초록 ▼

Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the

Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the substrate to cover the electrodes, patterning the paste by a photolithography process, and reducing the metal-ligand complex included in the patterned paste.

대표청구항 ▼

1. A method of manufacturing a gas sensor, comprising: forming electrodes on a surface of a substrate; wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;manufacturing a paste comprising CNTs having functional groups that can generate cross-linking by expo

1. A method of manufacturing a gas sensor, comprising: forming electrodes on a surface of a substrate; wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;manufacturing a paste comprising CNTs having functional groups that can generate cross-linking by exposure to light and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases; wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth)acrylate groups;coating the paste on the surface of the substrate to cover the electrodes;patterning the paste by a photolithography process; andreducing the metal-ligand complex included in the patterned paste. 2. The method of claim 1, wherein the paste further comprises trimethoxysilyl methacrylate. 3. The method of claim 1, wherein, in the manufacturing of the paste, the paste further comprises photoresist. 4. The method of claim 3, wherein the photoresist is a negative photoresist in which a non-exposed portion is removed by a developing agent. 5. The method of claim 3, wherein the photoresist is a positive photoresist in which an exposed portion is removed by a developing agent. 6. The method of claim 1, wherein the paste is coated on the substrate by spin coating or spray coating. 7. The method of claim 1, wherein the paste is patterned to uncover the electrodes. 8. The method of claim 1, wherein the metal-ligand complex is reduced by heat and a reducing agent. 9. The method of claim 1, wherein the reduction of the metal-ligand complex is performed by baking the patterned paste under a H2 and N2 atmosphere. 10. A method of manufacturing a gas sensor, comprising: forming electrodes on a surface of a substrate; wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;manufacturing a paste consisting essentially of modified CNTs comprising radical cross-linking functional groups, a photo-initiator, and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, orCNTs comprising carboxylic acid functional groups, a photoresist, and a metal-ligand complex comprising a metal that has adsorption selectivity with respect to specific gases; wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth) acrylate groups;coating the paste on the surface of the substrate to cover the electrodes;patterning the paste by a photolithography process; andreducing the metal-ligand complex included in the patterned paste. 11. The method of claim 10, wherein the modified CNTs comprise (meth)acrylate functional groups. 12. The method of claim 10, wherein the photoresist is a negative photoresist or a positive photoresist. 13. A method of manufacturing a gas sensor, comprising: forming electrodes on a surface of a substrate; wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;manufacturing a paste consisting essentially of CNTs, a photoresist, and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases; wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth)acrylate groups;coating the paste on the surface of the substrate to cover the electrodes;patterning the paste by a photolithography process; andreducing the metal-ligand complex included in the patterned paste.