초록 ▼

Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have

Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.

대표청구항 ▼

1. A filter element comprising a sintered fiber media, said filter element having a cylindrical body with an outer diameter that decreases from a center portion of the element toward an end portion of the element, andsaid fiber media having a density that increases from the center portion of the ele

1. A filter element comprising a sintered fiber media, said filter element having a cylindrical body with an outer diameter that decreases from a center portion of the element toward an end portion of the element, andsaid fiber media having a density that increases from the center portion of the element toward the end portion of the element, wherein the density of the media at the center portion of the element is between about 2% and about 30%, andwherein said element provides a filtration efficiency of at least 5 log reduction value at a flux of 33 SLM/in2 at a most penetrating particle size under nitrogen flow and atmospheric conditions at filter exit. 2. The filter element of claim 1, wherein the fiber media includes metal fiber. 3. The filter element of claim 2, wherein the metal includes stainless steel. 4. The filter element of claim 1, wherein said element is contained in a metal housing. 5. The filter element of claim 1, wherein the density of the media at the center portion of the element is between about 5% and about 18%. 6. The filter element of claim 5, wherein the density of the media at the center portion of the element is between about 5% and about 13%. 7. The filter element of claim 1, having a filtration efficiency of at least 9 log reduction value at a flux of 6 SLM/in2 at a most penetrating particle size under nitrogen flow and atmospheric conditions at filter exit. 8. The filter element of claim 1, wherein the filter element has a wall thickness of about 0.1 inches to about 1.5 inches in the center of the filter element. 9. The filter element of claim 8, where the filter element has a wall thickness of about 0.2 inches to about 0.3 inches in the center of the filter element. 10. The filter element of claim 9, where the filter element has a wall thickness of about 0.1 inches at the ends of the filter element. 11. The filter element of claim 1, wherein the cylindrical body has an inner diameter at the center of the filter element between about 0.1 inches and about 2 inches. 12. The filter element of claim 11, wherein the cylindrical body has an inner diameter at the center of the filter element between about 0.4 inches and about 0.8 inches. 13. The filter element of claim 1, wherein the length of the filter element is about 0.5 inches to about 15 inches. 14. The filter element of claim 1, wherein the length of the filter element is about 1 inch to about 5 inches. 15. The filter element of claim 1, wherein the filter provides a pressure drop between about 1 psi and about 13 psi at a flux of about 6 SLM/in2 to about 42 SLM/in2, under nitrogen flow and atmospheric exit conditions. 16. The filter element of claim 1, wherein the filter provides a pressure drop between about 0.1 psi to about 13 psi at a flux of about 0.8 SLM/in2 to about 42 SLM/in2, under nitrogen flow and atmospheric exit conditions. 17. The filter element of claim 1, wherein the filter provides a LRV per unit pressure drop between about 0.4 psid−1 and about 25 psid−1, at a flux of about 6 SLM/in2 to about 105 SLM/in2, under nitrogen flow and atmospheric exit conditions. 18. The filter element of claim 1, wherein said element is affixed to hardware at each end. 19. The filter element of claim 18, wherein said hardware comprises a flange. 20. The filter element of claim 2, wherein the metal includes one or more of nickel, thallium, titanium, aluminum, tungsten, copper, metal oxides, ceramic materials, Hastelloys, bronze, Cu-alloys, and Fe—Cr—Al alloys. 21. The filter element of claim 1, wherein the fiber media is made from fibers having fiber equivalent diameters of about 1 micron to about 10 microns. 22. The filter element of claim 1, wherein the fiber media is made from fibers having fiber lengths of about 10 microns to about 2000 microns. 23. The filter element of claim 1, wherein the fiber media is made from fibers having a three-dimensional aspect. 24. A method of filtering a fluid, comprising contacting a fluid to be filtered with a filter element, where the filter element comprises a sintered fiber media, where said filter element has a cylindrical body with an outer diameter that decreases from a center portion of the element toward an end portion of the element,where said fiber media has a density that increases from the center portion of the element toward the end portion of the element, wherein the density of the media at the center portion of the element is between about 2% and about 15%, andwherein said element provides a filtration efficiency of at least 5 log reduction value at a flux of 33 SLM/in2 at a most penetrating particle size under nitrogen flow and atmospheric conditions at filter exit. 25. The method of claim 24, wherein the fluid is a gas. 26. The method of claim 24, wherein the filter element removes at least about 99.999% of particulates in the fluid at a flux of 33 SLM/in2 at a most penetrating particle size under nitrogen flow and atmospheric conditions at filter exit. 27. The method of claim 24, wherein the filter element removes at least about 99.9999999% of particulates in the fluid at a flux of 6 SLM/in2 at a most penetrating particle size under nitrogen flow and atmospheric conditions at filter exit.