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Solid polysilane mixtures 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01J-019/08
  • H05F-003/00
출원번호 US-0402852 (2009-03-12)
등록번호 US-8177943 (2012-05-15)
우선권정보 DE-10 2006 043 929 (2006-09-14)
발명자 / 주소
  • Auner, Norbert
  • Holl, Sven
  • Bauch, Christian
  • Lippold, Gerd
  • Deltschew, Rumen
출원인 / 주소
  • Spawnt Private S.A.R.L.
대리인 / 주소
    Myers, Jonathan
인용정보 피인용 횟수 : 2  인용 특허 : 35

초록

The invention is directed to mixtures of polysilanes macroscopically solid at ambient temperature wherein the individual components of the composition SinH2n and/or SinH2n+2 of which decompose before they are boiling at an applied process pressure and which are produced from the hydrogenation of pla

대표청구항

1. A process for producing solid mixtures of polysilanes comprising the steps of: producing largely halogenated, polysilane mixtures by plasmachemical methods, and hydrogenating said largely halogenated polysilane mixtures. 2. The process for producing solid mixtures of polysilanes according to clai

이 특허에 인용된 특허 (35)

  1. Harvey ; II ; Francis J., Arc heater production of silicon involving a hydrogen reduction.
  2. Ingle William M. (Phoenix AZ) Darnell Robert D. (Phoenix AZ) Thompson Stephen W. (Rosenberg TX), Ascending differential silicon harvesting means and method.
  3. Matsuki, Yasuo, Coating composition.
  4. Yoon Poong (Seoul KRX) Song Yongmok (Chungnam KRX), Fluidized bed reactor with microwave heating system for preparing high-purity polycrystalline silicon.
  5. Satori Peter (Rheinberg DEX) Habel Wolfgang (Duesseldorf DEX) Mayer Lutz (Duisburg DEX), Halogenated polycarbosilanes and processes for preparing them.
  6. Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX), Heating of fluidized bed reactor by microwaves.
  7. Sarma Kalluri R. (Tempe AZ) Rice ; Jr. M. John (Tempe AZ), High pressure plasma hydrogenation of silicon tetrachloride.
  8. Harvey ; II ; Francis J. ; Fey ; Maurice G., High purity silicon production by arc heater reduction of silicon intermediates.
  9. Guha Subhendu (Troy MI) Banerjee Arindam (Madison Heights MI), Igniter for microwave energized plasma processing apparatus.
  10. Ingle ; William Martell, Low cost, high volume silicon purification process.
  11. Todd, Michael A., Method and apparatus for chemical synthesis.
  12. Furusawa, Masahiro; Seki, Shunichi; Miyashita, Satoru; Shimoda, Tatsuya; Yudasaka, Ichio; Matsuki, Yasuo; Takeuchi, Yasumasa, Method for manufacturing solar battery.
  13. Eguchi Ken (Yokohama JPX) Matsuda Hiroshi (Yokohama JPX) Haruta Masahiro (Funabashi JPX) Nishimura Yukuo (Sagamihara JPX) Hirai Yutaka (Tokyo JPX) Nakagiri Takashi (Tokyo JPX), Method of forming deposition film.
  14. Dahlberg, Reinhard, Method of producing silicon.
  15. Sharp Kenneth G. (Midland MI) D\Errico John J. (Fenton MI), Method of selective reduction of polyhalosilanes with alkyltin hydrides.
  16. Z��rcher,Fabio; Guo,Wenzhuo; Rockenberger,Joerg; Dioumaev,Vladimir K.; Ridley,Brent; Kunze,Klaus; Cleeves,James Montague, Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions.
  17. Lepage Jean-Luc (Lyon FRX) Simon Gerard (Villeurbanne FRX), Plasma production of trichorosilane, SiHCl3.
  18. Sarma Kalluri R. (Tempe AZ) Rice ; Jr. M. John (Tempe AZ) Lesk I. Arnold (Phoenix AZ) Nikirk Roger G. (Tempe AZ), Polycrystalline silicon production.
  19. Brown-Wensley, Katherine A.; Sinclair, Robert A., Polyhydridosilanes and their conversion to pyropolymers.
  20. Guo,Wenzhuo; Dioumaev,Vladimir K.; Rockenberger,Joerg; Ridley,Brent, Polysilane compositions, methods for their synthesis and films formed therefrom.
  21. Gaul John H. (Midland MI) Weyenberg Donald R. (Midland MI), Preparation of silicon metal through polymer degradation.
  22. Bakay Carl James (Marietta OH), Process for making silane.
  23. Ikeda Hiroshi (Omiya JPX) Tsunashima Makoto (Tokyo JPX) Satoh Masamitsu (Shobu JPX), Process for preparing amorphous silicon.
  24. Kirii, Seiichi; Narukawa, Mitsutoshi; Takesue, Hisayuki, Process for producing hexachlorodisilane.
  25. Rodgers Michael A. (Tempe AZ), Process for production of polycrystalline silicon.
  26. Rengstl Alfred (Reischach DEX), Process for reducing the halogen content of halogen-containing polycarbosilanes and polysilanes.
  27. Arai Takayoshi (Nagahama JPX) Kanai Masahiro (Tokyo JPX) Kawakami Soichiro (Nagahama JPX) Murakami Tsutomu (Nagahama JPX), Process for the formation of a functional deposited film containing group IV atoms or silicon atoms and group IV atoms b.
  28. Kratel Gnter (Durach-Bechen DEX) Loskot Stefan (Kempten DEX), Process for the preparation of silicon tetrachloride.
  29. Nakata Yoshinori (Sapporo JPX) Suzuki Masaaki (Sapporo JPX) Okutani Takeshi (Sapporo JPX), Process for the production of silicon tetrachloride.
  30. Otsuka, Toyozo; Kitsugi, Naomichi; Fujinaga, Teruo, Process of preparing silicon tetrafluoride by using hydrogen fluoride gas.
  31. Asami, Taketomi; Ichijo, Mitsuhiro; Toriumi, Satoshi; Ohtsuki, Takashi; Mitsuki, Toru; Kasahara, Kenji; Takano, Tamae; Kokubo, Chiho; Yamazaki, Shunpei; Shichi, Takeshi, Semiconductor device and method of manufacturing the same.
  32. Miyachi Kenji (Yokohama) Fukuda Nobuhiro (Yokohama) Ashida Yoshinori (Yokohama) Koyama Masato (Kamakura JPX), Semiconductor film and process for its production.
  33. Kunze, Klaus; Guo, Wenzhuo; Zurcher, Fabio; Takashima, Mao; Francisco, Laila; Rockenberger, Joerg; Ridley, Brent, Silane compositions, methods of making the same, method for forming a semiconducting and/or silicon-containing film, and thin film structures formed therefrom.
  34. Ingle William M. (Phoenix AZ) Thompson Stephen W. (Phoenix AZ), Silicon purification process.
  35. Anand Madhu (Cambridge MA) Baddour Raymond F. (Belmont MA) Cohen Robert E. (Jamaica Plain MA), Surface fluorinated polymers.

이 특허를 인용한 특허 (2)

  1. Lang, Juergen Erwin; Rauleder, Hartwig; Mueh, Ekkehard; Moussallem, Imad, Method and device for producing polychlorosilanes.
  2. Lang, Juergen Erwin; Rauleder, Hartwig; Mueh, Ekkehard; Moussallem, Imad, Process and apparatus for preparation of octachlorotrisilane.
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