초록 ▼

The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cov

The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cover is closed to the wafer container. The sealing apparatus comprises: at least one latch set, at least one interlocked cam, an air inflation sealing member, and at least one air intake/outtake valve, wherein the interlocked cam is adopted for connecting an interlocking device having an air inflation member, and the interlocking device can be used to drive the interlocked cam for making the latch set bolt the cover and the wafer container, and inflate the air inflation sealing member through the air inflation member thereof and the air intake/outtake valve in order to inflate and expand the air inflation sealing member.

대표청구항 ▼

1. A sealing apparatus with an interlocking air inflation device, disposed in a wafer carrier having a wafer container and a cover, wherein the cover is used for closing and opening the wafer container, and the cover and the wafer container can be fastened together through a fastener mechanism, wher

1. A sealing apparatus with an interlocking air inflation device, disposed in a wafer carrier having a wafer container and a cover, wherein the cover is used for closing and opening the wafer container, and the cover and the wafer container can be fastened together through a fastener mechanism, wherein an opening is formed in one side of the wafer container, such that the sealing apparatus is disposed between the opening and the cover for sealing the wafer container and the cover, the sealing apparatus comprises: at least one latch set, being disposed between an inner surface and an outer surface of the cover;at least one interlocked cam, being disposed between the inner surface and the outer surface of the cover and connected to the at least one latch set, the interlocked cam having a first connecting member;an air inflation sealing member, being disposed around the edge of the inner surface of the cover; andat least one air intake/outtake valve, being coupled to the air inflation sealing member and capable of coupling to the first connecting member of the interlocked cam;wherein the interlocked cam is adapted for connecting an interlocking device with an air inflation member, when the interlocking device is connected to the interlocked cam, the air inflation member coupling to the air intake/outtake valve via the first connecting member;wherein when the cover is closed the wafer container and the interlocking device is connected to the interlocked cam, the interlocking device can be controlled for driving the interlocked cam to forwardly rotate a specific angle, so as to make the latch set latch the cover and the wafer container, and meanwhile the air inflation member couples to the air intake/outtake valve through the first connecting member, therefore, an inflating gas being able to enter the air intake/outtake valve via the air inflation member and the interlocked cam, and furthermore, the air intake/outtake valve may inflate the air inflation sealing member, so as to expand the air inflation sealing member;wherein when the air inflation sealing member is inflatable and the interlocking device is connected to the interlocked cam, the air inflation member being able to extend an extension portion thereof into the air intake/outtake valve, then the extension portion makes the air intake/outtake valve deflate the air inflation sealing member, moreover, after the air inflation sealing member is deflated, the interlocked cam can be driven to reversely rotate the specific angle by the interlocking device for opening the latch set. 2. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 1, wherein the interlocked cam further comprises: an accommodating portion, being formed in the center of the interlocked cam, and used for connecting and accommodating the interlocking device; anda flow channel, being disposed inside the interlocked cam and connecting with the accommodating portion and the first connecting member. 3. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 2, further comprises at least one connecting rubber tube with a first end and a second end, wherein the first end accommodates the air intake/outtake valve and is used for connecting the first connecting member, the second end being connected to the air inflation sealing member. 4. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 3, wherein the air inflation sealing member further comprises at least one second connecting member connected to the second end of the connecting rubber rube. 5. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 2, wherein the air intake/outtake valve further comprises: a first air passage, capable of coupling to the flow channel for making the inflating gas provided by the air inflation member enter the first air passage via the flow channel;a central chamber, being connected to the first air passage;an O-ring, being disposed in the central chamber and located at the connecting junction of the central chamber and the first air passage;a sealing ball, being disposed in the central chamber and located over the O-ring;a second air passage, being connected to the central chamber and opposite to the first air passage, used for coupling to the air inflation sealing member;a plurality of ribs, being disposed in the central chamber and located at the connecting junction of the central chamber and the second air channel, therefore an air-guiding passage being formed between any two adjacent ribs. 6. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 3, wherein the first connecting member is a circular body, which is able to completely accommodate and cover the first end of the connecting rubber tube. 7. The sealing apparatus with interlocking air inflation device for the wafer carrier of claim 1, wherein the material of the air inflation sealing member is selected from the group consisting of: a polyolefin thermoplastic elastomer, a polyester thermoplastic elastomer and a rubber.