Capacitive accelerometer
원문보기
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0517068
(2007-12-05)
|
등록번호 |
US-8113054
(2012-02-14)
|
우선권정보 |
KR-10-2006-0122551 (2006-12-05); KR-10-2007-0043804 (2007-05-04) |
국제출원번호 |
PCT/KR2007/006284
(2007-12-05)
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§371/§102 date |
20090530
(20090530)
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국제공개번호 |
WO2008/069573
(2008-06-12)
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발명자
/ 주소 |
- Je, Chang-Han
- Hwang, Gunn
- Jung, Sung-Hae
- Lee, Myung-Lae
- Choi, Chang-Auck
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출원인 / 주소 |
- Electronics and Telecommunications Research Institute
|
인용정보 |
피인용 횟수 :
3 인용 특허 :
9 |
초록
▼
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the pre
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
대표청구항
▼
1. A capacitive accelerometer comprising: a substrate;a sensing mass body disposed above and spaced apart from the substrate, and comprising a mass main body, a support spring, and a sensing electrode;a support part configured to couple the sensing mass body to the substrate;a reference electrode di
1. A capacitive accelerometer comprising: a substrate;a sensing mass body disposed above and spaced apart from the substrate, and comprising a mass main body, a support spring, and a sensing electrode;a support part configured to couple the sensing mass body to the substrate;a reference electrode disposed adjacent to the sensing electrode and movable with respect to the sensing electrode;a driving unit configured to move the reference electrode to adjust a distance between the reference electrode and the sensing electrode; anda stopper configured to limit the motion of the reference electrode. 2. The capacitive accelerometer of claim 1, wherein the stopper is configured to limit an adjustment distance B by which the reference electrode is moved by the driving unit such that it is less than a before-adjustment distance A between the sensing electrode and the reference electrode when the driving unit is not driven. 3. The capacitive accelerometer of claim 1, wherein the distance between the reference electrode and the sensing electrode is adjusted by 0.2 to 0.7 mm. 4. The capacitive accelerometer of claim 1, wherein each of the sensing electrode and the reference electrode has a comb shape, and teeth of the sensing electrode and teeth of the reference electrode alternate with each other. 5. The capacitive accelerometer of claim 1, wherein a before-adjustment distance A between the reference electrode and the sensing electrode is substantially equal to a sum of (1) an adjustment distance B by which the reference electrode moves by the driving unit and (2) an after-adjustment distance C which is defined by the stopper. 6. The capacitive accelerometer of claim 1, wherein the driving unit moves the reference electrode by an electrostatic force. 7. The capacitive accelerometer of claim 6, the capacitive accelerometer further comprising: a first finger coupled to the driving unit finger, anda second finger coupled to the reference electrode,wherein the second finger is configured to be spaced apart from and engaging with the first finger,wherein the stopper limits an adjustment distance B to be less than a before-adjustment distance D between the first finger and the second finger when the driving unit is not driven, andwherein the adjustment distance B is a distance that the reference electrode moves by the driving unit. 8. The capacitive accelerometer of claim 1, wherein the stopper is connected to the reference electrode by a spring. 9. A capacitive accelerometer comprising: a substrate;a reference electrode fixed to the substrate;a sensing mass body disposed above and spaced apart from the substrate, comprising a sensing electrode disposed adjacent to the reference electrode, a support spring, and a mass main body, and movable with respect to the reference electrode;a driving unit configured to move the sensing mass body to adjust a distance between the reference electrode and the sensing electrode; anda stopper configured to limit the motion of the sensing mass body caused by the driving unit. 10. The capacitive accelerometer of claim 9, wherein the stopper is configured to limit an adjustment distance B that the sensing electrode moves by the driving unit to be less than a before-adjustment distance A between the sensing electrode and the reference electrode when the driving unit is not driven. 11. The capacitive accelerometer of claim 9, wherein an adjustment distance B that the sensing electrode is moved by the driving unit is adjusted by 0.2 to 0.7 mm. 12. The capacitive accelerometer of claim 9, wherein each of the sensing electrode and the reference electrode has a comb shape, and teeth of the sensing electrode and teeth of the reference electrode alternate with each other. 13. The capacitive accelerometer of claim 9, wherein a before-adjustment distance A between the reference electrode and the sensing electrode when the driving unit is not driven is substantially equal to a sum of (1) an adjustment distance B by which the sensing electrode moves when the driving unit is driven and (2) an after-adjustment distance C defined by the stopper. 14. The capacitive accelerometer of claim 9, wherein the driving unit moves the sensing mass body using an electrostatic force. 15. The capacitive accelerometer of claim 14, the capacitive accelerometer further comprising: a first finger coupled to the driving unit, anda second finger extending from the support spring of the sensing body,wherein the second finger is spaced apart from and engaged with the first finger, andwherein the stopper is configured to limit an adjustment distance B that the sensing electrode is moved by the driving unit to be less than a before-adjustment distance D between the first finger and the second finger when the driving unit is not driven. 16. A capacitive accelerometer comprising: a substrate;a reference electrode disposed above and spaced apart from the substrate;a sensing electrode disposed above and spaced apart from the substrate and configured to interdigitate with the reference electrode;a driving unit configured to adjust a relative distance between the reference electrode and the sensing electrode; anda stopper configured to limit an adjustment distance by the driving unit.
이 특허에 인용된 특허 (9)
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Wang, Horng-Jou; Hsieh, Hsieh-Shen; Liang, Chao-Jui; Lee, Cheng-Chang; Wang, Chao-Qing; Yuan, Zong-Ting; Chen, Huang-Kun; Shing, Tai-Kang, Capacitance sensing structure.
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Ito Natsuko,JPX ; Okada Hiroyuki,JPX, Capacitance type acceleration sensor.
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Tsugai,Masahiro, Capacitance-type inertial detecting device.
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Murata, Minoru; Sakai, Minekazu, Capacitive acceleration sensor.
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Levy Michel (Cergy FRX) Permuy Alfred (Paris FRX), Capacitive acceleration sensor and its application in a non-servoed accelerometer.
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Kumagai, Munehito; Yoshida, Yukihisa; Tsutsumi, Kazuhiko, Inertia force sensor.
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Galvin Gregory J. ; Davis Timothy J. ; MacDonald Noel C., Microelectromechanical accelerometer for automotive applications.
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Najafi, Khalil; Chae, Junseok, Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same.
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Sakai Minekazu,JPX ; Takeuchi Yukihiro,JPX ; Kano Kazuhiko,JPX ; Fujino Seiji,JPX ; Fukada Tsuyoshi,JPX ; Sugito Hiroshige,JPX ; Murata Minoru,JPX ; Muto Hiroshi,JPX ; Higuchi Hirofumi,JPX ; Ao Kenic, Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure.
이 특허를 인용한 특허 (3)
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Ullrich, Guenther-Nino-Carlo, Acceleration sensor having a frame and transverse web.
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Lin, Shih-Chieh; Huang, Chao-Ta; Su, Chung-Yuan; Hsu, Yu-Wen, Micro-electro mechanical apparatus with interdigitated spring.
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Merz, Peter; Weiss, Manfred, Micromechanical inertial sensor for measuring rotation rates.
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