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Ultrathin porous nanoscale membranes, methods of making, and uses thereof

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/22
  • B01D-039/00
  • B01D-039/14
  • B01D-071/04
출원번호 US-0414991 (2006-05-01)
등록번호 US-8182590 (2012-05-22)
발명자 / 주소
  • Striemer, Christopher C.
  • Fauchet, Philippe M.
  • Gaborski, Thomas R.
  • McGrath, James L.
출원인 / 주소
  • University of Rochester
대리인 / 주소
    LeClairRyan, a Professional Corporation
인용정보 피인용 횟수 : 11  인용 특허 : 36

초록

A process for forming a porous nanoscale membrane is described. The process involves applying a nanoscale film to one side of a substrate, where the nanoscale film includes a semiconductor material; masking an opposite side of the substrate; etching the substrate, beginning from the masked opposite

대표청구항

1. A nanoporous membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, wherein the membrane comprises nanocrystalline silicon and has a surface roughness of less than 1 nm on both sides thereof, wherein said nanoporous membrane is prepared according to

이 특허에 인용된 특허 (36)

  1. Smith John Stephen ; Yeh Hsi-Jen J. ; Hadley Mark A. ; Verma Ashish K., Apparatus for fabricating self-assembling microstructures.
  2. Allegrezza ; Jr. Anthony E. (Milford MA) Burke Edmund T. (Winchester MA), Composite ultrafiltration membranes.
  3. Neel Jean M. L. (Villers-les-Nancy FRX) Nguyen Quang T. (Ludres FRX) Bruschke Hartmut (NuBloch DEX), Composition membrane for separating water from fluids containing organic components by means of pervaporation.
  4. Jorgensen, Betty S.; Young, Jennifer S.; Espinoza, Brent F., Cross-linked polybenzimidazole membrane for gas separation.
  5. Chevallet Jacques,FRX ; Riquier Jean-Claude,FRX, Device and method for preparing a treatment liquid by filtration.
  6. Song Herking (Fremont CA) Hafeman Dean G. (Hillsborough CA), Electrochemical system for rapid detection of biochemical agents that catalyze a redox potential change.
  7. Donald R. Moles, Electroosmotic flow controlled microfluidic devices.
  8. Foos Joseph S. (Needham MA) Edelman Peter G. (Franklin MA) Flaherty James E. (Attleboro MA) Berger Joseph (Basel CHX), Extended use planar sensors.
  9. Carolan,Michael Francis; Miller,Christopher Francis, Feed gas contaminant removal in ion transport membrane systems.
  10. Maeda, Takanori; Yagi, Hiroshi; Harayama, Asako, Filter for purifying hydrogen and method for manufacture thereof.
  11. Stanley P. Bonk ; Myron Krasij ; Carl A. Reiser, Fuel cell stack assembly with edge seal.
  12. Carboneri,Roberto; Vittozzi,Sandro, Gas-selective permeable membrane and method of manufacturing thereof.
  13. Edlund,David J.; Pledger,William A.; Studebaker,R. Todd, Hydrogen purification membranes, components and fuel processing systems containing the same.
  14. Mundschau, Michael V., Hydrogen transport membranes.
  15. Yamaguchi,Akira; Fukui,Katsuhiko, Hydrogen-permeable membrane and process for production thereof.
  16. Vane,Leland Morris; Ponangi,Ravi Prasad, Hydrophilic mixed matrix material having reversible water absorbing properties.
  17. Dobo Emerick J. (Cary NC) Graham Tommy E. (Raleigh NC), Inorganic anisotropic hollow fibers.
  18. James E. Moon ; Timothy J. Davis ; Gregory J. Galvin, Integrated monolithic microfabricated electrospray and liquid chromatography system and method.
  19. Holmen James O. (Minnetonka MN) James Steven D. (Edina MN) Ridley Jeffrey A. (Burnsville MN), Integrated thin-film diaphragm; backside etch.
  20. Watanabe, Takeru, Lactone ring-containing (meth)acrylate and polymer thereof for photoresist composition.
  21. Leedy Glenn J. (1061 E. Mountain Dr. Montecito CA 93108), Membrane dielectric isolation IC fabrication.
  22. Van Rijn Cornelis Johannes Maria,NLX, Membrane filter and a method of manufacturing the same as well as a membrane.
  23. Popovich Robert P. (Austin TX) Antwiler Glen D. (Austin TX) Moncrief Jack W. (Austin TX), Method and apparatus for continuous plasmaphersis.
  24. Lee Myung W., Method and apparatus for separation of heavy and tritiated water.
  25. Dougherty, George M., Method for producing a porous silicon film.
  26. Broers, Alec N.; Laibowitz, Robert B., Method of making submicron circuit structures.
  27. Harrison Christopher ; Park Miri ; Register Richard ; Adamson Douglas ; Mansky Paul ; Chaikin Paul, Method of nanoscale patterning and products made thereby.
  28. Godbey David J. (Burtonsville MD), Method of producing a silicon membrane using a silicon alloy etch stop layer.
  29. Johnston Arthur W. (307 Bainbridge Dr. Atlanta GA 30327) Johnston Arthur F. (307 Bainbridge Dr. Atlanta GA 30327), Multi-stage microbiological water filter.
  30. Dalton,Timothy Joseph; Steen,Michelle Leigh, Porous silicon composite structure as large filtration array.
  31. Bouard Pascal (Draveil FRX) Labrune Philippe (Saint Maur FRX) Villermet Alain (Viroflay FRX) Gastiger Michel (Orsay FRX), Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane.
  32. Prince, Chad J.; Korde, Raj, Semiconductor photodiode with integrated microporous filter.
  33. Hintsche, Rainer, Sensor and/or separating element and process for the production and use thereof.
  34. Fauchet Philippe M. ; Tsybeskov Leonid ; Hirschmann Karl D., Stabilizing process for porous silicon and resulting light emitting device.
  35. Yagi,Hiroshi; Maeda,Takanori; Oota,Yoshinori; Uchida,Yasuhiro, Thin film supporting substrate for used in filter for hydrogen production filter and method for manufacturing filter for hydrogen production.
  36. Haumont Charles,BEX ; Legras Roger,BEX, Transparent micro perforated material and preparation process.

