초록 ▼

Vertically oriented carbon nanotubes (CNT) arrays have been simultaneously synthesized at relatively low growth temperatures (i.e., 700° C.) on both sides of aluminum foil via plasma enhanced chemical vapor deposition. The resulting CNT arrays were highly dense, and the average CNT diameter in the a

Vertically oriented carbon nanotubes (CNT) arrays have been simultaneously synthesized at relatively low growth temperatures (i.e., 700° C.) on both sides of aluminum foil via plasma enhanced chemical vapor deposition. The resulting CNT arrays were highly dense, and the average CNT diameter in the arrays was approximately 10 nm, A CNT TIM that consist of CNT arrays directly and simultaneously synthesized on both sides of aluminum foil has been fabricated. The TIM is insertable and allows temperature sensitive and/or rough substrates to be interfaced by highly conductive and conformable CNT arrays. The use of metallic foil is economical and may prove favorable in manufacturing due to its wide use.

대표청구항 ▼

1. An apparatus comprising: a compliant, readily-deformable metallic foil having first and second opposing sides, said foil having a thickness less than 0.025 millimeters; anda plurality of nanotubes having one end grown from a layer of catalytic material on the first side of said foil and a free en

1. An apparatus comprising: a compliant, readily-deformable metallic foil having first and second opposing sides, said foil having a thickness less than 0.025 millimeters; anda plurality of nanotubes having one end grown from a layer of catalytic material on the first side of said foil and a free end, said nanotubes being substantially aligned perpendicularly to said first side;wherein the thermal resistance from the free end to the second side of said foil is less than about 50 mm2 K/W;wherein the first side of said foil includes a layer of adhesive material and a layer of buffer material between said layer of catalytic material and said layer of adhesive material;wherein the buffer material comprises at least one of In, Pb, or Sn. 2. The apparatus of claim 1 wherein said nanotubes are grown from said catalytic material at a density greater than about 107 nanotubes per mm2. 3. The apparatus of claim 1 wherein said foil is less than about 0.020 millimeters thick. 4. The apparatus of claim 1 wherein said metallic foil includes material chosen from the group of aluminum, platinum, gold, nickel, tin, lead, silver, titanium, indium, or copper. 5. The apparatus of claim 1 wherein said plurality of nanotubes are multiwall carbon nanotubes. 6. An apparatus comprising: a flexible, separable metallic member having first and second opposing sides;a first plurality of nanoparticles grown from said first side; anda second plurality of nanoparticles grown from said second side;wherein said first plurality are grown simultaneously with said second pluralitywherein said member is a composite multilayer structure including a central substrate, a layer of adhesive material on each said opposing side of the substrate, an external layer of catalyst on each said opposing side of the member, and a layer of buffer material between each said layer of catalyst and the proximate said layer of adhesive material;wherein the buffer material comprises at least one of In, Pb, or Sn. 7. The apparatus of claim 6 wherein the central substrate comprises at least one of aluminum, platinum, gold, nickel, iron, tin, lead, silver, titanium, indium, or copper. 8. The apparatus of claim 6 wherein the adhesive material comprises at least one of Ti or Cr. 9. The apparatus of claim 6 wherein the catalyst comprises at least one of Fe, Co, Ni, and Pd. 10. The apparatus of claim 6 wherein one of said first plurality of nanoparticles or said second plurality of nanoparticles are carbon nanotubes grown from the one respective side at a density greater than about 1×108 nanotubes per mm2 and are substantially aligned perpendicularly to the one said respective side. 11. The apparatus of claim 10 wherein the other of said first plurality of nanoparticles or said second plurality of nanoparticles are carbon nanotubes that are grown from the other respective side and are substantially aligned perpendicularly to said other said respective side. 12. The apparatus of claim 1 wherein said foil comprises at least one of aluminum, platinum, gold, nickel, iron, tin, lead, silver, titanium, indium, or copper. 13. The apparatus of claim 1 wherein the adhesive material comprises at least one of Ti or Cr. 14. The apparatus of claim 1 wherein the catalyst comprises at least one of Fe, Co, Ni, and Pd. 15. The apparatus of claim 6 wherein said first plurality of nanoparticles are carbon nanotubes substantially aligned perpendicularly to the first side. 16. The apparatus of claim 15 wherein said second plurality of nanoparticles are carbon nanotubes substantially aligned perpendicularly to the second side. 17. The apparatus of claim 6 wherein said metallic member is foil that is less than 0.025 millimeters thick. 18. The apparatus of claim 9 wherein the thickness of the catalyst layer is greater than about 2 nanometers and less than about 6 nanometers. 19. The apparatus of claim 1 wherein the packing fraction of said plurality of nanotubes is less than 50% and greater than 30%.