초록 ▼

A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the wo

A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.

대표청구항 ▼

1. A method for cleaning a substrate, the method comprising: providing a pair of hydrostatic or aerostatic bearings, at least one of said pair of hydrostatic bearings being configured for applying a cleaning solution under pressure, so as to define a gap between the bearings, at least one of said be

1. A method for cleaning a substrate, the method comprising: providing a pair of hydrostatic or aerostatic bearings, at least one of said pair of hydrostatic bearings being configured for applying a cleaning solution under pressure, so as to define a gap between the bearings, at least one of said bearings having a plurality of axial grooves and lands, the axial grooves extending perpendicularly to a direction of movement of the substrate and spanning substantially a full width of the substrate;introducing the substrate into the gap;levitating and controlling a position of the substrate while cleaning the substrate by hydrostatically or aerostatically forcing the cleaning solution through said at least one of the bearings to at least one side of the substrate so that the substrate is centrally displaced relative to the bearings; andforcing the cleaning fluid using a pressure differential between the grooves in a direction opposite to a direction of movement of the substrate to use a viscous shear force of the cleaning solution to dislodge and clean a surface of said substrate. 2. The substrate cleaning method according to claim 1, wherein said cleaning solution is then forced into a further axial groove which has a substantially lower pressure than the grooves through which the cleaning solution is forced, whereby the cleaning solution is removed from the surface of the substrate by vacuum force. 3. The method of claim 1, wherein the bearings comprise aerostatic bearings. 4. The method of claim 3, wherein the aerostatic bearing lands are combined with an ultrasonic and or megasonic cleaning apparatus which act upon the surface of the substrate while immersed in said cleaning fluid. 5. The method of claim 4, wherein the ultrasonic or megasonic cleaning apparatus is disposed in a chamber in at least one of the bearings. 6. The method of claim 4, wherein the ultrasonic or megasonic cleaning apparatus is disposed in at least one of the aerostatic bearing lands. 7. The method of claim 1, further comprising introducing an etchant to chemically alter or treat the surface of a substrate. 8. The method of claim 7, wherein the etchant is introduced into grooves in the bearings, said etchant then being forced into a lower pressure axial groove and contained by said lower pressure axial groove, from which said etchant is forced through vacuum pressure into a containment device. 9. The method of claim 8, further comprising monitoring an amount of said etchant in said containment device. 10. The method of claim 1, wherein the complete process is contained and not exposed to ambient air, thereby allowing for precise control of substrate temperature and ambient humidity. 11. The method of claim 1, wherein a cleaning solution is introduced into grooves, said cleaning solution then being forced into a lower pressure axial groove and contained by said lower pressure axial groove, from which said cleaning fluid is forced through vacuum pressure into a containment device. 12. The method according to claim 1, further comprising forcing pressurized and/or heated dry air on one or both sides of the substrate, forcing the cleaning fluid be removed from the surface of said substrate into an axially placed groove of substantially lower pressure than a surrounding portion of one of the bearings, said axially placed groove being situated up stream from a direction of travel of the substrate, electively forcing any fluids or contaminates to be evacuated via a vacuum effect of said groove. 13. The method according to claim 1, further comprising forcing pressurized and/or heated dry air from the bearings to control a temperature of the substrate. 14. The method of claim 1, wherein the bearings comprise a porous material. 15. The method of claim 1, wherein the substrate is flat. 16. The method of claim 1, wherein the step of levitating comprises cleaning the substrate by hydrostatically or aerostatically forcing the cleaning solution through the bearings to both sides of the substrate. 17. The method of claim 1, wherein the cleaning fluid is a liquid. 18. A method for performing a plurality of processes on a substrate, the method comprising: providing a pair of hydrostatic or aerostatic bearings, at least one of said pair of hydrostatic bearings being configured for applying a plurality of fluids for performing the plurality of processes under pressure, so as to define a gap between the bearings, at least one of said bearings having a plurality of axial grooves and lands, the axial grooves extending perpendicularly to a direction of movement of the substrate and spanning substantially a full width of the substrate;introducing the substrate into the gap;levitating and controlling a position of the substrate while processing the substrate by hydrostatically or aerostatically forcing each of the fluids through said at least one of the bearings to at least one side of the substrate so that the substrate is centrally displaced relative to the bearings; andforcing each of the fluids using a pressure differential between the grooves in a direction opposite to a direction of movement of the substrate to use a viscous shear force of each of the fluids to process the substrate. 19. The method of claim 18, wherein the plurality of processes are performed in succession. 20. The method of claim 18, wherein the step of levitating comprises cleaning the substrate by hydrostatically or aerostatically forcing each of the fluids through the bearings to both sides of the substrate. 21. A method for performing a process on a substrate, the method comprising: providing a pair of hydrostatic or aerostatic bearings, at least one of said pair of hydrostatic bearings being configured for applying a fluid for performing the process under pressure, so as to define a gap between the bearings, at least one of said bearings having a plurality of axial grooves and lands, the axial grooves extending perpendicularly to a direction of movement of the substrate and spanning substantially a full width of the substrate;introducing the substrate into the gap;levitating and controlling a position of the substrate while processing the substrate by hydrostatically or aerostatically forcing the fluid through said at least one of the bearings to at least one side of the substrate so that the substrate is centrally displaced relative to the bearings; andforcing the fluid using a pressure differential between the grooves in a direction opposite to a direction of movement of the substrate to use a viscous shear force of the fluid to process the substrate. 22. The method of claim 21, wherein the substrate is flat. 23. The method of claim 21, wherein the step of levitating comprises hydrostatically or aerostatically forcing the fluid through the bearings to both sides of the substrate. 24. The method of claim 21, wherein a temperature-controlled fluid is used to apply said viscous shear force to control a temperature of the substrate. 25. A method for cleaning a substrate, the method comprising: providing a pair of hydrostatic bearings, at least one of said pair of hydrostatic bearings being configured for applying as liquid cleaning solution under pressure, so as to define a gap between the bearings;introducing the substrate into the gap;levitating and controlling a position of the substrate while cleaning the substrate by hydrostatically forcing the cleaning solution through at least one of the bearings to at least one side of the substrate so that the substrate is centrally displaced relative to the hydrostatic bearings; andforcing the cleaning fluid using a pressure differential between the grooves in a direction opposite to a direction of movement of the substrate to use a viscous shear force of the cleaning solution to dislodge and clean a surface of said substrate.