초록 ▼

A system and method of automated customizable error diagnostics is provided for use with industrial apparatus, such as semiconductor manufacturing apparatus. An external device, such as a robot, is provided with its own low level controller and a high level controller is provided to send instruction

A system and method of automated customizable error diagnostics is provided for use with industrial apparatus, such as semiconductor manufacturing apparatus. An external device, such as a robot, is provided with its own low level controller and a high level controller is provided to send instructions to the low level controller. The high level controller is programmed to perform automated customizable error diagnostics to diagnose errors in the external device. The high level controller monitors the occurrence of error conditions in the external device and executes a list of diagnostic commands based upon a detected error condition. Data concerning the error condition is automatically gathered to diagnose the cause of the error, before the external device executes its own error handling routines. In some embodiments, an editor is provided to edit and customize the diagnostic commands and a viewer is provided to allow diagnostic data to be viewed.

대표청구항 ▼

1. A method of semiconductor manufacturing, comprising: providing a reactor system having a system controller configured to control an external device controller, the external device controller configured to control an associated external device;monitoring for an error condition signal from the exte

1. A method of semiconductor manufacturing, comprising: providing a reactor system having a system controller configured to control an external device controller, the external device controller configured to control an associated external device;monitoring for an error condition signal from the external device controller, the error condition signal indicative of the occurrence of an error condition in the external device;automatically transmitting instructions from the system controller to the external device controller to execute diagnostic functions corresponding to the error condition signal upon detection of the error condition signal, thereby gathering a data set from the external device corresponding to the error condition detected;automatically gathering the data set from the external device after transmitting the instructions and during execution of the diagnostic functions, wherein monitoring for the error condition signal is performed without the system controller gathering the data set from the external device; andsubsequently automatically executing error handling routines,wherein, after an error condition is detected and before executing diagnostic functions, the external device controller stops the associated external device from performing tasks that alter data. 2. The method of claim 1, wherein the external device is selected from the group consisting of a wafer handling robot, a cassette handling robot, a metrology unit and a gas sensing system. 3. The method of claim 1, further comprising: providing a user-accessible diagnostic function editor; andediting lists of diagnostic functions executed on error conditions in response to user commands, wherein editing lists is before monitoring for the error condition. 4. The method of claim 1, further comprising: providing a user-accessible diagnostic data viewer for viewing the diagnostic data; anddisplaying the diagnostic data on the viewer. 5. The method of claim 1, further comprising: providing a main system controller configured to control the system controller;automatically transmitting instructions from the main system controller to the system controller to execute diagnostic functions corresponding to the error condition upon detection of the error condition; andautomatically gathering diagnostic data from the system controller after transmitting the instructions. 6. The method of claim 5, further comprising one or more additional external devices, each additional external device having an additional associated external device controller, wherein the system controller is configured to control the external device controllers for the external device and the additional external devices. 7. The method of claim 6, further comprising one or more additional system controllers, wherein the main system controller is configured to control the system controller and the additional system controllers. 8. The method of claim 1, further comprising automatically identifying a cause of the error condition. 9. The method of claim 8, further comprising automatically carrying out steps for error recovery. 10. The method of claim 9, further comprising continuing operation of the reactor system after carrying out steps for error recovery, without halting the reactor system in response to the error condition. 11. A method for semiconductor manufacturing, comprising: providing a semiconductor process tool with an associated controller, the associated controller configured to control the process tool and programmed to detect an error condition in the process tool and execute error handling routines after detecting an error condition;providing a higher level controller in communication with the associated controller, the higher level controller configured to gather diagnostic data from the associated controller and to control the process tool by transmitting instructions to the associated controller;monitoring for an error condition in the process tool without the higher level controller gathering a set of diagnostic data for the error condition from the associated controller;providing diagnostic commands from the higher level controller to the associated controller after detecting the error condition in the process tool, wherein, after the error condition is detected and before providing diagnostic commands, the associated controller stops the semiconductor processing tool from performing tasks that alter data;collecting the set of diagnostic data from the associated controller after providing diagnostic commands; andsubsequently executing the error handling routines. 12. The method of claim 11, wherein performing error handling routines comprises stopping the external device. 13. A reactor system for semiconductor manufacturing, comprising: an external device and an associated controller configured to control the external device; anda system controller programmed to: control one or more lower level controllers including the associated controller;detect error condition signals from the associated controller, the error condition signals indicative of the occurrence of error conditions in the external device;automatically transmit diagnostic commands to the associated controller after detecting an error condition signal; andautomatically retrieve a set of diagnostic data for the error condition signal after automatically transmitting the diagnostic commands, wherein detection of the error condition signal occurs without the system controller gathering the set of diagnostic data from the associated controller,wherein, after the error condition is detected and before transmitting diagnostic functions, the external device controller is configured to stop the associated external device from performing tasks that alter data. 14. The system of claim 13, wherein the system controller further comprises an editor configured to edit and customize the diagnostic commands. 15. The system of claim 13, wherein the system controller further comprises a viewer configured to view the diagnostic data and the error condition signals. 16. The system of claim 13, wherein the associated controller is programmed to execute error handling routines. 17. The system of claim 16, wherein the system controller is programmed to gather data before the associated controller executes the error handling routines. 18. The system of claim 13, wherein the system controller is programmed to automatically identify a cause of the error conditions. 19. The system of claim 13, wherein the system controller is programmed to automatically provide instructions for system recovery to the external device based upon the diagnostic data. 20. The system of claim 13, comprising: a housing having a reactor within the housing, the housing separating the reactor system from a surrounding clean room;a front-end for loading substrate cassettes into the housing;a cassette transfer region within the housing and adjacent to the front-end;a wafer handling chamber within the housing and adjacent to the cassette transfer region, the wafer handling chamber provided with a robot for loading and unloading boats and separated from the cassette transfer region by a partition; anda processing area within the housing and adjacent to the wafer handling chamber, the processing area separated from the wafer handling chamber by a partition, wherein the reactor is disposed in the processing area. 21. The system of claim 20, further comprising a cassette interface in the partition separating the wafer handling chamber and the cassette transfer region, the cassette interface having a closable opening sized and shaped to mate with the closure of a FOUP cassette and to open the closure of the FOUP cassette. 22. The system of claim 21, wherein the external device is the wafer handling robot, the wafer handling robot disposed within the wafer handling chamber, the wafer handling robot configured to access substrates within cassettes through the opening of the interface. 23. The system of claim 22, further comprising a cassette store in the cassette transfer region. 24. The system of claim 23, wherein the store comprises a plurality of stacked rotary storage platforms, each platform divided into a plurality of storage compartments and defining cassette store positions. 25. The system of claim 24, further comprising a cassette handling robot configured to access and transfer cassettes to and from the store.