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Substrate transport apparatus

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B25J-018/00
출원번호 US-0117355 (2008-05-08)
등록번호 US-8267636 (2012-09-18)
발명자 / 주소
  • Hofmeister, Christopher
  • Caveney, Robert T.
출원인 / 주소
  • Brooks Automation, Inc.
대리인 / 주소
    Perman & Green, LLP
인용정보 피인용 횟수 : 3  인용 특허 : 58

초록

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second st

대표청구항

1. A substrate transport apparatus comprising: a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm;a second shaftless rotary motor including a second stator and a second rotor, the sec

이 특허에 인용된 특허 (58)

  1. Harris,Randy; Woodruff,Daniel J., Apparatus for manually and automatically processing microelectronic workpieces.
  2. Gandy James ; Ahmed Jubayer ; Janysek Don Ray, Apparatus for producing an image on a first side of a substrate and a mirror image on a second side of the substrate.
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  45. Morrison, Carlos R., Software for system for controlling a magnetically levitated rotor.
  46. Nishi, Kenji; Kiuchi, Toru, Stage apparatus, exposure apparatus and method for exposing substrate plate.
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  51. Begin Robert George ; Clarke Peter J., System for and method of providing a controlled deposition on wafers.
  52. Morrison,Carlos R., System for controlling a magnetically levitated rotor.
  53. Sakagami Seiji,JPX ; Mase Masahiro,JPX ; Urano Chiaki,JPX ; Koyano Shinji,JPX ; Kinoshita Yuichi,JPX ; Nagaoka ; deceased Takashi,JPX ITX by Kikue Nagaoka ; heiress, Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to.
  54. Miki Masaharu (Tokyo JPX) Urano Chiaki (Tokyo JPX), Turbo-molecular pump.
  55. Beyer, Christian; Engl?nder, Heinrich; Hodapp, Josef, Vacuum pump.
  56. Goodwin Dennis L. (Tempe AZ) Crabb Richard (Mesa AZ) Robinson McDonald (Paradise Valley AZ) Ferro Armand P. (Scottsdale AZ), Wafer handling system with bernoulli pick-up.
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  58. Ferrara,Joseph, Work-piece processing system.

이 특허를 인용한 특허 (3)

  1. Kodama, Toshiaki, Posture holding device for holding part.
  2. Hofmeister, Christopher; Caveney, Robert T., Substrate transport apparatus.
  3. Hiroki, Tsutomu; Kato, Toshinao, Transfer device, substrate processing system and posture control unit.
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