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Microvalve device

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F15B-013/04
출원번호 US-0519259 (2007-12-14)
등록번호 US-8156962 (2012-04-17)
국제출원번호 PCT/US2007/025680 (2007-12-14)
§371/§102 date 20090615 (20090615)
국제공개번호 WO2008/076388 (2008-06-26)
발명자 / 주소
  • Luckevich, Mark S.
출원인 / 주소
  • Dunan Microstaq, Inc.
대리인 / 주소
    MacMillan, Sobanski & Todd, LLC
인용정보 피인용 횟수 : 19  인용 특허 : 131

초록

A microvalve device for controlling fluid flow includes a body defining a chamber having first and second ends. The first end is in communication with a source of command pressure. The second end in communication with a source of load pressure. A micromachined spool valve is disposed in the chamber

대표청구항

1. A microvalve device for controlling fluid flow comprising: a body defining a chamber having first and second ends, the first end being in communication with a source of command pressure, the second end being in communication with a source of load pressure; anda micromachined spool disposed in the

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  4. Xie, Zhe, MEMS valve operating profile.
  5. Price, Andrew R.; Kaina, Rachid; Garnett, Mark C., Method and structure for optimizing heat exchanger performance.
  6. Arunasalam, Parthiban; Bhopte, Siddharth; Ojeda, Sr., Joe Albert, Method for making a solder joint.
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  8. Arunasalam, Parthiban; Fuller, E. Nelson; Ojeda, Sr., Joe A., Micro-electric mechanical system control valve and method for controlling a sensitive fluid.
  9. Hunnicutt, Harry, Microvalve device.
  10. Hunnicutt, Harry A., Microvalve device with pilot operated spool valve and pilot microvalve.
  11. Fuller, Edward Nelson; Arunasalam, Parthiban; Yang, Chen; Luckevich, Mark; Ojeda, Joe, Microvalve having improved air purging capability.
  12. Fuller, Edward Nelson; Arunasalam, Parthiban; Yang, Chen; Ojeda, Sr., Joe A.; Gurley, Gengxun K., On-off microvalve with improved sealing mechanism.
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  14. Hunnicutt, Harry A., Pilot-operated spool valve.
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  16. Arunasalam, Parthiban, Process and structure for high temperature selective fusion bonding.
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