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Method and system for packaging a MEMS device 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02B-026/00
출원번호 US-0423531 (2009-04-14)
등록번호 US-8115983 (2012-02-14)
발명자 / 주소
  • Miles, Mark W.
  • Sampsell, Jeffrey B.
출원인 / 주소
  • QUALCOMM MEMS Technologies, Inc.
대리인 / 주소
    Knobbe Martens Olson & Bear LLP
인용정보 피인용 횟수 : 0  인용 특허 : 91

초록

A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric

대표청구항

1. A display device, comprising: an array of interferometric modulators disposed on a first surface of a transparent substrate;a carrier comprising a first surface and a second surface, wherein a first surface of the carrier is sealed to said transparent substrate to form a package encapsulating the

이 특허에 인용된 특허 (91)

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