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A sensor, having a resonant frequency responsive to presence of an analyze, comprising a DC electrostatic excitation component, to produce a static force pulling a moveable element toward a backplate; an AC electrostatic excitation component, to produce an oscillation in the moveable element with re

A sensor, having a resonant frequency responsive to presence of an analyze, comprising a DC electrostatic excitation component, to produce a static force pulling a moveable element toward a backplate; an AC electrostatic excitation component, to produce an oscillation in the moveable element with respect to the backplate; and a sensor to detect contact between the moveable and the backplate.

대표청구항 ▼

1. A switch, comprising: a mechanically resonant first element;an electric field generator, configured to produce an electric field which selectively subjects the first element to a force having at least one dynamic component adapted to excite an oscillation in the first element, and a biasing compo

1. A switch, comprising: a mechanically resonant first element;an electric field generator, configured to produce an electric field which selectively subjects the first element to a force having at least one dynamic component adapted to excite an oscillation in the first element, and a biasing component adapted to induce a force which biases the first element with respect to a second element; anda material which selectively alters at least one mechanical condition, tending to cause a change in an oscillation of the first element,wherein the material is configured to provide a range of alteration in the at least one mechanical condition which includes an unstable oscillation behavior which causes a dynamic pull-in and a contact between the first and second elements, andwherein the first element has a stable oscillation state and an unstable oscillation state, and wherein the electric field generator is configured to oscillate the first element in the stable oscillation state absent an alteration of the mechanical condition by the material within a potential well defined by the electrostatic field, and the material is further configured to alter the mechanical condition such that the oscillation of the first element enters the unstable oscillation state and escapes from the potential well, resulting in a dynamic pull-in of the first element in the unstable oscillation state. 2. The switch according to claim 1, wherein a contact state between the first element and the second element is dependent on a chemical condition. 3. The switch according to claim 1, wherein the material alters an effective mass of the first element by interaction with an external influence, altering a resonance property of the first element. 4. The switch according to claim 1, wherein the first element comprises a cantilever beam. 5. The switch according to claim 1, wherein the material comprises a polymer which selectively absorbs an analyte. 6. The switch according to claim 1, wherein the material comprises a sensing material responsive to an analyte, and a contact between the first and second elements is selectively dependent on a concentration of the analyte. 7. The switch according to claim 1, wherein the material comprises a sensing material responsive to an analyte, and a contact between the first and second elements is selectively dependent on an amount of the analyte. 8. The switch according to claim 1, wherein the material comprises a sensing material responsive to an analyte, and a contact between the first and second elements is selectively dependent on a change in the analyte. 9. The switch according to claim 1, wherein the contact between the first and second elements is reversible. 10. The switch according to claim 1, wherein the contact between the first and second elements causes the first and second elements to stick together after a condition which cause contact to occur is removed. 11. The switch according to claim 1, wherein the biasing component comprises a static electrostatic field configured to displace the first element with respect to the second element. 12. The switch according to claim 1, wherein the dynamic component comprises a dynamic electrostatic field configured to oscillate the first element at a frequency near a lowest resonant frequency of the first element. 13. The switch according to claim 1, wherein the dynamic component comprises a dynamic electrostatic field configured to oscillate the first element at a frequency near a higher order resonant frequency of the first element. 14. The switch according to claim 1, further comprising an output configured to convey a signal corresponding to a state of contact between the first element and the second element. 15. The sensor according to claim 1, wherein the second element is configured to form a conductive path upon contact with the first element, further comprising an electrical lead extending from each of the first and second elements. 16. The sensor according to claim 1, wherein a contact state between the first element and the second element is dependent on a biological condition. 17. The switch according to claim 1, wherein the first element comprises a clamped-clamped beam fixed at opposing ends and configured to oscillate between the fixed ends. 18. The sensor according to claim 1, wherein the sensor is reusable after contact between the first element and the second element. 19. The sensor according to claim 1, wherein an irreversible mechanical change occurs upon a contact between the first element and the second element. 20. The sensor according to claim 1, wherein the first element is fabricated from silicon. 21. The sensor according to claim 1, wherein the material is selectively responsive to a concentration of a gas in contact with the material. 22. The sensor according to claim 1, wherein the material is selectively responsive to an explosive material. 23. The sensor according to claim 1, wherein the material alters the mechanical condition by a change in at least one of a change in mass, stiffness, size, resonant frequency, and damping. 24. The switch according to claim 1, where in the first element is configured to serve as an electrode for the electric field generator. 25. The switching structure according to claim 1, wherein the at least one dynamic component produced by the electric field generator comprises a constant non-zero amplitude and waveform AC voltage, and the biasing component comprises a constant non-zero DC bias voltage, and the dynamic pull-in and the contact between the first and second elements persists over a plurality of AC voltage waveform cycles of the AC voltage.