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Apparatus to control a temperature of a device that includes: a thermal head adapted to be thermally contacted to the device; a combined path to the thermal head; a first path maintained at a first temperature and connected to the combined path; a second path maintained at a second temperature diffe

Apparatus to control a temperature of a device that includes: a thermal head adapted to be thermally contacted to the device; a combined path to the thermal head; a first path maintained at a first temperature and connected to the combined path; a second path maintained at a second temperature different from the first temperature and connected to the combined path; a third path connected to the combined path; a pump assembly operable to circulate thermal transfer fluid: from the thermal head, through each of the first, second and third paths, from each of the first, second and third paths, through the combined path, and from the combined path, to and through the thermal head; and a valve assembly operable to control amounts of thermal transfer fluid that flow into the first and second paths, thereby controlling the temperature.

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1. An apparatus to control a temperature of a device, which apparatus comprises: a thermal head adapted to be thermally contacted to the device;a combined path to the thermal head;a first path maintained at a first temperature and connected to the combined path;a second path maintained at a second t

1. An apparatus to control a temperature of a device, which apparatus comprises: a thermal head adapted to be thermally contacted to the device;a combined path to the thermal head;a first path maintained at a first temperature and connected to the combined path;a second path maintained at a second temperature different from the first predetermined temperature and connected to the combined path;a third path connected to the combined path;a pump assembly capable of circulating thermal transfer fluid: (i) from the thermal head, (ii) through each of the first, second and third paths, (iii) from each of the first, second and third paths, through the combined path, and (iv) from the combined path, to and through the thermal head; anda valve assembly capable of controlling amounts of thermal transfer fluid that flow into the first and second paths, thereby controlling the temperature;wherein:the pump assembly is disposed to receive thermal transfer fluid from the thermal head and to output thermal transfer fluid for input to the valve assembly;the first path comprises a first path heat exchanger and the second path comprises a second path heat exchanger; andthe apparatus further comprises:a first path temperature sensor operable to sense the first temperature of the first path heat exchanger;a second path temperature sensor operable to sense the second temperature of the second path heat exchanger;a combined path temperature sensor operable to sense a combined path temperature;a thermal head temperature sensor operable to sense a temperature of the thermal head; anda controller in communication with the first path temperature sensor, the second path temperature sensor, the combined path temperature sensor, the thermal head temperature sensor, and the valve assembly. 2. The apparatus of claim 1 which further comprises a counter-flow heat exchanger wherein thermal transfer fluid from the thermal head flows through a primary side of the counter-flow heat exchanger and thermal transfer fluid in the third path flows through a secondary side of the counter-flow heat exchanger. 3. The apparatus of claim 1 which further comprises a heater in thermal contact with the first path. 4. The apparatus of claim 3 wherein the heater operates in response to the controller. 5. The apparatus of claim 1 which further comprises a counter-flow heat exchanger wherein thermal transfer fluid from the thermal head flows through a primary side of the counter-flow heat exchanger and thermal transfer fluid in the combined path flows through a secondary side of the counter-flow heat exchanger. 6. The apparatus of claim 1 further comprising thermal transfer fluid. 7. The apparatus of claim 6 wherein the thermal transfer fluid is a gas. 8. The apparatus of claim 7 wherein the gas is one or more of nitrogen, helium, CO2, helium-hydrogen, air, or mixtures of one or more of the foregoing. 9. The apparatus of claim 6 wherein the thermal transfer fluid is a liquid. 10. The apparatus of claim 9 wherein the liquid is one or more of fluorocarbon-based fluid, silicone oil, hydrocarbon oil, water, a glycol-water mixture, or a water-salt mixture. 11. The apparatus of claim 1 wherein the pump assembly comprises a pump. 12. The apparatus of claim 11 wherein the pump assembly further comprises a counter-flow heat exchanger. 13. The apparatus of claim 12 wherein the pump assembly further comprises a convective cooler. 14. The apparatus of claim 1 wherein the valve assembly comprises a proportioning valve having a manifold with an input port and three output ports, a first output port connected to the first path, a second output port connected to the second path, and a third output port connected to the third path. 15. The apparatus of claim 14 wherein the valve assembly further comprising a valve slider assembly operable in response to the controller to provide access between the input port and one or more of the output ports. 16. The apparatus of claim 15 wherein the valve slider assembly comprises a stepper motor operable in response to the controller, the stepper motor being connected to a lead screw that is, in turn connected to a valve slider. 17. The apparatus of claim 15 wherein the valve slider assembly comprises a first valve slider operable to proportion thermal transfer fluid flow between the third path and the first path, and a second valve slider operable to proportion thermal transfer fluid flow between the third path and the second path. 18. The apparatus of claim 15 wherein the valve slider assembly comprises a first valve slider operable to regulate thermal transfer fluid flow in the first path, a second valve slider operable to regulate thermal transfer fluid flow in the second path, and a third valve slider operable to regulate thermal transfer fluid flow in the third path. 19. The apparatus of claim 1 wherein the first path further comprises a heater thermally connected to the first path heat exchanger. 20. The apparatus of claim 19 wherein the heater comprises a resistive heater that is operable in response to the controller. 21. The apparatus of claim 20 wherein the resistive heater comprises a resistive cartridge heater embedded in the first path heat exchanger. 22. The apparatus of claim 1 wherein the second path further comprises a cooler thermally connected to the second path heat exchanger. 23. The apparatus of claim 22 wherein the cooler is operable in response to the controller. 24. The apparatus of claim 23 wherein the cooler comprises a refrigeration unit. 25. The apparatus of claim 24 wherein the refrigeration unit comprises: a compressor;a condenser;an expansion valve; andan evaporation tube that is thermally connected to the second path heat exchanger. 26. The apparatus of claim 25 wherein the expansion valve is operable in response to the controller.