초록 ▼

A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a thermal regulation cavity is maintained between the heat source modul

A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a thermal regulation cavity is maintained between the heat source module and the process chamber. Preferably, at least one fluid inlet box is in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity. Additionally, the preferred fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into thermal regulation cavity.

대표청구항 ▼

1. A thermal diffusion chamber comprising: a frame supporting a containment chamber;a process chamber confined within the containment chamber;a heat source module disposed between the containment chamber and the process chamber;a thermal regulation cavity formed between the heat source module and th

1. A thermal diffusion chamber comprising: a frame supporting a containment chamber;a process chamber confined within the containment chamber;a heat source module disposed between the containment chamber and the process chamber;a thermal regulation cavity formed between the heat source module and the process chamber; andat least one fluid inlet box in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity, and wherein the fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into the thermal regulation cavity. 2. The thermal diffusion chamber of claim 1, in which the fluid inlet box further provides an intake port supporting an inlet conduit in contacting adjacency with the plate valve. 3. The thermal diffusion chamber of claim 2, in which the fluid inlet box further provides an exhaust port supporting an outlet conduit in fluidic communication with the thermal regulation cavity. 4. The thermal diffusion chamber of claim 3, in which the fluid inlet box further provides a pivot support in contacting adjacency with the plate valve. 5. The thermal diffusion chamber of claim 4, in which the fluid inlet box further provides an extension conduit having a proximal end and a distal end, the proximal end in contacting adjacency with the outlet conduit, the extension conduit conducting fluid from the environment external to the thermal regulation cavity to the thermal regulation cavity. 6. The thermal diffusion chamber of claim 5, in which the extension conduit provides at least a diffusion member affixed to the distal end of the extension conduit, wherein the diffusion member is configured to preclude fluid conducted from the environment external to the thermal regulation cavity from being applied to the process chamber in a stream normal to the process chamber. 7. The thermal diffusion chamber of claim 6, in which the fluid inlet box further provides a pivot pin disposed between the plate valve and the pivot support, the pivot pin promotes displacement of the plate valve from contacting adjacency with the inlet conduit when fluid is drawn into the thermal regulation cavity and deters passage of fluids from the thermal regulation chamber to the environment external to the thermal regulation cavity when fluid is not being drawn into the thermal regulation cavity. 8. The thermal diffusion chamber of claim 7, further comprising an inlet manifold secured to the inlet conduit, the inlet manifold conducting fluid from the environment external to the thermal regulation cavity to the inlet conduit. 9. The thermal diffusion chamber of claim 2, further comprising a purge conduit in fluidic communication with the thermal regulation cavity and secured to an outlet manifold, the outlet manifold selectively providing an internal pressure less than an internal pressure of the inlet conduit to draw fluid through the fluid inlet box, around the process chamber, and out the purge conduit. 10. The thermal diffusion chamber of claim 1, in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 11. A method of forming a thermal diffusion chamber by steps comprising: providing a frame;supporting a containment chamber on the frame;disposing a heat source module within the containment chamber;confining a process chamber within the heat source module;forming a thermal regulation cavity disposed between the heat source module and the process chamber; andsecuring at least one fluid inlet box to the containment chamber in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity, and wherein the fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into thermal regulation cavity. 12. The method of claim 11, in which the fluid inlet box further provides an intake port supporting an inlet conduit in contacting adjacency with the plate valve. 13. The method of claim 12, in which the fluid inlet box further provides an exhaust port supporting an outlet conduit in fluidic communication with the thermal regulation cavity. 14. The method of claim 13, in which the fluid inlet box further provides a pivot support in contacting adjacency with the plate valve. 15. The method of claim 14, in which the fluid inlet box further provides an extension conduit having a proximal end and a distal end, the proximal end in contacting adjacency with the outlet conduit, the extension conduit conducting fluid from the environment external to the thermal regulation cavity to the thermal regulation cavity. 16. The method of claim 15, in which the extension conduit provides at least a diffusion member affixed to the distal end of the extension conduit, wherein the diffusion member is configured to preclude fluid conducted from the environment external to the thermal regulation cavity from being applied to the process chamber in a stream normal to the process chamber. 17. The method of claim 16, in which the fluid inlet box further provides a pivot pin disposed between the plate valve and the pivot support, the pivot pin promotes displacement of the plate valve from contacting adjacency with the inlet conduit when fluid is drawn into the thermal regulation cavity and deters passage of fluids from the thermal regulation chamber to the environment external to the thermal regulation cavity when fluid is not being drawn into the thermal regulation cavity. 18. The method of claim 17, further comprising a step of securing an inlet manifold to the inlet conduit, the inlet manifold conducting fluid from the environment external to the thermal regulation cavity to the inlet conduit. 19. The method of claim 11, further comprising steps of: reducing pressure in an outlet manifold to a value below an internal pressure of the inlet conduit, the outlet manifold in fluidic communication with the thermal regulation cavity; anddrawing fluid past the plate valve of the fluid inlet box, around the process chamber and out a purge conduit as an outcome of reducing the pressure in the outlet manifold, wherein the purge conduit is disposed. 20. The thermal diffusion chamber of claim 19, in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least substantially 650 millimeters and a length of at least substantially 1650 millimeters.