first coil structures are energized to provide a first additional component magnetic field which is directed in the x-direction along said length of said elongate space to apply y-deflections about said x-axis to ions of the ribbon-shaped beam, said first additional component magnetic field having a uniform intensity along said x-axis. 15. A method as claimed in claim 4, wherein at least said second coil structures are energized to provide a second additional component magnetic field which is directed in the x-direction along said length of said elongate space to apply y-deflections about said x-axis to ions of the ribbon-shaped beam, said second additional component magnetic field having a non-uniform intensity which varies linearly with x. 16. A method as claimed in claim 10, wherein at least one of said third coil structures and said fourth coil structures are energized to provide at least a respective one of corresponding third and fourth additional component magnetic fields each of which is directed in the x-direction along said length of said elongate space to apply y-deflections about said x-axis to ions of the ribbon-shaped beam, each of said third and fourth additional component magnetic fields having a respective non-uniform intensity which varies with a respective predetermined function of x. 17. Apparatus for modifying a ribbon-shaped ion beam having an elongate cross-section normal to a beam direction, wherein at any position along said ribbon-shaped beam an orthogonal (x, y, z) Cartesian co-ordinate system is defined in which a z-axis of the co-ordinate system extends in the beam direction at a center line of said ribbon-shaped beam, an x-axis extends in a long direction of said elongate cross-section of said ribbon-shaped beam, and a y-axis extends in a short direction of said elongate cross-section, said apparatus comprising: a pair of opposed ferromagnetic bars each having a length and defining between them an elongate open space to accommodate said ribbon-shaped beam passing between the bars with the x-axis of the beam extending along a length of said elongate space;a respective first coil structure, on each of said opposed ferromagnetic bars, wherein said respective first coil structures each comprise a continuous winding and have a first predetermined distribution, along said length of the bar, of turns per unit length, said first predetermined distribution being selected to provide, when said first coil structures are selectively energized, a first component magnetic field transversely across said elongate open space between said opposed bars, said first component magnetic field having a corresponding first distribution of magnetic field intensity over said length of said elongate open space;a respective second coil structure, on each of said opposed ferromagnetic bars, wherein said respective second coil structures each comprise a pair of continuous windings a respective one of said pair being on each of opposite sides of a mid-point of the length of the respective said ferromagnetic bar, said pair of continuous windings having a second predetermined distribution of turns per unit length, along the length of the bar, wherein said second predetermined distribution is selected to provide, when said second coil structures are selectively energized, a second component magnetic field transversely across said elongate open space between said opposed ferromagnetic bars, said second component magnetic field having a corresponding second distribution of magnetic field intensity over said length of said elongate open space; andrespective power supply leads to said continuous winding of each said first coil structure and to each of said pair of continuous windings of each said second coil structure. 18. Apparatus as claimed in claim 17, wherein said first predetermined distribution of turns per unit length of said continuous windings of said first coil structures is selected so that said corresponding first distribution of magnetic field intensity is a first multipole distribution, and said second predetermined distribution of turns per unit length of said pairs of continuous windings of said second coil structures is selected so that said corresponding second distribution of magnetic field intensity is a second multipole distribution of a different order to said first multipole distribution. 19. Apparatus as claimed in claim 18, wherein said first multipole distribution is a quadrupole distribution and said second multipole distribution is a hexapole distribution. 20. Apparatus as claimed in claim 17, further comprising: a respective third coil structure, on each of said opposed ferromagnetic bars, wherein said respective third coil structures each comprise a pair of continuous windings on opposite sides of the mid-point of the length of the respective said ferromagnetic bar, said pair of continuous windings having a third predetermined distribution of turns per unit length, along the length of the bar, wherein said third predetermined distribution is selected to provide, when said third coil structures are selectively energized, a third component magnetic field transversely across said elongate open space between said opposed ferromagnetic bars, said third component magnetic field having a corresponding third distribution of magnetic field intensity over said length of said elongate open space; andfurther respective power leads to each of said pair of continuous windings of each said third coil structures. 21. Apparatus as claimed in claim 20, wherein said first, second and third distributions of turns per unit length of said continuous windings of said first, second and third coil structures are respectively selected so that said corresponding first, second and third distributions of magnetic field intensity are respectively quadrupole, hexapole and octopole distributions. 22. Apparatus as claimed in claim 20, further comprising: a respective fourth coil structure, on each of said opposed ferromagnetic bars, wherein said respective fourth coil structures each comprise a pair of continuous windings on opposite sides of the mid-point of the length of the respective said ferromagnetic bar, said pair of continuous windings having a fourth predetermined distribution of turns per unit length, along the length of the bar, wherein said fourth predetermined distribution is selected to provide, when said fourth coil structures are selectively energized, a fourth component magnetic field transversely across said elongate open space between said opposed ferromagnetic bars, said fourth component magnetic field having a corresponding fourth distribution of magnetic field intensity over said length of said elongate open space; andfurther respective power leads to each of said pair of continuous windings of each said fourth coil structures. 23. Apparatus as claimed in claim 22, wherein said first, second, third and fourth distributions of turns per unit length of said continuous windings of said first, second, third and fourth coil structures are respectively selected so that said corresponding first, second, third and fourth distributions of magnetic field intensity are respectively quadrupole, hexapole, octopole and decapole distributions. 24. Apparatus as claimed in claim 17, comprising a ferromagnetic yoke interconnecting said mid-points of said opposed ferromagnetic bars. 25. Apparatus as claimed in claim 17, comprising a pair of ferromagnetic core pieces, each of the pair interconnecting a respective pair of adjacent ends of said opposed ferromagnetic bars, and a respective bucking coil wound on each said ferromagnetic core piece. 26. Apparatus as claimed in claim 17, wherein each of said opposed ferromagnetic bars carries a corresponding even number of coil units distributed evenly along the respective said bar symmetrically on either side of said mid-point of said bar, and each of said coil units carries coil turns of said windings of a plurality of said coil structures, wherein the number of said coil turns in respective said coil units for each of said coil structures is determined in accordance with the respective said predetermined distribution of turns per unit length of the respective said coil structure. 27. Apparatus as claimed in claim 26, further comprising ferromagnetic tabs located between each adjacent pair of said coil units on each said ferromagnetic bar, said tabs extending towards said elongate open space. 28. Apparatus as claimed in claim 17 including programmable power supplies connected to said power supply leads for delivering predetermined currents to said continuous windings, wherein said programmable power supplies are arranged to deliver said predetermined currents having first current components which energize said continuous windings to provide opposed magnetic poles on said pair of opposed ferromagnetic bars to provide said first and second component magnetic fields. 29. Apparatus as claimed in claim 28 wherein said programmable power supplies are arranged to deliver said predetermined currents having second components which energize said continuous windings to provide matching magnetic poles on said pair of opposed ferromagnetic bars to provide at least one additional component magnetic field directed along said length of said elongate space.
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