이 특허를 인용한 특허 (11)

  1. Holcomb, David E.; Wilson, Dane F., Apparatus and method for stripping tritium from molten salt.
  2. Schwartz, Vladimir; Wetzig, Daniel; Chernobrod, Boris; Bley, Werner Grosse, Gas-selective membrane and method of its production.
  3. Schwartz, Vladimir; Wetzig, Daniel; Chernobrod, Boris; Bley, Werner Grosse, Gas-selective membrane and method of its production.
  4. Kim, Yong-Kweon; Lee, Yoon-Sik; Koh, Yul; Kang, Homan, Method for separating nanoparticles and analyzing biological substance using microfluidic chip.
  5. Kim, Ki-Bum; Yu, Jae-Seok; Kim, Hyung-Jun, Nanopore structure, ionic device using nanopore structure and method of manufacturing nanomembrane structure.
  6. Striemer, Christopher C.; DesOrmeaux, Jon-Paul, Nanoporous silicon nitride membranes, and methods for making and using such membranes.
  7. Zhang, An-Ping; Murray, Anthony John; Chen, Rui, Nanostructured devices for detecting and analyzing biomolecules.
  8. Corona, Pietro; Ferrera, Marco; Varisco, Igor; Campedelli, Roberto, Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device.
  9. Astier, Yann; Bai, Jingwei; Papa Rao, Satyavolu; Reuter, Kathleen; Smith, Joshua T., Solid state nanopore devices for nanopore applications to improve the nanopore sensitivity and methods of manufacture.
  10. Astier, Yann; Bai, Jingwei; Papa Rao, Satyavolu; Reuter, Kathleen; Smith, Joshua T., Solid state nanopore devices for nanopore applications to improve the nanopore sensitivity and methods of manufacture.
  11. Wolcott, Katherine A.; Briglin, Shawn M., Ultra-thin membrane for chemical analyzer and related method for forming membrane.
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