초록 ▼

An interposer includes a substrate, a conductive structure configured to contact the back side of a semiconductor device and contact pads. The interposer may include first and second sets of contact pads carried by the substrate. The interposer may also include conductive traces carried by the subst

An interposer includes a substrate, a conductive structure configured to contact the back side of a semiconductor device and contact pads. The interposer may include first and second sets of contact pads carried by the substrate. The interposer may also include conductive traces carried by the substrate to electrically connect corresponding contact pads of the first and second sets. The receptacles, which may be formed in a surface of the substrate and expose contacts of the second set, may be configured to at least partially receive conductive structures that are secured to the contact pads of the second set. Thus, the interposer may be useful in providing semiconductor device assemblies and packages of reduced height or profile. Such assemblies and packages are also described, as are multi-chip modules including such assemblies or packages. In addition, methods for designing and fabricating the interposer are disclosed, as are methods for forming assemblies, packages, and multi-chip modules that include the interposer.

대표청구항 ▼

1. A multi-chip module, comprising: an interposer including a substrate comprising, on a surface thereof, an attach region, a plurality of contact pads and conductive traces extending laterally between at least some contact pads of the plurality;a first semiconductor device disposed over the attach

1. A multi-chip module, comprising: an interposer including a substrate comprising, on a surface thereof, an attach region, a plurality of contact pads and conductive traces extending laterally between at least some contact pads of the plurality;a first semiconductor device disposed over the attach region;a second semiconductor device disposed over the first semiconductor device;intermediate conductive elements extending between bond pads of the first semiconductor device and contact pads of the plurality; andintermediate conductive elements extending between bond pads of the second semiconductor device and contact pads of the plurality. 2. The multi-chip module of claim 1, wherein the intermediate conductive elements comprise at least one of bond wires, leads and TAB elements carried on a dielectric film. 3. The multi-chip module of claim 1, further comprising an encapsulant material extending over at least portions of the first semiconductor device, the second semiconductor device, the intermediate conductive elements, and a portion of the interposer substrate. 4. The multi-chip module of claim 1, further comprising a die attach material disposed between the first semiconductor device and the attach region, and a die attach material disposed between the first semiconductor device and the second semiconductor device. 5. The multi-chip module of claim 1, further comprising electrically conductive structures in conductive communication with contact pads of the plurality and protruding from another surface of the interposer substrate opposite the surface. 6. The multi-chip module of claim 5, wherein at least some contact pads of the plurality are located over receptacles extending through the interposer substrate from the another surface, and the electrically conductive structures are partially received within receptacles in direct contact with the at least some contact pads of the plurality. 7. The multi-chip module of claim 5, wherein the electrically conductive structures are configured as at least one of balls, bumps, columns and pins, and comprise at least one of a metal, a metal alloy, a conductive elastomer and a conductor-filled elastomer. 8. The multi-chip module of claim 1, further comprising a conductive structure comprising at least one of a ground plane and a thermally conductive element proximate the attach region. 9. The multi-chip module of claim 8, wherein the conductive structure comprises at least a thermally conductive element, and further comprising at least one aperture extending through the interposer substrate from another surface thereof opposite the surface and exposing a surface of the thermally conductive element opposite the first semiconductor device, and thermally conductive structures in thermal communication with the thermally conductive element through the at least one aperture and including portions protruding beyond the another surface. 10. The multi-chip module of claim 9, further comprising a heat transfer element in thermal communication with protruding portions of at least some of the thermally conductive structures. 11. The multi-chip module of claim 1, further comprising a thermally conductive element disposed over and in thermal communication with the second semiconductor device. 12. The multi-chip module of claim 11, further comprising an encapsulant material extending over at least portions of the first semiconductor device, the second semiconductor device, the intermediate conductive elements, and a portion of the interposer substrate, wherein at least a portion of the thermally conductive element is exposed through the encapsulant material. 13. The multi-chip module of claim 1, wherein the plurality of contact pads comprises at least a first group of contact pads and a second group of contact pads, and the intermediate conductive elements extend between bond pads of each of the first semiconductor device and the second semiconductor device and contact pads of at least one of the first group and the second group. 14. The multi-chip module of claim 13, wherein the intermediate conductive elements extend between bond pads of each of the first semiconductor device and the second semiconductor device and contact pads of the first group. 15. The multi-chip module of claim 1, wherein at least one of the first semiconductor device and the second semiconductor device comprises a semiconductor die. 16. A semiconductor assembly, comprising: a semiconductor device assembly, comprising:a semiconductor die at least partially disposed within a receptacle of an interposer substrate;a first plurality of contact pads adjacent the receptacle;intermediate conductive elements extending between bond pads of the semiconductor die and contact pads of the first plurality;a second plurality of contact pads adjacent one side of the interposer substrate;a third plurality of contact pads adjacent another, opposing side of the interposer substrate;conductive traces extending between contact pads of the first plurality and contact pads of at least one of the second plurality and the third plurality;at least some contact pads of the second plurality in conductive communication with contact pads of the third plurality through intermediate conductive elements interposed therebetween; andconductive structures in contact with contact pads of the second plurality through apertures extending from the one side of the interposer substrate and protruding beyond the one side. 17. The semiconductor assembly of claim 16, further comprising: another semiconductor device assembly disposed over the semiconductor device assembly, and comprising:a semiconductor die at least partially disposed within a receptacle of an interposer substrate;a first plurality of contact pads adjacent the receptacle;intermediate conductive elements extending between bond pads of the semiconductor die and contacts of the first plurality;a second plurality of contact pads adjacent one side of the interposer substrate;a third plurality of contact pads adjacent another, opposing side of the interposer substrate;conductive traces extending between contact pads of the first plurality and contact pads of at least one of the second plurality and the third plurality; at least some contact pads of the second plurality in conductive communication with contact pads of the third plurality through intermediate conductive elements interposed therebetween; andconductive structures in contact with contact pads of the second plurality through apertures extending from the one side of the interposer substrate and protruding beyond the one side;contacts of the third plurality of the semiconductor device assembly in communication with contacts of the second plurality of the another semiconductor device assembly superimposed thereover through the conductive structures of the semiconductor device assembly extending therebetween. 18. The semiconductor assembly of claim 17, further comprising an encapsulant material disposed over at least the semiconductor die, the contact pads of the first plurality, the intermediate conductive elements and the contact pads of the third plurality of the semiconductor device assembly, the contact pads of the third plurality of the semiconductor device assembly exposed through apertures in the encapsulant material. 19. The semiconductor assembly of claim 18, further comprising an encapsulant material disposed over at least the semiconductor die, the contact pads of the first plurality, the intermediate conductive elements and the contact pads of the third plurality of the another semiconductor device assembly, the contact pads of the third plurality of the another semiconductor device assembly exposed through apertures in the encapsulant material. 20. A semiconductor die assembly, comprising: an interposer including a substrate having a plurality of laterally spaced attach regions on one side thereof;a semiconductor die secured to the substrate over at each of the attach regions;intermediate conductive elements extending between bond pads of each semiconductor die and conductors on the one side of the substrate;receptacles extending through the substrate from a side thereof opposite the side to undersides of at least some of the conductors; andconductive structures disposed in the receptacles in contact with the undersides of the at least some of the conductors and protruding from the opposite side of the substrate.