IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0204488
(2011-08-05)
|
등록번호 |
US-8153434
(2012-04-10)
|
발명자
/ 주소 |
- Marganski, Paul J.
- Arno, Jose I.
- Sturm, Edward A.
- Zaleta, Kristy L.
|
출원인 / 주소 |
- Advanced Technology Materials, Inc.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
45 |
초록
▼
A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise ass
A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.
대표청구항
▼
1. A fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel adapted to hold a fluid for dispensing at low pressure, said vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, wherein said vessel in an interior volume
1. A fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel adapted to hold a fluid for dispensing at low pressure, said vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, wherein said vessel in an interior volume thereof contains (i) a solid-phase physical adsorbent material having sorptive affinity for said fluid or (ii) a pressure regulator assembly arranged for said dispensing at low pressure, said vessel further comprising a clear or translucent shroud that is circumferentially sealed to an exterior surface of the vessel, overlying the neck portion of the vessel and the valve head assembly to define an interior volume enclosed by the shroud, wherein the enclosed interior volume surrounds the neck portion and valve head assembly, and a colorimetric material in the enclosed interior volume that is colorimetrically sensitive to fluid held in the vessel for dispensing, whereby leakage of said fluid at said neck portion and/or valve head assembly is confined by the enclosed interior volume and effects a color change in the colorimetric material that is visually perceptible through the shroud upon occurrence of a leakage event. 2. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains a solid-phase physical adsorbent material. 3. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains a pressure regulator assembly arranged for said dispensing at low pressure. 4. The fluid storage and dispensing apparatus of claim 1, wherein said fluid storage and dispensing vessel contains a semiconductor manufacturing reagent. 5. The fluid storage and dispensing apparatus of claim 4, wherein said semiconductor manufacturing reagent comprises a reagent selected from the group consisting of hydride reagents, halide reagents, and organometallic reagents. 6. The fluid storage and dispensing apparatus of claim 1, wherein the colorimetric material comprises a colorimetric agent associated with a sheet-form element. 7. The fluid storage and dispensing apparatus of claim 6, wherein the sheet-form element is impregnated with the colorimetric agent. 8. The fluid storage and dispensing apparatus of claim 1, wherein the colorimetric material is mounted on the fluid storage and dispensing vessel. 9. The fluid storage and dispensing apparatus of claim 1, wherein the colorimetric material is mounted on a valve head of the fluid storage and dispensing vessel. 10. The fluid storage and dispensing apparatus of claim 1, wherein the shroud comprises a polymeric film material. 11. The fluid storage and dispensing apparatus of claim 10, wherein the polymeric film material is selected from the group consisting of polyethylene, polyolefin, polyvinylchloride and polyester. 12. The fluid storage and dispensing apparatus of claim 1, wherein the shroud comprises a shrink-wrap film material. 13. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains a fluoride gas. 14. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains an acid gas. 15. The fluid storage and dispensing apparatus of claim 1, wherein the colorimetric material comprises a colorimetric agent selected from the group consisting of iron oxide, copper sulfate, copper hydroxide, copper carbonate, pH indicating solutions, copper sulfate, copper hydroxide, copper carbonate, and iron oxide. 16. A method of fluid storage, comprising storing a fluid in a fluid storage and dispensing vessel adapted to hold a fluid for dispensing at low pressure, said vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, wherein said vessel in an interior volume thereof contains (i) a solid-phase physical adsorbent material having sorptive affinity for said fluid or (ii) a pressure regulator assembly arranged for said dispensing at low pressure, and maintaining an enclosed interior volume surrounding the neck portion and the valve head assembly within a clear or transparent shroud circumferentially sealed to an exterior surface of the vessel and containing a colorimetric material in the enclosed interior volume that is colorimetrically sensitive to fluid held in the vessel for dispensing, whereby leakage of said fluid at said neck portion and/or valve head assembly is confined by the enclosed interior volume and effects a color change in the colorimetric material that is visually perceptible through the shroud upon occurrence of a leakage event. 17. The method of claim 16, wherein the fluid storage and dispensing vessel contains a solid-phase physical adsorbent material. 18. The method of claim 16, wherein the fluid storage and dispensing vessel contains a pressure regulator assembly arranged for said dispensing at low pressure. 19. The method of claim 16, wherein said fluid in the storage and dispensing vessel comprises a semiconductor manufacturing reagent. 20. The method of claim 19, wherein said semiconductor manufacturing reagent comprises a reagent selected from the group consisting of hydride reagents, halide reagents, and organometallic reagents. 21. The method of claim 16, wherein the colorimetric material comprises a colorimetric agent associated with a sheet-form element. 22. The method of claim 21, wherein the sheet-form element is impregnated with the colorimetric agent. 23. The method of claim 16, wherein the colorimetric material is mounted on the fluid storage and dispensing vessel. 24. The method of claim 16, wherein the colorimetric material is mounted on a valve head of the fluid storage and dispensing vessel. 25. The method of claim 16, wherein the shroud comprises a polymeric film material. 26. The method of claim 25, wherein the polymeric film material is selected from the group consisting of polyethylene, polyolefin, polyvinylchloride and polyester. 27. The method of claim 16, wherein the shroud comprises a shrink-wrap film material. 28. The method of claim 16, wherein the fluid storage and dispensing vessel contains a fluoride gas. 29. The method of claim 16, wherein the fluid storage and dispensing vessel contains an acid gas. 30. The method of claim 16, wherein the colorimetric material comprises a colorimetric agent selected from the group consisting of iron oxide, copper sulfate, copper hydroxide, copper carbonate, pH indicating solutions, copper sulfate, copper hydroxide, copper carbonate, and iron oxide.
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